Chemically amplified positive resist composition and resist pattern forming process
US-12164231-B2 · Dec 10, 2024 · US
US9803044B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9803044-B2 |
| Application number | US-201414773160-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 6, 2014 |
| Priority date | Mar 6, 2013 |
| Publication date | Oct 31, 2017 |
| Grant date | Oct 31, 2017 |
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Disclosed is a fluorine-containing oligomer comprising a copolymer of a fluoroalkyl alcohol (meth)acrylic acid derivative represented by the general formula: C n F 2n+1 (CH 2 CF 2 ) a (CF 2 CF 2 ) b (CH 2 CH 2 ) c OCOCR═CH 2 [I] wherein R is a hydrogen atom or a methyl group, n is an integer of 1 to 6, a is an integer of 1 to 4; b is an integer of 0 to 3; and c is an integer of 1 to 3; and a (meth)acrylic acid derivative represented by the general formula: (CH 2 ═CRCO) m R′ [II] wherein R is a hydrogen atom or a methyl group, m is 1, 2, or 3; and when m is 1, R′ is OH group, NH 2 group that is unsubstituted or mono- or di-substituted with an alkyl group having 1 to 6 carbon atoms, or a monovalent group derived from an alkylene glycol or polyalkylene glycol group containing an alkylene group having 2 or 3 carbon atoms; when m is 2 or 3, R′ is a divalent or trivalent organic group derived from a diol or triol. The copolymerization reaction is performed using a hydrocarbon-based peroxide or azo compound polymerization initiator. Also disclosed are nano-silica composite particles formed as a condensate of the fluorine-containing oligomer and an alkoxysilane with nano-silica particles.
Opening claim text (preview).
The invention claimed is: 1. Nano-silica composite particles formed as a condensate of a fluorine-containing oligomer and an alkoxysilane with nano-silica particles, wherein the fluorine-containing oligomer is a copolymer of a fluoroalkyl alcohol (meth)acrylic acid derivative represented by the general formula: C n F 2n+1 (CH 2 CF 2 ) a (CF 2 CF 2 ) b (CH 2 CH 2 ) c OCOCR═CH 2 [I] wherein R is a hydrogen atom or a methyl group, n is an integer of 1 to 6, a is 1; b is an integer of 1 to 3; and c is an integer of 1 to 3; and a (meth)acrylic acid derivative represented by the general formula: (CH 2 ═CRCO) m R′ [II] wherein R is a hydrogen atom or a methyl group, m is 1, 2, or 3; and when m is 1, R′ is OH group, NH 2 group that is unsubstituted or mono- or di-substituted with an alkyl group having 1 to 6 carbon atoms, or a monovalent group derived from an alkylene glycol or polyalkylene glycol group containing an alkylene group having 2 or 3 carbon atoms; when m is 2 or 3, R′ is a divalent or trivalent organic group derived from a diol or triol. 2. Nano-silica composite particles according to claim 1 , wherein the alkoxysilane is a silane derivative represented by the general formula: (R 1 O) p Si(OR 2 ) q (R 3 ) r [III] wherein R 1 and R 3 are each a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or an aryl group, R 2 is an alkyl group having 1 to 6 carbon atoms or an aryl group, proviso that not all of R 1 , R 2 , and R 3 are aryl groups; and p+q+r is 4, proviso that q is not 0. 3. Method for producing nano-silica composite particles, comprising reacting the fluorine-containing oligomer and an alkoxysilane according to claim 1 in the presence of nano-silica particles using an alkaline or acidic catalyst. 4. Method for producing nano-silica composite particles according to claim 3 , wherein 10 to 100 parts by weight of fluorine-containing oligomer and 0.1 to 100 parts by weight of alkoxysilane are used based on 100 parts by weight of nano-silica particles.
Esters containing halogen · CPC title
Esters · CPC title
Homopolymers or copolymers of esters containing halogen atoms · CPC title
Silica · CPC title
containing at least one Si—C bond · CPC title
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