Vapor source using solutions of precursors in terpenes

Patent metadata

Field	Value
Publication number	US-9790378-B2
Application number	US-201113996485-A
Country	US
Kind code	B2
Filing date	Dec 16, 2011
Priority date	Dec 23, 2010
Publication date	Oct 17, 2017
Grant date	Oct 17, 2017

Abstract

This disclosure relates to terpene solutions of metal precursors used for chemical vapor deposition, atomic layer deposition, spray pyrolysis or misted deposition. The terpenes do not supply impurities such as oxygen or halogens to the material being produced, nor do they etch or corrode them. In spray pyrolysis or misted deposition, small droplets provide uniform coating. Terpenes have high flash points and low flammability, reducing the risk of fires. Terpenes have low toxicity and are biodegradable. They are available in large amounts from renewable, natural plant sources, and are low in cost.

First claim

What is claimed is:

1. A liquid solution comprising:
an acyclic, terpene solvent; and
a precursor containing at least one metal or metalloid atom;
wherein the terpene solvent is a liquid;
wherein the terpene solvent and the precursor have vaporization rates in which the T 1/2 values of the terpene solvent and the precursor differ by less than 100° C., as determined by thermogravimetric analyses; and
wherein the liquid solution is suitable for use in one of chemical vapor deposition and atomic layer deposition.

2. The solution of claim 1 , wherein the terpene is alloocimene.

3. The solution of claim 1 , wherein the terpene is farnesene.

4. The solution of claim 1 , wherein the terpene is a monoterpene.

5. The solution of claim 1 , wherein the terpene is a sesquiterpene.

6. The solution of claim 1 , wherein the terpene is a diterpene.

7. The solution of claim 1 , wherein the terpene is a triterpene.

8. The solution of claim 4 , wherein the monoterpene has the formula,

9. The solution of claim 4 , wherein the monoterpene has the formula,

10. The solution of claim 4 , wherein the monoterpene has the formula,

11. The solution of claim 5 , wherein the sesquiterpene has the formula,

12. The solution of claim 5 , wherein the sesquiterpene has the formula,

13. The solution of claim 6 , wherein the diterpene has the formula,

14. The solution of claim 7 , wherein the triterpene has the formula,

15. The solution of claim 1 , wherein the precursor is bis(N,N′-di-tert-butylacetamidinato) nickel(II) and the acyclic terpene solvent is alloocimene.

16. The solution of claim 1 , wherein the precursor is bis(N,N′-di-tert-butylacetamidinato)nickel(II) and the acyclic terpene solvent is famesene.

17. The solution of claim 1 , wherein the concentration of the solution is from 0.25 to 0.50 molar.

18. The solution of claim 1 , wherein the concentration of the solution is from 0.5 to 1.0 molar.

19. The solution of claim 1 , wherein the concentration of the solution is greater than 1 molar.

20. The solution of claim 1 , wherein the T 1/2 values of the precursor and the solvent differ by less than 50° C., as determined by thermogravimetric analyses.

21. The solution of claim 1 , wherein the T 1/2 values of the precursor and the solvent differ by less than 25° C., as determined by thermogravimetric analyses.

Assignees

• Gordon Roy Gerald
• Harvard College

Inventors

• Gordon Roy Gerald

Classifications

• C23C16/18

  from metallo-organic compounds · CPC title

• C09D7/1233 Primary

  Chemistry & Metallurgy · mapped topic

• C23C16/448

  characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials · CPC title

• C23C16/34

  Nitrides {(C23C16/303 takes precedence)} · CPC title

• C09D7/63 Primary

  organic · CPC title