Edge exclusion control with adjustable plasma exclusion zone ring

Patent metadata

Field	Value
Publication number	US-9799496-B2
Application number	US-201514920821-A
Country	US
Kind code	B2
Filing date	Oct 22, 2015
Priority date	Jul 19, 2012
Publication date	Oct 24, 2017
Grant date	Oct 24, 2017

Abstract

Systems and methods for edge exclusion control are described. One of the systems includes a plasma chamber. The plasma processing chamber includes a lower electrode having a surface for supporting a substrate. The lower electrode is coupled with a radio frequency (RF) power supply. The plasma processing chamber further includes an upper electrode disposed over the lower electrode. The upper electrode is electrically grounded. The plasma processing chamber includes an upper dielectric ring surrounding the upper electrode. The upper dielectric ring is moved using a mechanism for setting a vertical position of the upper dielectric ring separate from a position of the upper electrode. The system further includes an upper electrode extension surrounding the upper dielectric ring. The upper electrode extension is electrically grounded. The system also includes a lower electrode extension surrounding the lower dielectric ring. The lower electrode extension is arranged opposite the upper electrode extension.

First claim

The invention claimed is:

1. A plasma chamber, comprising:
a lower electrode having a surface for supporting a substrate, the lower electrode coupled with a radio frequency (RF) power supply;
an upper electrode disposed over the lower electrode, the upper electrode being electrically grounded;
an upper dielectric ring surrounding the upper electrode, the upper dielectric ring adjusted using a mechanism for setting a vertical position of the upper dielectric ring;
an upper electrode extension surrounding the upper dielectric ring, the upper electrode extension being electrically grounded;
a lower dielectric ring surrounding the lower electrode, the lower dielectric ring set at a level that is below a level of the surface of the lower electrode; and
a lower electrode extension surrounding the lower dielectric ring, the lower electrode extension arranged opposite the upper electrode extension;
wherein an edge processing region is defined between the upper and lower dielectric rings and the upper and lower electrode extensions, and when the substrate is present on the surface of the lower electrode, an edge of the substrate extends into the edge processing region.

2. The chamber of claim 1 , wherein the mechanism for setting the vertical position of the upper dielectric ring has positions that place the upper dielectric ring closer toward the lower dielectric ring or away from the lower dielectric ring.

3. The chamber of claim 1 , wherein upper dielectric ring is settable into positions that (a) are substantially parallel to the upper electrode, (b) protrude past a level of the upper electrode and toward the lower dielectric ring, or (c) are recessed away from a level of the upper electrode and away from the lower dielectric ring.

4. The chamber of claim 1 , wherein the vertical position is along an orientation that is substantially perpendicular to the surface of the lower electrode.

5. The chamber of claim 1 , wherein the vertical position is controlled by controlling the upper dielectric ring at a plurality of points on a top surface of the upper dielectric ring.

6. The chamber of claim 1 , wherein the vertical position is controlled to modify an area covered by the edge processing region, wherein the area defines an amount of area of the edge of the substrate that is processed.

Assignees

• Lam Res Corp

Inventors

• Kim Keechan
• Kim Yansung

Classifications

• H01J37/32862 Primary

  In situ cleaning of vessels and/or internal parts · CPC title

• H01J37/32568

  Relative arrangement or disposition of electrodes; moving means · CPC title

• H01J37/32623

  Mechanical discharge control means · CPC title

• B08B7/0035

  by radiant energy, e.g. UV, laser, light beam or the like · CPC title

• H01J2237/334

  Etching · CPC title