Mirror apparatus
US-2024329390-A1 · Oct 3, 2024 · US
US9791663B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9791663-B2 |
| Application number | US-201113976301-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 9, 2011 |
| Priority date | Dec 27, 2010 |
| Publication date | Oct 17, 2017 |
| Grant date | Oct 17, 2017 |
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Official abstract text for this publication.
A magnetically drivable micromirror having an outer frame, a coil former, and torsion springs, situated in a first plane, the torsion springs having an axis of rotation, and the coil former being connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, having a mirror element that is situated in a second plane parallel to the first plane, the mirror element being connected to the coil former by an intermediate layer. A 2D scanner having a first magnetically drivable micromirror and a second drivable mirror, and to a method for producing a micromirror are also described.
Opening claim text (preview).
What is claimed is: 1. A magnetically drivable micromirror, comprising: an outer frame situated in a first plane; torsion springs situated in the first plane and having an axis of rotation, wherein the torsion springs have a first surface and a second surface that delimit the first plane; a rotatable coil former connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, wherein the rotatable coil former is situated in th…
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Physics · mapped topic
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