Optical discs as low-cost, quasi-random nanoimprinting templates for photon management

Patent metadata

Field	Value
Publication number	US-9786845-B1
Application number	US-201514839112-A
Country	US
Kind code	B1
Filing date	Aug 28, 2015
Priority date	Aug 29, 2014
Publication date	Oct 10, 2017
Grant date	Oct 10, 2017

Abstract

Methods of patterning a layer of a photonic device are provided using stamps or masks derived from pre-written optical media discs. One method comprises pressing a stamp on a surface of a layer of a photonic device, the stamp comprising a stamping surface which defines a negative replica of a quasi-random pattern of nanostructures defined in a recording layer of a pre-written optical media disc, for a period of time sufficient to imprint the quasi-random pattern of nanostructures defined in the recording layer of the pre-written optical media disc onto the surface of the layer of the photonic device; and removing the stamp. The stamps, the masks, and the photonic devices comprising the patterned layers are also provided.

First claim

What is claimed is:

1. A method of patterning a layer of a photonic device, the method comprising:
pressing a stamp on a surface of a layer of a photonic device, the stamp comprising a stamping surface which defines a negative replica of a quasi-random pattern of nanostructures defined in a recording layer of a pre-written optical media disc to imprint the quasi-random pattern of nanostructures defined in the recording layer of the pre-written optical media disc onto the surface of the layer of the photonic device; and
removing the stamp.

2. The method of claim 1 , wherein the quasi-random pattern of nanostructures defined in the recording layer of the pre-written optical media disc comprises a plurality of pits and lands arranged in a plurality of tracks, the tracks aligned along their longitudinal axes, and is configured according to an optical data storage format, the optical data storage format characterized by one, two, or all three of: a pit width of about 130 nm, a minimum pit length of about 150 nm, and a track pitch of about 320 nm.

3. The method of claim 2 , wherein the optical data storage format is characterized by the pit width of about 130 nm, the minimum pit length of about 150 nm, and the track pitch of about 320 nm.

4. The method of claim 1 , wherein the quasi-random pattern of nanostructures defined in the recording layer of the pre-written optical media disc is a stacked quasi-random pattern of nanostructures comprising a first quasi-random pattern of nanostructures comprising a plurality of pits and lands arranged in a plurality of tracks, the tracks aligned along their longitudinal axes, which is configured according to a first optical data storage format, and at least one additional overlying quasi-random pattern of nanostructures comprising a plurality of pits and lands arranged in a plurality of tracks, the tracks aligned along their longitudinal axes, which is configured according to a second optical data storage format.

5. The method of claim 4 , wherein an angle θ defined by the longitudinal axes of the tracks of the at least one additional overlying quasi-random pattern of nanostructures relative to the longitudinal axes of the tracks of the first quasi-random pattern of nanostructures is in the range of 0°<θ<360°.

6. The method of claim 5 , wherein the first quasi-random pattern of nanostructures and the at least one additional overlying quasi-random pattern of nanostructures are configured according to the same optical data storage format.

7. The method of claim 6 , wherein the same optical data storage format is an optical data storage format characterized by one, two, or all three of: a pit width of about 130 nm, a minimum pit length of about 150 nm, and a track pitch of about 320 nm.

8. The method of claim 1 , wherein the stamp is formed by casting a material onto the recording layer of the pre-written optical media disc.

9. The method of claim 8 , further comprising forming the stamp prior to pressing the stamp.

10. The method of claim 1 , wherein the photonic device is a photovoltaic cell.

11. The method of claim 1 , wherein the stamp is pressed onto the surface of the layer in a first orientation and the stamp is subsequently pressed onto the surface of the layer one or more additional times, each time of which the stamp is pressed onto the surface of the layer in a different orientation relative to the first orientation, thereby providing the surface of the layer patterned with a stacked quasi-random pattern of nanostructures.

12. The method of claim 7 , wherein the same optical data storage format is characterized by the pit width of about 130 nm, the minimum pit length of about 150 nm, and the track pitch of about 320 nm.

13. The method of claim 1 , wherein the quasi-random pattern of nanostructures defined in the recording layer of the pre-written optical media disc comprises a plurality of pits and lands arranged in a plurality of tracks, the tracks aligned along their longitudinal axes, and is configured to provide a Fourier response characterized by a distribution of k-values which couples sunlight having wavelengths in the range of from about 315 nm to about 2.5 μm to surface plasmons at an interface between the surface of the layer of the photonic device and an overlying layer of the photonic device.

14. The method of claim 13 , wherein the distribution of k-values couples sunlight having wavelengths in the range of from about 315 nm to about 775 nm.

Assignees

• Univ Northwestern

Inventors

• Smith Alexander James
• Wang Chen
• Huang Jiaxing
• Sun Cheng

Classifications

• H01L51/44

  Electricity · mapped topic

• H01L51/0014 Primary

  Electricity · mapped topic

• H10K30/50

  Photovoltaic [PV] devices · CPC title

• H10K71/20

  Changing the shape of the active layer in the devices, e.g. patterning · CPC title

• H10F77/703 Primary

  of the semiconductor bodies, e.g. textured active layers · CPC title