Exposure apparatus and exposure method using the same

Patent metadata

Field	Value
Publication number	US-9791783-B2
Application number	US-201414453040-A
Country	US
Kind code	B2
Filing date	Aug 6, 2014
Priority date	Feb 13, 2014
Publication date	Oct 17, 2017
Grant date	Oct 17, 2017

Abstract

An exposure apparatus including a substrate transporting unit configured to transport a substrate in a first direction, and including a first measuring part; and an exposure part disposed over the substrate transporting unit configured to irradiate the substrate with ultraviolet rays. The first measuring part is configured to measure an intensity of the ultraviolet rays before the substrate is irradiated.

First claim

What is claimed is:

1. An exposure apparatus, comprising:
a substrate transporting assembly configured to transport a substrate in a first direction, the substrate transporting assembly comprising a support configured to support the substrate during transport, the support comprising a first measuring part extending therefrom; and
an exposure part disposed over the substrate transporting assembly, the exposure part being configured to irradiate the substrate with ultraviolet rays to photo-align components of a photo-alignment layer disposed on a plane of the substrate,
wherein the first measuring part is configured to measure a polarization direction of the ultraviolet rays before the substrate is irradiated,
wherein the exposure part is configured to tilt with respect to the plane based on the polarization direction of the ultraviolet rays to photo-align the components in a direction intersecting the plane, and
wherein the first measuring part extends along a majority of an edge of the support in a second direction substantially perpendicular to the first direction.

2. The exposure apparatus of claim 1 , wherein:
the support is a first stage configured to support the substrate thereon; and
the substrate transporting assembly further comprises a second stage configured to support another substrate thereon, the second stage being configured to transport the another substrate in the first direction.

3. The exposure apparatus of claim 2 , wherein:
the first stage is disposed between the second stage and the first measuring part; and
the first measuring part is disposed at a side of the first stage in the first direction.

4. The exposure apparatus of claim 3 , wherein the first measuring part comprises sensors spaced apart from one another in the second direction.

5. The exposure apparatus of claim 4 , wherein the sensors are configured to measure the polarization direction of the ultraviolet rays.

6. The exposure apparatus of claim 1 , wherein:
the support comprises a first gripper configured to secure the substrate; and
the substrate transporting assembly further comprises a second gripper configured to secure another substrate and to transport the another substrate in the first direction.

7. The exposure apparatus of claim 6 , wherein:
the second gripper comprises a second measuring part extending in the second direction; and
the second measuring part comprises a sensor configured to measure an intensity of ultraviolet rays.

8. The exposure apparatus of claim 6 , wherein the first and second grippers are configured to secure the substrate and the another substrate via vacuum absorption.

9. An exposure apparatus, comprising:
a substrate transporting assembly to transport a substrate in a first direction, the substrate transporting assembly comprising:
a first support to support the substrate during transport; and
a second support coupled to the first support;

a source of ultraviolet illumination to irradiate the substrate with ultraviolet rays, the source overlapping the substrate transporting assembly,
wherein the second support comprises:
a rail extending in a second direction crossing the first direction; and
at least one sensor slideably coupled to the rail, the at least one sensor being configured to slide on the rail relative to the substrate to detect one or more aspects of the ultraviolet rays with respect to different portions of the substrate during transport of the substrate in the first direction.

10. The exposure apparatus of claim 9 , wherein:
the source comprises an arrangement of sources of ultraviolet illumination; and
the source is configured to individually adjust the sources of ultraviolet illumination based on the one or more aspects of the ultraviolet rays.

11. An exposure method to at least partially form aspects of consumer products, the exposure method comprising:
exposing, via an exposure apparatus, a first substrate to ultraviolet rays by moving the first substrate past a source of ultraviolet rays at a first transport speed, the first substrate being associated with a first consumer product of the consumer products;
measuring, while a second substrate moves towards the source and the first substrate moves away from the source, a first intensity of the ultraviolet rays, the second substrate being associated with a second consumer product of the consumer products, wherein the second consumer product is different from the first consumer product;
determining a second transport speed based on the first intensity and a set total amount of exposure; and
exposing, via the exposure apparatus, the second substrate different from the first substrate to the ultraviolet rays by moving the second substrate past the source at the second transport speed.

12. The exposure method of claim 11 , wherein:
measuring the first intensity comprises measuring intensity of the ultraviolet rays generated from the source;
the first intensity of the ultraviolet rays is a total energy amount of the ultraviolet rays radiated on a unit area during a unit time;
a product of the first intensity of the ultraviolet rays and an exposure time per one substrate is equivalent to the set total amount of exposure; and
the exposure time per one substrate is equivalent to an exposure distance of the second substrate divided by the second transport speed.

13. The exposure method of claim 12 , further comprising:
exposing, via the exposure apparatus, a third substrate by moving the third substrate past the source at a third transport speed.

14. The exposure method of claim 13 , wherein the third transport speed is substantially equivalent to the second transport speed.

15. The exposure method of claim 14 , further comprising:
exposing, via the exposure apparatus, a fourth substrate by moving the fourth substrate at a fourth transport speed past the source; and
exposing, via the exposure apparatus, a fifth substrate by moving the fifth substrate at a fifth transport speed past the source.

16. The exposure method of claim 15 , further comprising:
measuring a second intensity of the ultraviolet rays; and
determining the fifth transport speed based on the second intensity and the set total amount of exposure,
wherein:
a product of the second intensity of the ultraviolet rays and an exposure time per one substrate is equivalent to the set total amount of exposure; and
the exposure time per one substrate is equivalent to an exposure distance of the fifth substrate divided by the fifth transport speed.

17. The exposure method of claim 15 , wherein the fourth transport speed is substantially equivalent to the second transport speed.

18. The exposure method of claim 11 , wherein:
the first and second substrates are two substrates of a larger plurality of substrates moved past the source; and
a transport speed of each substrate of the plurality of substrates is set such that each substrate of the plurality of substrates receives a total amount of exposure that is substantially equivalent to the set total amount of exposure.

19. The exposure method of claim 11 , wherein the second substrate is loaded into the exposure apparatus while the first substrate is being exposed.

20. The exposure method of claim 19 , wherein:
the exposure method exposes a plurality of substrates comprising the first and second substrates, and determines an exposure speed for each substrate of the plurality of substrates; and
each substrate of the plurality of substrates is transported at its correspondingl

Assignees

• Samsung Display Co Ltd

Inventors

• Hur Jae-Weon
• Lee Hong-Yeon
• Jeon Baek-Kyun

Classifications

• G02F1/1303 Primary

  Apparatus specially adapted to the manufacture of LCDs · CPC title

• G03F7/70191 Primary

  Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like · CPC title

• G02F1/133788

  by light irradiation, e.g. linearly polarised light photo-polymerisation · CPC title