Nanostructure and optical device including the nanostructure

Patent metadata

Field	Value
Publication number	US-9790332-B2
Application number	US-201615387812-A
Country	US
Kind code	B2
Filing date	Dec 22, 2016
Priority date	Jun 19, 2014
Publication date	Oct 17, 2017
Grant date	Oct 17, 2017

Abstract

Provided are a nanostructure and an optical device including the nanostructure. The nanostructure is formed on a two-dimensional material layer such as graphene and includes nanopatterns having different shapes. The nanopatterns may include a first nanopattern and a second nanopattern and may be spherical; cube-shaped; or poly-pyramid-shaped, including a triangular pyramid shape; or polygonal pillar-shaped.

First claim

What is claimed is:

1. A method of manufacturing a nanostructure, the method comprising:
preparing a solvent in which a block copolymer is dissolved;
adding a metal precursor to the solvent; and
reducing the metal precursor to a plurality of first nanopatterns and a plurality of second nanopatterns, wherein one of a shape and a size of the plurality of second nanopatterns is different from the one of a shape and a size of the plurality of first nanopatterns, by adding a reducing agent to the solvent.

2. The method of claim 1 , wherein the solvent is a mixture comprising tetrahydrofuran (THF) contained in at least one of toluene, xylene, and ethylbenzene.

3. The method of claim 2 , wherein in the solvent, a mixture ratio of toluene, xylene or ethylbenzene with respect to the THF is about 10:90 to about 90:10 vol %.

4. The method of claim 2 , wherein the block copolymer is PS-b-P4VP, and in the solvent, a mixture ratio of toluene, xylene, or ethylbenzene with respect to THF is about 10:90 to about 50:50 vol %.

5. The method of claim 2 , wherein the block copolymer is PS-b-P2VP, and in the solvent, a mixture ratio of toluene, xylene, or ethylbenzene with respect to THF is about 50:50 to about 90:10 vol %.

6. A method of manufacturing a nanostructure, the method comprising:
forming a metal seed;
adding a precursor of nanopatterns and a direction indicator to a solution comprising the metal seed; and
forming a plurality of first nanopatterns and a plurality of second nanopatterns, wherein one of a shape and a size of the plurality of second nanopatterns is different from the one of a shape and a size of the plurality of first nanopatterns, by reducing the precursor.

7. The method of claim 6 , wherein the forming the metal seed comprises adding a metal precursor to the solution.

8. The method of claim 6 , wherein the nanopatterns comprise a material comprising Ag, and
the metal seed comprises a material comprising Au.

9. A method of manufacturing a nanostructure, the method comprising:
adding a plurality of first metal seeds and a plurality of second metal seeds to a solution, wherein one of a shape and a size of the plurality of second metal seeds is different from the one of the shape and the size of the plurality of second metal seeds;
adding a precursor of nanopatterns and a direction indicator to a solution comprising the first and second metal seeds; and
forming a plurality of first nanopatterns and a plurality of second nanopatterns, wherein one of a shape and a size of the plurality of second nanopatterns is different from the one of a shape and a size of the plurality of first nanopatterns, by reducing the precursor.

Assignees

• Samsung Electronics Co Ltd
• Unist (Ulsan Nat Inst Of Science And Technology)

Inventors

• Kim Unjeong
• Roh Younggeun
• Park Yeonsang
• Lee Changwon
• Park Soojin
• Yoo Seungmin

Classifications

• H01L31/112

  Electricity · mapped topic

• C08K2003/0831

  Gold · CPC title

• C08J3/212 Primary

  and solid additives · CPC title

• G02B5/008

  Surface plasmon devices (diffractive gratings with a pitch less than or comparable to the wavelength G02B5/1809; surface plasmons in integrated optics G02B6/1226; optical analysis of materials by means of surface plasmons G01N21/553) · CPC title

• H01L31/032

  Electricity · mapped topic