Magnetically drivable micromirror

US9791663B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9791663-B2
Application numberUS-201113976301-A
CountryUS
Kind codeB2
Filing dateNov 9, 2011
Priority dateDec 27, 2010
Publication dateOct 17, 2017
Grant dateOct 17, 2017

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Abstract

Official abstract text for this publication.

A magnetically drivable micromirror having an outer frame, a coil former, and torsion springs, situated in a first plane, the torsion springs having an axis of rotation, and the coil former being connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, having a mirror element that is situated in a second plane parallel to the first plane, the mirror element being connected to the coil former by an intermediate layer. A 2D scanner having a first magnetically drivable micromirror and a second drivable mirror, and to a method for producing a micromirror are also described.

First claim

Opening claim text (preview).

What is claimed is: 1. A magnetically drivable micromirror, comprising: an outer frame situated in a first plane; torsion springs situated in the first plane and having an axis of rotation, wherein the torsion springs have a first surface and a second surface that delimit the first plane; a rotatable coil former connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, wherein the rotatable coil former is situated in th…

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What does patent US9791663B2 cover?
A magnetically drivable micromirror having an outer frame, a coil former, and torsion springs, situated in a first plane, the torsion springs having an axis of rotation, and the coil former being connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, having a mirror element that is situated in a second plane parallel to the first…
Who is the assignee on this patent?
Pinter Stefan, Weber Heribert, Fischer Frank, and 4 more
What technology area does this patent fall under?
Primary CPC classification G02B26/085. Mapped technology areas include Physics.
When was this patent published?
Publication date Tue Oct 17 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).