Method of manufacturing light-emitting display device with reduced pressure drying

Patent metadata

Field	Value
Publication number	US-9799712-B2
Application number	US-201615209799-A
Country	US
Kind code	B2
Filing date	Jul 14, 2016
Priority date	Jan 15, 2016
Publication date	Oct 24, 2017
Grant date	Oct 24, 2017

Abstract

A method of manufacturing a light-emitting display device, the method including forming a first electrode on a substrate for each pixel of a plurality of pixels; forming a pixel defining film on the first electrode such that the pixel defining film includes an opening exposing the first electrode; and forming an organic layer on the first electrode, wherein forming the organic layer includes providing an organic solution into the opening of the pixel defining film, and drying the organic solution by performing an exhaust process in a state where an air current is provided by using a drying gas such that the air current is sequentially composed of a position facing the organic solution, a position to which the organic solution is discharged, and a position facing the organic solution.

First claim

What is claimed is:

1. A method of manufacturing a light-emitting display device, the method comprising:
forming a first electrode on a substrate for each pixel of a plurality of pixels;
forming a pixel defining film on the first electrode such that the pixel defining film includes an opening exposing the first electrode; and
forming an organic layer on the first electrode,
wherein forming the organic layer includes:
providing an organic solution into the opening of the pixel defining film, and
drying the organic solution by performing an exhaust process in a state where an air current is provided by using a drying gas such that the air current is sequentially composed of a position facing the organic solution, a position to which the organic solution is discharged, and a position facing the organic solution,
wherein:
drying the organic solution is performed in a chamber, and
drying the organic solution includes:
an initial drying process that includes lowering a pressure in the chamber from a first pressure to a second pressure as the air current is provided;
a diffusion process that includes maintaining the pressure in the chamber at the second pressure as the air current is provided; and
a residual solvent removing process that includes lowering the pressure in the chamber from the second pressure to a third pressure as the air current is provided.

2. The method as claimed in claim 1 , wherein:
the first pressure is ambient atmospheric pressure, the second pressure is 100 torr to 20 torr, and the third pressure is 10 −1 torr to 10 −4 torr, and
the drying gas that forms the air current is supplied to the chamber at a flow rate of 3 standard liter per minute (SLM) to 5 SLM.

3. The method as claimed in claim 2 , wherein:
the initial drying process is performed for 15 sec to 60 sec, and
the diffusion process is performed for 300 sec to 600 sec.

4. The method as claimed in claim 2 , wherein the diffusion process further includes heating the substrate to 80° C. to 100° C. using a heating device.

5. The method as claimed in claim 1 , wherein the initial drying process includes lowering the pressure in the chamber from ambient atmospheric pressure to 100 torr for 60 sec while supplying the drying gas at a flow rate of 3 SLM.

6. The method as claimed in claim 5 , wherein the diffusion process includes maintaining the pressure in the chamber at 100 torr for 300 sec while supplying the drying gas at a flow rate of 3 SLM.

7. The method as claimed in claim 1 , wherein the drying gas includes N 2 gas, Ar gas, H 2 gas, CO gas, or combinations thereof.

8. The method as claimed in claim 1 , wherein the drying gas used in the initial drying process, the diffusion process, and the residual solvent removing process is N 2 gas.

9. The method as claimed in claim 8 , wherein the organic solution includes a mixed solvent of ethane-1,2-diol, H 2 O, and propanol alkyl ether; a mixed solvent of diethylene glycol, a humectant, propanol, an inorganic additive, and perfluorinated polysulfonic acid; a mixed solvent that includes 1,3-dimethyl-2-imidazolidinone (DMI); a mixed solvent that includes cyclohexanol; a mixed solvent of 4-methylanisole, methyl 1-naphthyl ether, and 2-pyrrolidone; a mixed solvent of 1,2,3,4-tetrahydronaphthalene, methyl 1-naphthyl ether, 2-pyrrolidone, and perfluoralkylalkane; a mixed solvent of 4-methylanisole and cyclohexylbenzene; or a mixed solvent of methyl benzoate and diethyl phthalate.

10. The method as claimed in claim 1 , wherein the drying gas used in the initial drying process, the diffusion process, and the residual solvent removing process is N 2 +H 2 gas or N 2 +CO gas.

11. The method as claimed in claim 10 , wherein the organic solution includes a mixed solvent of diethylene glycol, a humectant, propanol, an inorganic additive, and perfluorinated polysulfonic acid; a mixed solvent that includes DMI; a mixed solvent that includes cyclohexanol; a mixed solvent of 4-methylanisole, methyl 1-naphthyl ether, and 2-pyrrolidone; a mixed solvent of 1,2,3,4-tetrahydronaphthalene, methyl 1-naphthyl ether, 2-pyrrolidone, and perfluoralkylalkane; a mixed solvent of 4-methylanisole and cyclohexylbenzene; or a mixed solvent of methyl benzoate and diethyl phthalate.

12. The method as claimed in claim 1 , wherein:
the drying gas used in the initial drying process and the residual solvent removing process is N 2 +H 2 gas or N 2 +CO gas, and
the drying gas used in the diffusion process is N 2 gas.

13. The method as claimed in claim 12 , wherein the organic layer includes poly(3,4-ethylenedioxythiophene)/polystyrene sulfonate; N,N′-di-1-naphthyl-N,N′-diphenyl-1,1′-biphenyl-4,4′-diamine; poly(3,4-ethylenedioxythiophene); N,N′-di(naphthalen-1-yl)-N,N′-diphenyl-benzidine; tris(8-quinolinorate)aluminum; or poly(p-phenylenevinylene).

14. The method as claimed in claim 1 , wherein the organic layer includes a hole injection layer on the first electrode; a hole transport layer on the hole injection layer; or an emission layer on the hole transport layer.

15. A method of forming an organic film pattern, the method comprising:
forming a bank on a substrate such that the bank defines a plurality of openings;
providing an organic solution into the openings; and
drying the organic solution by performing an exhaust process in a state where an air current is provided by using a drying gas such that the air current is sequentially composed of a position facing the organic solution, a position to which the organic solution is discharged, and a position facing the organic solution,
wherein:
drying the organic solution is performed in a chamber, and
drying the organic solution includes:
an initial drying process that includes lowering a pressure in the chamber from a first pressure to a second pressure as the air current is provided;
a diffusion process that includes maintaining the pressure in the chamber at the second pressure as the air current is provided; and
a residual solvent removing process that includes lowering the pressure in the chamber from the second pressure to a third pressure as the air current is provided.

16. The method as claimed in claim 15 , wherein:
the first pressure is ambient atmospheric pressure, the second pressure is 100 torr to 20 torr, and the third pressure is 10 −1 torr to 10 −4 torr, and
the drying gas forming the air current is supplied to the chamber at a flow rate of 3 standard liter per minute (SLM) to 5 SLM.

17. The method as claimed in claim 15 , wherein the diffusion process further includes heating the substrate to 80° C. to 100° C. using a heating device.

18. The method as claimed in claim 15 , wherein the drying gas is N 2 gas, Ar gas, H 2 gas, CO gas, or combinations thereof.

Assignees

• Samsung Display Co Ltd

Inventors

• Kishimoto Katsushi
• Kitabayashi Atsushi
• Hwang Jae Kwon

Classifications

• H01L51/0026

  Electricity · mapped topic

• H01L2227/323

  Electricity · mapped topic

• H01L51/5056

  Electricity · mapped topic

• H01L51/56

  Electricity · mapped topic

• H01L51/0037

  Electricity · mapped topic