Crucible for growing sapphire single crystal, and method for producing crucible for growing sapphire single crystal

Patent metadata

Field	Value
Publication number	US-9803291-B2
Application number	US-201314430591-A
Country	US
Kind code	B2
Filing date	Sep 12, 2013
Priority date	Sep 28, 2012
Publication date	Oct 31, 2017
Grant date	Oct 31, 2017

Abstract

An object of this invention is to provide a crucible for growing a sapphire single crystal, which is optimized for providing a sapphire single crystal and is reusable. A crucible for growing a sapphire single crystal of this invention includes: a base material ( 3 ) containing molybdenum as a main component and having a crucible shape; and a coating layer ( 5 ) with which only an inner periphery of the base material ( 3 ) is coated and which is formed of tungsten and inevitable impurities, in which the coating layer ( 5 ) has a surface roughness Ra of 5 μm or more and 20 μm or less.

First claim

The invention claimed is:

1. A crucible for growing a sapphire single crystal, comprising:
a base material containing molybdenum as a main component and having a crucible shape; and
a coating layer with which an inner periphery of the base material is coated and which is formed of tungsten and inevitable impurities,
wherein the coating layer has a surface roughness Ra of 5 μm or more and 20 μm or less,
wherein a thickness of the coating layer is 50 μm or more and 300 μm or less, and
wherein the coating layer has in itself 10 or more and less than 100 pores in a region corresponding to an area of 50×50 μm in a cross-section of the base material in an axial direction.

2. A crucible for growing a sapphire single crystal according to claim 1 , wherein the base material is formed of molybdenum and inevitable impurities.

3. A crucible for growing a sapphire single crystal according to claim 1 , wherein the base material is formed of molybdenum doped with La or La oxide, and inevitable impurities.

4. A crucible for growing a sapphire single crystal according to claim 3 , wherein the base material includes crystal grains that exhibit an interlocking structure.

5. A crucible for growing a sapphire single crystal according to claim 1 , wherein the base material is formed of a tungsten-molybdenum alloy and inevitable impurities.

6. A crucible for growing a sapphire single crystal according to claim 1 , wherein the coating layer is formed only on the inner periphery of the base material.

7. A crucible for growing a sapphire single crystal according to claim 1 , wherein an inner surface of the base material has a 1° or more and less than 15°.

8. A crucible for growing a sapphire single crystal according to claim 1 , wherein the crucible is used for growing a sapphire single crystal by a heat exchange method (HEM method).

9. A method of producing the crucible for growing a sapphire single crystal of claim 1 , the method comprising:
(a) subjecting an inner periphery of a base material containing molybdenum as a main component and having a crucible shape to shot blasting; and
(b) forming a coating layer formed of tungsten and inevitable impurities on the inner periphery of the base material by thermal spraying.

10. A method of producing the crucible for growing a sapphire single crystal according to claim 9 , wherein the (a) comprises performing the shot blasting with particles passing through a 20-mesh sieve and remaining on a 60-mesh sieve.

11. A method of producing the crucible for growing a sapphire single crystal according to claim 9 , wherein the (b) comprises performing the thermal spraying at a moving speed of a thermal spraying nozzle of from 10 to 300 mm/sec and a deposition rate of the coating layer of from 20 to 100 μm per scan.

12. A method of producing the crucible for growing a sapphire single crystal according to claim 9 , the method further comprising (c) performing heat treatment at 1,000° C. or more in a vacuum of 10-1 Pa or less or a reducing atmosphere.

13. A method of producing the crucible for growing a sapphire single crystal according to claim 9 , wherein the (a) comprises removing particles remaining on a surface of the base material after the shot blasting.

14. A method of producing the crucible for growing a sapphire single crystal according to claim 13 , wherein the (a) comprises removing the particles remaining on the surface of the base material after the shot blasting by dissolving the inner periphery of the base material with a chemical solution.

15. A method of producing the crucible for growing a sapphire single crystal according to claim 13 , wherein the (a) comprises removing the particles remaining on the surface of the base material after the shot blasting by evaporating the particles together with the surface of the base material through heat treatment in a vacuum-atmosphere furnace.

16. A method of producing the crucible for growing a sapphire single crystal according to claim 13 , wherein the (a) comprises removing the particles remaining on the surface of the base material after the shot blasting by performing cleaning with ultrasonic or dry ice.

Assignees

• Almt Corp

Inventors

• Katoh Masahiro
• Watanabe Makoto

Classifications

• C30B29/20

  Aluminium oxides · CPC title

• C23C4/02

  Pretreatment of the material to be coated, e.g. for coating on selected surface areas · CPC title

• C23C4/18

  After-treatment · CPC title

• F27D2005/0075

  Pots, e.g. slag pots, ladles · CPC title

• Y10T117/1092

  Shape defined by a solid member other than seed or product [e.g., Bridgman-Stockbarger] · CPC title