Method of extracting properties of a layer on a wafer
US-2024234216-A9 · Jul 11, 2024 · US
US9797829B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9797829-B2 |
| Application number | US-201615098895-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 14, 2016 |
| Priority date | Oct 17, 2013 |
| Publication date | Oct 24, 2017 |
| Grant date | Oct 24, 2017 |
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A method for assessing damage to a composite material covered with a polyurethane-type paint is provided. Two separate criteria are measured on a spectrogram obtained by infrared spectrometry, thereby characterizing thermal ageing of the paint, each separate criteria being a measurement on a curve of a spectrum of the spectrogram of a height of a particular peak, thereby giving two independent assessments of the thermal ageing. Then, the two separate criteria are combined together in order to obtain a result of a level of the damage.
Opening claim text (preview).
What is claimed is: 1. A method for assessing damage to a composite material covered with a polyurethane-type paint comprising: bringing an apparatus into contact with the composite material, measuring two separate criteria on a same spectrogram obtained by infrared spectrometry, thereby characterizing thermal ageing of the paint, each separate criteria comprising a measurement on a curve of a spectrum of the same spectrogram of a height of a particular peak, thereby giving two independent assessments of the thermal ageing and combining the two separate criteria to obtain a result of a level of the damage to the composite material without destruction of the composite material. 2. The assessment method according to claim 1 , wherein in order to obtain a first criterion of the two separate criteria, the height of the particular peak is measured relative to a base line passing through a first two immediately adjacent troughs on each side of the peak. 3. The assessment method according to claim 1 , wherein in order to obtain a second criterion of the two separate criteria, the height of the particular peak is measured relative to a base line passing through a first two significant troughs on each side of the peak. 4. The assessment method according to claim 1 , wherein the two separate criteria are disposed along two axes of a graph in order to determine a level of thermal degradation of the composite material. 5. The method according to claim 1 , wherein a wave number of the particular peak is about 1300/cm. 6. The method according to claim 5 , wherein a wave number of the particular peak is between 1288 and 1314/cm. 7. The assessment method according to claim 5 , wherein in order to obtain a first criterion of the two separate criteria, the height of the particular peak is measured relative to a base line passing through a first two immediately adjacent troughs on each side of the peak, and in order to obtain the first criterion, a first trough of one of the adjacent troughs between 1322 and 1374/cm is considered, and a second trough of the adjacent troughs between 1236 and 1247/cm is considered, the value 1247/cm being retained if the second trough is not pronounced on the curve. 8. The assessment method according to claim 5 , wherein in order to obtain a first criterion of the two separate criteria, the height of the particular peak is measured relative to a base line passing through a first two immediately adjacent troughs on each side of the peak, and in a case where the particular peak is no longer observable, a largest height between the base line and the curve is measured between 1288 and 1314/cm, in order to obtain the first criterion that is negative. 9. The assessment method according to claim 5 , wherein in order to obtain a second criterion of the two separate criteria, the height of the particular peak is measured relative to a base line passing through a first two significant troughs on each side of the peak, and in order to obtain the second criterion, a first significant trough between 1951 and 2051/cm and a second significant trough between 901 and 1102/cm are considered. 10. The assessment method according to claim 9 , wherein in a case where the particular peak is no longer observable, then a height between the base line and the curve at a 1288/cm value is measured, in order to obtain the second criterion.
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