Mask frame assembly, method of manufacturing the same, and method of manufacturing organic light-emitting display apparatus

Patent metadata

Field	Value
Publication number	US-9790586-B2
Application number	US-201514710738-A
Country	US
Kind code	B2
Filing date	May 13, 2015
Priority date	Oct 31, 2014
Publication date	Oct 17, 2017
Grant date	Oct 17, 2017

Abstract

A mask frame assembly includes a frame, and a mask tensioned on the frame in a first direction, the mask having a deposition pattern portion having a plurality of pattern holes therethrough, a deposition material being deposited on a substrate through the pattern holes, and a dummy portion extending from the deposition pattern portion in the first direction, the dummy portion having an increased thickness in a second direction as a distance from the deposition pattern portion in the first direction increases, the second direction being oriented along a normal to the mask.

First claim

What is claimed is:

1. A mask frame assembly, comprising:
a frame; and
a mask tensioned on the frame in a first direction, the mask including:
a deposition pattern portion having a plurality of pattern holes therethrough, such that a deposition material passing through the pattern holes in a second direction is deposited on a substrate, and
a dummy portion extending from the deposition pattern portion in the first direction, the dummy portion having an increased thickness in the second direction as a distance from the deposition pattern portion in the first direction increases.

2. The mask frame assembly as claimed in claim 1 , wherein the dummy portion includes a plurality of step portions from the deposition pattern portion in the first direction.

3. The mask frame assembly as claimed in claim 2 , wherein lengths of the plurality of step portions in the first direction decrease as the distance from the deposition pattern portion in the first direction increases.

4. The mask frame assembly as claimed in claim 2 , wherein heights of the plurality of step portions in the second direction decrease as the distance from the deposition pattern portion in the first direction increases.

5. The mask frame assembly as claimed in claim 2 , wherein the dummy portion further comprises a slope portion between the deposition pattern portion and the plurality of step portions.

6. The mask frame assembly as claimed in claim 1 , wherein the dummy portion includes a plurality of concave curved portions from the deposition pattern portion in the first direction.

7. The mask frame assembly as claimed in claim 6 , wherein curvature radii of the plurality of curved portions decrease as the distance from the deposition pattern portion in the first direction increases.

8. The mask frame assembly as claimed in claim 6 , wherein the dummy portion further comprises a slope portion between the deposition pattern portion and the plurality of curved portions.

9. The mask frame assembly as claimed in claim 1 , wherein the dummy portion includes a dummy pattern at one surface of the mask, the dummy pattern having a shape of a hole, a slit, or a groove.

10. A method of manufacturing a mask frame assembly, the method comprising:
preparing a frame;
preparing a mask, the mask including:
a deposition pattern portion having a plurality of pattern holes therethrough, such that a deposition material passing through the pattern holes in a second direction is deposited on a substrate, and
a dummy portion extending from the deposition pattern portion in the first direction, the dummy portion having an increased thickness in the second direction as a distance from the deposition pattern portion in the first direction increases; and

installing the mask on the frame while tensioning both ends of the mask in the first direction.

11. The method as claimed in claim 10 , wherein preparing the mask includes irradiating a laser onto the dummy portion to form a plurality of step portions in the first direction.

12. The method as claimed in claim 11 , wherein forming the plurality of step portions in the mask includes decreasing lengths of the plurality of step portions in the first direction as a distance from the deposition pattern portion in the first direction increases.

13. The method as claimed in claim 11 , wherein forming the plurality of step portions in the mask includes decreasing heights of the plurality of step portions as a distance from the deposition pattern portion in the first direction increases.

14. The method as claimed in claim 10 , wherein preparing the mask includes forming a plurality of curved portions at the dummy portion in the first direction by an etching process.

15. The method as claimed in claim 14 , wherein forming the plurality of curved portions includes decreasing radii of the curved portions in the first direction as a distance from the deposition pattern portion in the first direction increases.

16. The method as claimed in claim 10 , wherein preparing the mask includes forming a dummy pattern at one surface of the dummy portion, the dummy pattern having a shape of a hole, a slit, or a groove.

17. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
forming a first electrode and a second electrode that are opposite to each other on a substrate;
forming an organic layer between the first electrode and the second electrode,
wherein the organic layer or the second electrode is deposited by using a mask frame assembly including:
a frame, and
a mask tensioned on the frame in a first direction, the mask including:
a deposition pattern portion having a plurality of pattern holes therethrough, such that a deposition material passing through the pattern holes in a second direction is deposited on a substrate, and
a dummy portion extending from the deposition pattern portion in the first direction, the dummy portion having an increased thickness in the second direction as a distance from the deposition pattern portion in the first direction increases.

Assignees

• Samsung Display Co Ltd

Inventors

• Ko Junhyeuk
• Baek Daewon
• Lee Eunji

Classifications

• H01L51/5256

  Electricity · mapped topic

• H01L51/0011

  Electricity · mapped topic

• C23C14/042 Primary

  using masks · CPC title

• H01L51/56

  Electricity · mapped topic

• H01L27/3244

  Electricity · mapped topic