Resonator element, resonator, resonator device, oscillator, electronic apparatus, and moving object

Patent metadata

Field	Value
Publication number	US-9787281-B2
Application number	US-201615070505-A
Country	US
Kind code	B2
Filing date	Mar 15, 2016
Priority date	Mar 17, 2015
Publication date	Oct 10, 2017
Grant date	Oct 10, 2017

Abstract

A resonator element includes a substrate having a first region performing thickness shear vibration, a second region located in a periphery of the first region and having a smaller thickness than the first region, a fixed end, and a free end opposite to the fixed end in the first region in a plan view. Excitation electrodes are disposed on a front and a rear of the first region and have regions overlapping each other in the plan view. A center of the first region and a center of the regions overlapping each other are located between a center of the substrate and the free end in the plan view. When Cs is a distance between the center of the regions overlapping each other and the center of the substrate in the plan view, a relation of 105 μm<Cs<130 μm is satisfied.

First claim

What is claimed is:

1. A resonator element comprising:
a substrate which includes a first end, a second end opposite to the first end, a first region located between the first end and the second end in a plan view and performing thickness shear vibration, a second region located in a periphery of the first region and having a smaller thickness than the first region; and
excitation electrodes which are disposed on a front and a rear of the first region and have regions overlapping each other in the plan view,
wherein a center of the first region and a center of the regions overlapping each other are located between a center of the substrate and the second end in the plan view,
wherein when Cs is a distance between the center of the regions overlapping each other and the center of the substrate in the plan view, the following relation is satisfied,
105 μm< Cs< 130 μm, and

wherein when D is a length of a bonding region bonded with a bonding material in the second region on a side of the first end in a direction intersecting the first and second ends in the plan view, the following relation is satisfied,
D/ 2≦ Cs.

2. A resonator element comprising:
a substrate which includes a first end, a second end opposite to the first end, a first region located between the first end and the second end in a plan view and performing thickness shear vibration, a second region located in a periphery of the first region and having a smaller thickness than the first region; and
excitation electrodes which are disposed on a front and a rear of the first region and have regions overlapping each other in the plan view,
wherein a center of the first region and a center of the regions overlapping each other are located between a center of the substrate and the second end in the plan view, and
wherein when Cs is a distance between the center of the regions overlapping each other and the center of the substrate in the plan view and L is a distance between the second end and an end of the first region on the side of the second end in the plan view and λ is a wavelength of flexural vibration generated in the substrate, the following relations are satisfied:
65 μm< Cs< 150 μm and

λ/2×(2 n+ 1)−0.1λ≦ L≦λ/ 2×(2 n+ 1)+0.1λ (where, n is a positive integer).

3. The resonator element according to claim 2 ,
wherein the following relation is satisfied,
100 μm≦ Cs≦ 135 μm.

4. The resonator element according to claim 1 ,
wherein when L is a distance between the second end and an end of the first region on a side of the second end in the plan view and λ is a wavelength of flexural vibration generated in the substrate, the following relation is satisfied,
λ/2×(2 n+ 1)−0.1λ≦ L≦λ/ 2×(2 n+ 1)+0.1λ (where, n is a positive integer).

5. The resonator element according to claim 2 ,
wherein when D is a length of a bonding region bonded with a bonding material in the second region on a side of the first end in a direction intersecting the first and second ends in the plan view, the following relation is satisfied,
D/ 2≦ Cs.

6. A resonator comprising:
the resonator element according to claim 1 ; and
a package in which the resonator element is accommodated,
wherein the side of the first end in the resonator element is connected to the package through the bonding material in the plan view.

7. A resonator comprising:
the resonator element according to claim 2 ; and
a package in which the resonator element is accommodated,
wherein a side of the first end in the resonator element is connected to the package through a bonding material in the plan view.

8. A resonator comprising:
the resonator element according to claim 5 ; and
a package in which the resonator element is accommodated,
wherein the side of the first end in the resonator element is connected to the package through the bonding material in the plan view.

9. A resonator device comprising:
the resonator element according to claim 1 ; and
an electronic element.

10. The resonator device according to claim 9 ,
wherein the electronic element is a thermosensitive element.

11. An oscillator comprising:
the resonator element according to claim 1 ; and
an oscillation circuit that is electrically connected to the resonator element.

12. An electronic apparatus comprising:
the resonator element according to claim 1 .

13. A moving object comprising:
the resonator element according to claim 1 .

Assignees

• Seiko Epson Corp

Inventors

• Kobayashi Junji
• Nishide Jun

Classifications

• H03H9/17 Primary

  having a single resonator (crystal tuning forks H03H9/21) · CPC title

• H03H9/13

  for networks consisting of piezoelectric or electrostrictive materials (for networks using surface acoustic waves H03H9/145) · CPC title

• H03H9/0519

  for cantilever (H03H9/1021 takes precedence) · CPC title

• H03H9/0542

  consisting of a lateral arrangement (H03H9/0566 takes precedence) · CPC title

• H03H9/08

  Holders with means for regulating temperature · CPC title