Method of manufacturing optoelectronic components and device for manufacturing optoelectronic components

Patent metadata

Field	Value
Publication number	US-9793445-B2
Application number	US-201314400668-A
Country	US
Kind code	B2
Filing date	May 24, 2013
Priority date	May 25, 2012
Publication date	Oct 17, 2017
Grant date	Oct 17, 2017

Abstract

A method of manufacturing optoelectronic components includes spraying a fluorescent layer of an optoelectronic component onto a substrate, the substance or the substance mixture of the fluorescent layer including an electric charge when sprayed on, and wherein the electrically charged substance or the at least partially electrically charged substance mixture includes a larger electric potential when the fluorescent layer is sprayed on than at least one area of the substrate; and locally adjusting the thickness of the fluorescent layer of the sprayed-on fluorescent substance when spraying on the fluorescent layer onto the substrate by an electric potential gradient.

First claim

The invention claimed is:

1. A method of manufacturing optoelectronic components comprising:
spraying an electrically charged substance or an at least partially electrically charged substance mixture through a nozzle under pressure onto a substrate to form a fluorescent layer comprising an electric charge when sprayed on, wherein the electrically charged substance or the at least partially electrically charged substance mixture occupies a space wherein the electric potential is greater than the electrical potential of the substrate;
locally adjusting the thickness of the fluorescent layer of the sprayed-on fluorescent substance when spraying on the fluorescent layer onto the substrate by an electric potential gradient;
measuring a local layer thickness of the applied fluorescent layer; and
locally adjusting an amount of the electrically charged substance or the at least partially electrically charged substance mixture by a ray optics based on the measured layer thickness information, wherein the ray optics can shape or direct the jet of the substance or substance mixture,
wherein an electric potential difference is generated by a voltage source and one electric potential value of the electric potential difference is of the electrically charged substance or the at least partially electrically charged substance mixture and one of an electric potential difference is an electric potential value of the substrate, a first electrode and a second electrode electrically connect to the voltage source, and the electric potential difference is configured between the first and the second electrode, and
wherein the electric potential difference is configured by an electrically charged sprayed-on substance or an at least partially electrically charged sprayed-on substance mixture and an earthed substrate, and the electric potential difference is configured by electrostatically charging the substrate holder and/or the electrically charged sprayed-on substance or at least partially electrically charged sprayed-on substance mixture on the substrate.

2. The method of claim 1 , wherein the optoelectronic components are light-emitting diodes or laser diodes.

3. The method of claim 1 , wherein the at least partially electrically charged substance mixture is sprayed onto the substrate comprising a matrix and a fluorescent substance embedded therein.

4. The method of claim 3 , wherein the substance of the matrix of the substance mixture comprises a volatile solvent or being composed thereof.

5. The method of claim 3 , wherein the substance of the matrix of the substance mixture comprises a volatile solvent or being composed thereof, and the volatile solvent is vaporized and/or escapes from the surface of the substrate by negative pressure and/or by heating the sprayed-on layer and/or by heating the substrate.

6. The method of claim 1 , wherein the substance or substance mixture is deposited on the substrate by a nozzle, the substance or substance mixture being sprayed from the nozzle by pressure.

7. The method of claim 1 , wherein the substance or substance mixture is an organic substance.

8. The method of claim 1 , wherein the electric potential difference is configured by an electrically charged sprayed-on substance or an at least partially electrically charged sprayed-on substance mixture and an earthed substrate.

9. The method of claim 1 , wherein the electrically charged substance or the at least partially electrically charged substance mixture comprises an intrinsic electrical charge.

10. The method of claim 1 , wherein the electrically charged substance or the at least partially electrically charged substance mixture comprises an intrinsic electrical charge, and the substance or substance mixture or a part of the substance mixture is electrostatically charged prior to or during spraying onto the substrate.

11. A device that manufactures an optoelectronic component comprising:
equipment that generates an electric potential difference;
a substrate holder that holds a substrate; and
equipment that sprays an electrically charged substance or an at least partially electrically charged substance mixture through a nozzle under pressure to form a jet of the electrically charged substance or the at least partially electrically charged substance mixture, configured to adjust the thickness of the sprayed-on electrically charged substance or the sprayed-on at least partially electrically charged substance mixture by various electrical changes of potential on the substrate;
measures a local layer thickness of the applied fluorescent layer; and
locally adjusts an amount of the electrically charged substance or the at least partially electrically charged substance mixture by a ray optics based on the measured layer thickness information, wherein the ray optics can shape or direct the jet of the substance or substance mixture,
wherein the equipment that generates an electric potential difference comprises a voltage source that generates the electric potential difference which is configured between a first electrode and a second electrode electrically connected to the voltage source and one electrical potential value of the electric potential difference is of the electrically charged substance or the at least partially electrically charged substance mixture and another electrical potential value of the electric potential difference is of the substrate, and
the equipment that generates an electric potential difference generates the electric potential difference configured by the electrically charged sprayed-on substance or the at least partially electrically charged sprayed-on substance mixture and an earthed substrate, and the electric potential difference is configured by electrostatically charging the substrate holder and/or the electrically charged sprayed-on substance or at least partially electrically charged sprayed-on substance mixture on the substrate.

12. The device of claim 11 , wherein the at least partially electrically charged substance mixture deposited on the substrate comprises a matrix and a fluorescent substance embedded therein.

13. The device of claim 11 , wherein the substrate holder and the nozzle are arranged to be moveable relative to each other.

14. The device of claim 11 , wherein ray optics are configured between the nozzle and the substrate holder.

Assignees

• Osram Opto Semiconductors Gmbh

Inventors

• Stoll Ion
• Gallmeier Hans-Christoph
• Jurenka Claudia

Classifications

• B05B5/005 Primary

  the high voltage supplied to an electrostatic spraying apparatus being adjustable during spraying operation, e.g. for modifying spray width, droplet size · CPC title

• H01L2933/0041

  Electricity · mapped topic

• B05B5/006

  the adjustement of high voltage is responsive to a condition, e.g. a condition of material discharged, of ambient medium or of target · CPC title

• B05B5/00

  Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means · CPC title

• B05B5/1675

  the supply means comprising a piston, e.g. a piston pump · CPC title