Microstructured surface with low work function

Patent metadata

Field	Value
Publication number	US-9793083-B2
Application number	US-201715396701-A
Country	US
Kind code	B2
Filing date	Jan 2, 2017
Priority date	Feb 2, 2016
Publication date	Oct 17, 2017
Grant date	Oct 17, 2017

Abstract

A horizontal multilayer junction-edge field emitter includes a plurality of vertically-stacked multilayer structures separated by isolation layers. Each multilayer structure is configured to produce a 2-dimensional electron gas at a junction between two layers within the structure. The emitter also includes an exposed surface intersecting the 2-dimensional electron gas of each of the plurality of vertically-stacked multilayer structures to form a plurality of effectively one-dimensional horizontal line sources of electron emission.

First claim

What is claimed is:

1. A method of fabricating a HMJFE structure, comprising:
disposing a first multilayer structure on a first substrate including a first surface, the first multilayer structure being configured to produce a first 2DEG at a junction between two layers within the first multilayer structure;
disposing a first isolation layer on the first multilayer structure;
disposing a second multilayer structure on the first isolation layer, the second multilayer structure configured to produce a second 2DEG at a junction between two layers within the second multilayer structure; and
disposing a first anode on the first surface of the first substrate, the first anode configured to collect electrons emitted by the first 2DEG.

2. The method of claim 1 , further comprising:
disposing a third multilayer structure on the first surface of the first substrate, the third multilayer structure being configured to produce a third 2DEG at a junction between two layers within the third multilayer structure;
disposing a second isolation layer on the third multilayer structure; and
disposing a fourth multilayer structure on the second isolation layer, the fourth multilayer structure configured to produce a fourth 2DEG at a junction between two layers within the fourth multilayer structure.

3. The method of claim 2 , wherein a first anode surface of the anode is oriented to face the first multilayer structure and the second multilayer structure to collect electrons emitted by the first 2DEG and the second 2DEG, and a second anode surface of the anode is oriented to face the third multilayer structure and the fourth multilayer structure to collect electrons emitted by the third 2DEG and the fourth 2DEG.

4. The method of claim 3 , wherein an exposed surface of at least one of the first multilayer structure or the third multilayer structure is positioned oblique to the first surface of the first substrate.

5. The method of claim 2 , wherein the first anode is attached to a second substrate spaced apart from the first substrate.

6. The method of claim 2 , further comprising disposing an insulator adjacent to an opposite side of the first anode from the first multilayer structure and adjacent to the third multilayer structure.

7. The method of claim 6 , further comprising disposing a second anode on the first surface of the first substrate, the second anode configured to collect electrons emitted by the third 2DEG.

8. A method of fabricating a VEJFE structure, comprising:
forming a plurality of vertical structures on a substrate, wherein forming each vertical structure includes positioning at least two vertically oriented layers adjacent to one another to create a junction between the two vertically oriented layers; and
truncating the plurality of vertical structures on an opposite side of the plurality of vertical structures from the substrate to expose an edge of the junction, the junction configured to produce a 2-dimensional electron gas (2DEG).

9. The method of claim 8 , wherein each vertical structure comprises a cone.

10. The method of claim 8 , wherein each vertical structure comprises a pyramid.

11. The method of claim 8 , wherein each vertical structure comprises a cylinder.

12. The method of claim 8 , further comprising polishing the plurality of vertical structures to expose the junction edge.

13. The method of claim 8 , further comprising etching the plurality of vertical structures to expose the junction edge.

14. The method of claim 8 , further comprising arranging an electrode structure above the exposed junction edge of each vertical structure.

15. The method of claim 14 , wherein the electrode structure comprises an anode configured to collect electrons emitted by each 2DEG out of the exposed junction edges.

16. The method of claim 14 , wherein the electrode structure comprises a control grid configured to control an electric field between the vertical structures and the control grid.

17. The method of claim 14 , wherein the electrode structure comprises a continuous planar structure.

18. The method of claim 14 , wherein the electrode structure comprises a planar array of apertures.

19. The method of claim 14 , wherein the electrode structure comprises a single electrode structure for the plurality of vertical structures.

20. The method of claim 14 , wherein the electrode structure comprises a plurality of electrically-separate electrode assemblies.

21. The method of claim 8 , further comprising including an electrode structure in at least one vertical structure.

22. The method of claim 21 , wherein the electrode structure includes an anode configured to collect electrons emitted by the 2DEG of the at least one vertical structure.

23. The method of claim 21 , wherein the electrode structure includes a control grid configured to control an electric field between the at least one vertical structure and the control grid.

24. The method of claim 23 , further comprising truncating the control grid in the same plane as the edge of the 2DEG of the at least one vertical structure.

25. The method of claim 23 , further comprising disposing a biasing layer in the substrate and coupling the electrode structure to the biasing layer to allow for a bias to be applied between the electrode structure and the 2DEG.

Assignees

• Elwha Llc

Inventors

• Hyde Roderick A
• Kare Jordin T
• Pan Tony S
• Wood Jr Lowell L

Classifications

• H01J1/3046

  Edge emitters · CPC title

• H01J1/304

  Field-emissive cathodes · CPC title

• H01J19/24 Primary

  Cold cathodes, e.g. field-emissive cathode · CPC title

• H01J9/025

  of field emission cathodes · CPC title

• H01J9/18

  Assembling together the component parts of electrode systems · CPC title