Semiconductor inspection and metrology system using laser pulse multiplier

Patent metadata

Field	Value
Publication number	US-9793673-B2
Application number	US-201213487075-A
Country	US
Kind code	B2
Filing date	Jun 1, 2012
Priority date	Jun 13, 2011
Publication date	Oct 17, 2017
Grant date	Oct 17, 2017

Abstract

A pulse multiplier includes a polarizing beam splitter, a wave plate, and a set of mirrors. The polarizing beam splitter receives an input laser pulse. The wave plate receives light from the polarized beam splitter and generates a first set of pulses and a second set of pulses. The first set of pulses has a different polarization than the second set of pulses. The polarizing beam splitter, the wave plate, and the set of mirrors create a ring cavity. The polarizing beam splitter transmits the first set of pulses as an output of the pulse multiplier and reflects the second set of pulses into the ring cavity. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.

First claim

The invention claimed is:

1. A pulse multiplier for converting input laser pulses transmitted at an input repetition pulse frequency into output pulsed light having an output repetition frequency that is greater than the input pulse frequency, the pulse multiplier comprising:
a polarizing beam splitter positioned to receive each input laser pulse of the input laser pulses;
a wave plate positioned to receive light from the polarized beam splitter and configured to generate a first set of pulses and a second set of pulses, the first set of pulses having a different polarization than the second set of pulses; and
a set of mirrors configured to create a ring cavity including the polarizing beam splitter and the wave plate,
wherein the polarizing beam splitter is configured to transmit all light of said each input laser pulse into the ring cavity, to transmit the first set of pulses such that the first set of pulses exit the ring cavity and form said output pulsed light, and to reflect the second set of pulses into the ring cavity, and
wherein the ring cavity is configured such that the first set of pulses exiting the pulse multiplier have an output repetition pulse frequency that is at least double the input repetition pulse frequency.

2. The pulse multiplier of claim 1 , wherein the wave plate includes a half-wave plate.

3. The pulse multiplier of claim 2 , wherein the half-wave plate is set at 27.3678 degrees.

4. The pulse multiplier of claim 1 , wherein the wave plate includes a quarter-wave plate.

5. The pulse multiplier of claim 1 , further including a lens for uniformly shaping the pulses in the ring cavity.

6. The pulse multiplier of claim 1 , further including a plurality of lenses for uniformly shaping the pulses in the ring cavity.

7. The pulse multiplier of claim 6 , wherein the plurality of lenses is implemented with two image relay tubes.

8. The pulse multiplier of claim 6 , wherein the plurality of lenses consists of two or four lenses.

9. The pulse multiplier of claim 1 , wherein the mirror set includes a composite mirror.

10. The pulse multiplier of claim 1 , wherein the mirror set creates two ring cavities that share the polarizing beam splitter and the wave plate.

11. A system comprising:
a pulse multiplier for converting input laser pulses transmitted at an input repetition pulse frequency into output pulsed light having an output repetition frequency that is greater than the input pulse frequency, the pulse multiplier including:
a polarizing beam splitter positioned to receive each input laser pulse of the input laser pulses;
a wave plate positioned to receive light from the polarized beam splitter and configured to generate a first set of pulses and a second set of pulses, the first set of pulses having a different polarization than the second set of pulses; and
a set of mirrors configured to create a ring cavity including the polarizing beam splitter and the wave plate,
wherein the polarizing beam splitter is configured to transmit all light of said each input laser pulse into the ring cavity, to transmit the first set of pulses such that the first set of pulses exit the ring cavity and form said output pulsed light, and to reflect the second set of pulses into the ring cavity, and
wherein the ring cavity is configured such that the first set of pulses exiting the pulse multiplier have an output repetition pulse frequency that is at least double the input repetition pulse frequency.

12. The system of claim 11 , wherein the system implements one of an unpatterned wafer inspection system, a patterned wafer inspection system, a mask inspection system, or a metrology system.

Assignees

• Chuang Yung-Ho
• Armstrong J Joseph
• Liou Justin Dianhuan
• Dribinski Vladimir
• Brown David L
• Kla Tencor Corp

Inventors

• Chuang Yung-Ho
• Armstrong J Joseph
• Liou Justin Dianhuan
• Dribinski Vladimir
• Brown David L

Classifications

• G01N2201/0697

  Pulsed lasers · CPC title

• G02B5/3083

  Birefringent or phase retarding elements (G02B5/3008, G02B5/3016 take precedence; systems for polarisation control G02B27/286; manufacturing phase modulating patterns by lithographic processes G03F7/001) · CPC title

• H01S3/0057 Primary

  Temporal shaping, e.g. pulse compression, frequency chirping (soliton generation and propagation G02F1/3513, H01S3/063 and H01S3/108) · CPC title

• G02B5/0816

  Multilayer mirrors, i.e. having two or more reflecting layers (G02B5/0883, G02B5/0891 take precedence) · CPC title

• G02B27/283

  used for beam splitting or combining · CPC title