Isolation structure in photodiode

Patent metadata

Field	Value
Publication number	US-9799696-B1
Application number	US-201615293149-A
Country	US
Kind code	B1
Filing date	Oct 13, 2016
Priority date	Oct 13, 2016
Publication date	Oct 24, 2017
Grant date	Oct 24, 2017

Abstract

An image sensor includes a semiconductor material with a photodiode disposed in the semiconductor material. The image sensor also includes a transfer gate electrically coupled to the photodiode to extract image charge from the photodiode in response to a transfer signal. A floating diffusion is electrically coupled to the transfer gate to receive the image charge from the photodiode. At least one isolation structure is disposed in the photodiode, and the at least one isolation structure extends from a surface of the semiconductor material into the photodiode.

First claim

What is claimed is:

1. An image sensor, comprising:
a semiconductor material including a photodiode disposed in the semiconductor material;
a transfer gate electrically coupled to the photodiode to extract image charge from the photodiode in response to a transfer signal;
a floating diffusion electrically coupled to the transfer gate to receive the image charge from the photodiode; and
at least one isolation structure disposed in the photodiode, wherein the at least one isolation structure extends from a surface of the semiconductor material into the photodiode, and wherein the at least one isolation structure is vertically disposed proximate to a center of the photodiode.

2. The image sensor of claim 1 , wherein the at least one isolation structure includes a liner material and a core material, and wherein the liner material is disposed between the photodiode and the core material.

3. The image sensor of claim 2 , wherein the isolation structure induces a charge in the semiconductor material at an interface of the at least one isolation structure and the photodiode, and wherein the charge is opposite a majority charge carrier type of a bulk of the photodiode.

4. The image sensor of claim 3 , wherein the liner material includes at least one of a high k-oxide or a doped semiconductor material.

5. The image sensor of claim 1 , wherein image light is incident on a backside of the image sensor, and wherein the at least one isolation structure extends from the backside of the semiconductor material into the photodiode.

6. The image sensor of claim 5 , further comprising a second isolation structure that extends from a frontside of the semiconductor material into the photodiode, and wherein the second isolation structure is aligned with the at least one isolation structure, and wherein a portion of the photodiode is disposed between the second isolation structure and the at least one isolation structure.

7. The image sensor of claim 6 , wherein the second isolation structure has a smaller cross sectional area than the at least one isolation structure.

8. The image sensor of claim 1 , wherein image light is incident on a frontside of the image sensor, and wherein the at least one isolation structure extends from the frontside of the semiconductor material into the photodiode.

9. The image sensor of claim 1 , wherein the at least one individual isolation structure is disposed in the photodiode to position a highest energy point in the photodiode proximate to the transfer gate to reduce a voltage needed to extract the image charge from the photodiode in response to the transfer signal.

10. The image sensor of claim 1 , wherein the at least one individual isolation structure is substantially columnar and laterally surrounded by the photodiode.

11. An imaging system, comprising:
a plurality of photodiodes disposed in a semiconductor material, wherein the semiconductor material has a frontside and a backside opposite the frontside;
a plurality of transfer gates to transfer image charge from the plurality of photodiodes to one or more floating diffusions; and
a plurality of isolation structures, wherein at least one individual isolation structure in the plurality of isolation structures is disposed in an individual photodiode in the plurality of photodiodes, wherein the at least one individual isolation structure is vertically disposed proximate to a center of the individual photodiode, and wherein the at least one individual isolation structure includes:
a core material extending from a surface of the semiconductor material into the semiconductor material a first depth; and
a lining material disposed between the core material and the semiconductor material, wherein an interface between the semiconductor material and the lining material is charged.

12. The imaging system of claim 11 , wherein a charge at the interface has an opposite sign as a majority charge carrier type of a largest doped region of the individual photodiode.

13. The imaging system of claim 11 , wherein image light is incident on the backside of the semiconductor material, and wherein the plurality of isolation structures extends from the backside of the semiconductor material into the semiconductor material.

14. The imaging system of claim 13 , wherein a second isolation structure in the plurality of isolation structures extends from the frontside of the semiconductor material into the semiconductor material, and wherein a portion of the photodiode extends between the second isolation structure and the at least one individual isolation structure.

15. The imaging system of claim 14 , wherein the second isolation structure extends through a pinning well disposed proximate to the frontside of the semiconductor material.

16. The imaging system of claim 14 , wherein a cross sectional area of the second isolation structure is less than a cross sectional area of the at least one individual isolation structure.

17. The imaging system of claim 11 , wherein image light is incident on the frontside of the semiconductor material, and wherein the plurality of isolation structures extends from the frontside of the semiconductor material into the semiconductor material.

18. The imaging system of claim 17 , wherein the plurality of isolation structures extends through a plurality of pinning wells disposed proximate to the frontside of the semiconductor material.

19. The imaging system of claim 11 , further comprising:
a reset transistor electrically coupled to the one or more floating diffusions to extract image charge from the one or more floating diffusions;
an amplifier transistor coupled to the one or more floating diffusions to amplify the image charge on the one or more floating diffusions; and
a row select transistor electrically coupled to the amplifier transistor.

20. The imaging system of claim 11 , wherein the first depth is less than a thickness of the semiconductor material.

Assignees

• Omnivision Tech Inc

Inventors

• Tai Dyson H
• Mao Duli
• Yang Cunyu
• Chen Gang

Classifications

• H01L27/1463

  Electricity · mapped topic

• H01L27/1461

  Electricity · mapped topic

• H01L27/1464

  Electricity · mapped topic

• H01L27/14643 Primary

  Electricity · mapped topic

• H01L27/14612

  Electricity · mapped topic