Semiconductor device structure with non planar slide wall

Patent metadata

Field	Value
Publication number	US-9786770-B1
Application number	US-201615286988-A
Country	US
Kind code	B1
Filing date	Oct 6, 2016
Priority date	Oct 6, 2016
Publication date	Oct 10, 2017
Grant date	Oct 10, 2017

Abstract

A semiconductor device that includes a semiconductor structure having a side wall that is non planar and that extends farther outward at an upper portion than at a lower portion of the side wall. The semiconductor structure extends underneath a semiconductor layer wherein a top portion of the structure contacts the semiconductor layer.

First claim

What is claimed is:

1. A method of forming a semiconductor device comprising:
forming a layer of dielectric material, wherein an upper portion of the layer of dielectric material has a first etch rate property with respect to an etchant and a lower portion of the layer of dielectric material has a second etch rate property with respect to the etchant;
forming a layer of semiconductor material over the layer of dielectric material;
forming an opening in the layer of semiconductor material and exposing the layer of dielectric material through the opening;
etching with the etchant, the layer of dielectric material through the opening to remove a portion of the layer of dielectric material underneath the layer of semiconductor material with the etchant, wherein the upper portion of the layer of dielectric material is removed by etching with the etchant at a faster rate than the lower portion of the layer of dielectric material is removed by the etching with the etchant such that a remaining side wall of the layer of dielectric material defined by the etching underneath the layer of semiconductor material is non planar with an upper portion of the remaining side wall extending laterally farther from the opening than a lower portion of the remaining side wall extending laterally from the opening;
forming a structure of semiconductor material in a location where the layer of dielectric material was removed by the etching, wherein the structure extends underneath the layer of semiconductor material to contact a bottom surface of the layer of semiconductor material underneath the layer of semiconductor material, the structure having a structure side wall with an upper portion corresponding to the upper portion of the remaining side wall that extends farther underneath the layer of semiconductor material than a lower portion of the structure side wall that corresponds to the lower portion of the remaining side wall.

2. The method of claim 1 wherein the forming a layer of dielectric material includes:
forming the layer of dielectric material; and
implanting dopants into the upper portion of the layer of dielectric material to provide the upper portion of the layer of dielectric material with a higher concentration of the dopants than the lower portion of the layer of dielectric material to provide the upper portion with the first etch rate property with respect to the second etch rate property.

3. The method of claim 1 , wherein the forming the layer of dielectric material includes in-situ doping the upper portion with dopants to provide the upper portion of the layer of dielectric material with a higher concentration of the dopants than the lower portion of the layer of dielectric material to provide the upper portion with the first etch rate property with respect to the second etch rate property.

4. The method of claim 1 wherein the semiconductor device includes a second structure of semiconductor material underneath and in contact with the structure of semiconductor material, wherein the structure of semiconductor material has a first conductivity doping profile that is opposite a conductivity doping profile of the second structure of semiconductor material.

5. The method of claim 4 wherein the structure of semiconductor material is characterized as an intrinsic base of the semiconductor device and the second structure of semiconductor material is characterized as an intrinsic collector of the semiconductor device.

6. The method of claim 4 wherein the second structure of semiconductor material includes conductivity dopants implanted into a layer of semiconductor material through the opening.

7. The method of claim 1 wherein the structure of semiconductor material is characterized as an intrinsic base of the semiconductor device wherein a portion of the layer of semiconductor material in which the structure of semiconductor material is located underneath is characterized as a base electrode of the semiconductor device.

8. The method of claim 1 wherein the dielectric material is characterized as an oxide.

9. The method of claim 1 wherein the etchant includes hydrofluoric (HF) acid.

10. The method of claim 1 wherein the etching includes etching the upper portion of the layer of dielectric material with the etchant at a first rate and etching the lower portion of the dielectric material by with the etchant at a second rate, wherein the first rate is in a range 1.3 to 2.5 times faster than the second rate.

11. The method of claim 1 wherein the upper portion of the layer of dielectric material has a higher concentration of dopants than the lower portion of the layer of dielectric material to provide the upper portion with the first etch rate property with respect to the second etch rate property.

12. The method of claim 11 wherein the dopants include arsenic at a concentration in the upper portion in the range of 1.0e20 to 1.0e22/cm3.

13. The method of claim 1 wherein the lower portion of the layer of dielectric material has a higher concentration of dopants than the upper portion of the layer of dielectric material to provide the lower portion with the second etch rate property with respect to the first etch rate property.

14. The method of claim 1 wherein after forming the structure of semiconductor material, forming a second structure of semiconductor material over and in contact with the structure, wherein at least a portion of the second structure is located in the opening, wherein the structure of semiconductor material is characterized as an intrinsic base of the semiconductor device and the second structure is characterized as an intrinsic emitter of the semiconductor device.

Assignees

• Freescale Semiconductor Inc
• Nxp Usa Inc

Inventors

• John Jay Paul
• Trivedi Vishal
• Kirchgessner James Albert

Classifications

• H10P30/40

  into insulating materials · CPC title

• H10P50/283

  by chemical means · CPC title

• H10P30/204

  into Group IV semiconductors · CPC title

• H10P30/21

  of electrically active species · CPC title

• H01L29/735 Primary

  Electricity · mapped topic