Devices including at least one adhesion layer and methods of forming adhesion layers

Patent metadata

Field	Value
Publication number	US-9799353-B2
Application number	US-201514845317-A
Country	US
Kind code	B2
Filing date	Sep 4, 2015
Priority date	Jun 24, 2013
Publication date	Oct 24, 2017
Grant date	Oct 24, 2017

Abstract

A device that includes a near field transducer (NFT), the NFT having a disc and a peg, and the peg having an air bearing surface thereof; and at least one adhesion layer positioned on at least the air bearing surface of the peg, the adhesion layer including one or more of platinum (Pt), iridium (Ir), ruthenium (Ru), rhodium (Rh), palladium (Pd), yttrium (Y), chromium (Cr), nickel (Ni), and scandium (Sc).

First claim

What is claimed is:

1. A device comprising:
a near field transducer (NFT), the NFT having a disc and a peg, and the peg having an air bearing surface thereof; and
at least one adhesion layer positioned on at least the air bearing surface of the peg, the adhesion layer comprising one or more of platinum (Pt), iridium (Ir), ruthenium (Ru), rhodium (Rh), palladium (Pd), yttrium (Y), chromium (Cr), nickel (Ni), and scandium (Sc).

2. The device according to claim 1 , wherein the NFT comprises gold or an alloy thereof.

3. The device according to claim 1 further comprising an adhesion layer on a surface of the peg that is along an axis having a core of a waveguide and a write pole.

4. The device according to claim 3 , wherein the adhesion layer is located adjacent the core of the waveguide.

5. The device according to claim 3 further comprising at least one additional adhesion layer located on a surface of the peg that is perpendicular to the axis having the core and the write pole.

6. The device according to claim 1 , wherein the peg has five surfaces thereof and all five surfaces of the peg have an adhesion layer thereon.

7. The device according to claim 1 , wherein the at least one adhesion layer has a thickness from about 0.1 nm to about 100 nm.

8. The device according to claim 1 , wherein the at least one adhesion layer has a thickness from about 0.2 nm to about 5 nm.

9. The device according to claim 1 , wherein the at least one adhesion layer has a thickness from 0.2 nm to 3.5 nm.

10. A device comprising:
an energy source;
a near field transducer (NFT) configured to receive energy from the energy source, the NFT having a disc and a peg, and the peg having an air bearing surface; and
at least one adhesion layer positioned on at least the air bearing surface of the peg, the adhesion layer comprising one or more of platinum (Pt), iridium (Ir), ruthenium (Ru), rhodium (Rh), palladium (Pd), yttrium (Y), chromium (Cr), nickel (Ni), and scandium (Sc).

11. The device according to claim 10 , wherein the energy source comprises a laser.

12. The device according to claim 10 further comprising a waveguide, the waveguide configured to receive the energy from the energy source and couple it into the NFT.

13. The device according to claim 12 further comprising at least one additional adhesion layer located on a surface of the peg that is along an axis having the core of the waveguide.

14. The device according to claim 10 , wherein the at least one adhesion layer comprises tantalum oxide, titanium oxide, tin oxide, indium oxide, or combinations thereof.

15. A method of forming a device comprising:
forming an underlying dielectric material to be adhered to;
then forming an adhesion layer on the underlying dielectric material, the adhesion layer comprising one or more of platinum (Pt), iridium (Ir), ruthenium (Ru), rhodium (Rh), palladium (Pd), yttrium (Y), chromium (Cr), nickel (Ni), and scandium (Sc); and
then forming a near field transducer (NFT) on the adhesion layer;
wherein the adhesion layer is deposited between the underlying dielectric material to be adhered to and the NFT.

16. A method of forming a device comprising: forming a near field transducer (NFT),
then forming an adhesion layer on the NFT, the adhesion layer comprising one or more of platinum (Pt), iridium (Ir), ruthenium (Ru), rhodium (Rh), palladium (Pd), yttrium (Y), chromium (Cr), nickel (Ni), and scandium (Sc); and
then forming an overlying dielectric material on the adhesion layer.

17. The method according to claim 15 , wherein forming the NFT comprises depositing a NFT material, then trimming the deposited NFT material and at least some of the adhesion layer when forming the NFT.

18. The method according to claim 17 further comprising depositing additional adhesion layer material on the NFT after trimming.

19. The method according to claim 18 further comprising depositing an overlying dielectric layer on the additionally deposited adhesion layer material.

Assignees

• Seagate Technology Llc

Inventors

• Cheng Yuhang
• Zhao Tong
• Kautzky Michael C
• Rejda Ed F
• Wierman Kurt W
• Franzen Scott
• Boyne Andrew J
• Seigler Michael Allen
• Jayashankar Sethuraman

Classifications

• G11B5/314 Primary

  where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers (G11B5/3196 takes precedence) · CPC title

• G11B5/851

  Coating a support with a magnetic layer by sputtering · CPC title

• G11B7/1387

  using the near-field effect · CPC title

• G11B5/84

  Processes or apparatus specially adapted for manufacturing record carriers · CPC title

• G11B2005/0021

  Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal · CPC title