Light absorption apparatus

Patent metadata

Field	Value
Publication number	US-9799689-B2
Application number	US-201615147847-A
Country	US
Kind code	B2
Filing date	May 5, 2016
Priority date	Nov 13, 2014
Publication date	Oct 24, 2017
Grant date	Oct 24, 2017

Abstract

A light absorption apparatus includes a substrate, a light absorption layer above the substrate on a first selected area, a silicon layer above the light absorption layer, a spacer surrounding at least part of the sidewall of the light absorption layer, an isolation layer surrounding at least part of the spacer, wherein the light absorption apparatus can achieve high bandwidth and low dark current.

First claim

What is claimed is:

1. A method for forming a light absorption apparatus, the method comprising:
forming a stopping layer atop a substrate;
forming an additional substrate layer atop the stopping layer;
forming a photosensitive structure above the additional substrate layer;
creating an opening on a backside of the substrate to expose a portion of the stopping layer; and
forming, through the opening on the backside of the substrate, a reflector layer below the photosensitive structure,
wherein the stopping layer comprises one or more of: a dielectric material including oxide or nitride, silicon carbide (SiC), carbon-doped silicon (Si), silicon germanium (SiGe), carbon-doped SiGe, or carbon-doped Ge.

2. The method of claim 1 , wherein the reflector layer is configured to reflect light into the photosensitive structure.

3. The method of claim 1 , wherein forming the reflector layer comprises:
forming a dielectric mirror layer below the exposed portion of the stopping layer; and
forming a metal mirror layer below the dielectric mirror layer.

4. The method of claim 1 , wherein the reflector layer is below the exposed portion of the stopping layer.

5. The method of claim 1 , further comprising:
before forming the reflector layer, removing at least a portion of the stopping layer.

6. The method of claim 5 , wherein forming the reflector layer comprises:
forming a dielectric mirror layer at a level of the portion of the stopping layer that is removed; and
forming a metal mirror layer below the dielectric mirror layer.

7. The method of claim 1 , wherein the reflector layer is at a same level as the exposed portion of the stopping layer.

8. The method of claim 1 , further comprising:
before forming the reflector layer, converting at least a portion of the stopping layer to another material.

9. The method of claim 8 , wherein the converting comprises an oxidation process, and wherein the another material is an oxide.

10. The method of claim 1 , wherein forming the additional substrate layer comprises:
opening holes on the exposed portion of the stopping layer;
forming, from the backside of the substrate and through the opened holes, a seed layer of substrate material atop the stopping layer; and
forming remainder of the additional substrate layer atop the seed layer.

11. The method of claim 1 , further comprising:
before forming the photosensitive structure, forming a contamination protection layer on the backside of the substrate.

12. The method of claim 11 , wherein the contamination protection layer comprises oxide or nitride.

13. The method of claim 11 , further comprising:
removing at least a portion of the contamination protection layer on the backside of the substrate after forming the photosensitive structure.

14. A light absorption apparatus comprising:
a substrate;
a stopping layer atop a substrate;
an additional substrate layer atop the stopping layer;
a photosensitive structure above the additional substrate layer;
an opening on a backside of the substrate with a portion of the stopping layer exposed by the opening; and
a reflector layer below or at the same level as the exposed portion of the stopping layer,
wherein the stopping layer comprises one or more of: a dielectric material including oxide or nitride, silicon carbide (SiC), carbon-doped silicon (Si), silicon germanium (SiGe), carbon-doped SiGe, or carbon-doped Ge.

15. The apparatus of claim 14 , wherein the reflector layer is configured to reflect light into the photosensitive structure.

16. The apparatus of claim 14 , wherein the reflector layer comprises:
a dielectric mirror layer below or at the same level as the exposed portion of the stopping layer; and
a metal mirror layer below the dielectric mirror layer.

17. The apparatus of claim 14 , wherein the reflector layer is below the exposed portion of the stopping layer.

18. The apparatus of claim 14 , wherein the additional substrate layer comprises:
vertical holes in the exposed portion of the stopping layer.

19. The apparatus of claim 14 , further comprising:
a contamination protection layer on the backside of the substrate.

20. The apparatus of claim 19 , wherein the contamination protection layer comprises oxide or nitride.

21. A light absorption apparatus comprising:
a substrate;
a stopping layer atop a substrate;
an additional substrate layer atop the stopping layer;
a photosensitive structure above the additional substrate layer;
an opening on a backside of the substrate with a portion of the stopping layer exposed by the opening; and
a reflector layer below or at the same level as the exposed portion of the stopping layer,
wherein the additional substrate layer comprises vertical holes in the exposed portion of the stopping layer.

22. The apparatus of claim 21 , wherein the reflector layer is configured to reflect light into the photosensitive structure.

23. The apparatus of claim 21 , wherein the reflector layer comprises:
a dielectric mirror layer below or at the same level as the exposed portion of the stopping layer; and
a metal mirror layer below the dielectric mirror layer.

24. The apparatus of claim 21 , wherein the reflector layer is below the exposed portion of the stopping layer.

25. The apparatus of claim 14 , wherein the stopping layer comprises one or more of: a dielectric material including oxide or nitride, silicon carbide (SiC), carbon-doped silicon (Si), silicon germanium (SiGe), carbon-doped SiGe, or carbon-doped Ge.

26. The apparatus of claim 21 , further comprising:
a contamination protection layer on the backside of the substrate.

27. The apparatus of claim 26 , wherein the contamination protection layer comprises oxide or nitride.

Assignees

• Artilux Inc
• Artilux Inc

Inventors

• Cheng Szu-Lin
• Chen Shu-Lu

Classifications

• H01L31/1808

  Electricity · mapped topic

• H01L31/1868

  Electricity · mapped topic

• H01L31/02327

  Electricity · mapped topic

• H01L31/105

  Electricity · mapped topic

• H01L31/02161

  Electricity · mapped topic