Polarization-based coherent gradient sensing systems and methods

Patent metadata

Field	Value
Publication number	US-9784570-B2
Application number	US-201615152907-A
Country	US
Kind code	B2
Filing date	May 12, 2016
Priority date	Jun 15, 2015
Publication date	Oct 10, 2017
Grant date	Oct 10, 2017

Abstract

Polarization-based coherent gradient-sensing systems and methods for measuring at least one surface-shape property of a specularly reflective surface are disclosed. The method includes: reflecting a first circularly polarized laser beam from a sample surface to form a second circularly polarized laser beam that contains surface-shape information; converting the second circularly polarized laser beam to a linearly polarized reflected laser beam; directing respective first and second portions of the linearly polarized reflected laser beam to first and second relay assemblies that constitute first and second interferometer arms. The first and second relay assemblies each use a pair of axially spaced-apart gratings to generate respective first and second interference patterns at respective first and second image sensors. Respective first and second signals from the first and second image sensors are processed to determine the at least one surface-shape property.

First claim

What is claimed is:

1. A method of measuring at least one shape-based property of a specularly reflective surface, comprising:
directing a collimated laser beam having a first circular polarization to a sample surface;
reflecting the collimated laser beam from the sample surface to form a reflected laser beam having a second circular polarization and that includes shape information of the specularly reflective surface;
converting the reflected laser beam having the second circular polarization to a linearly polarized reflected laser beam;
directing a first portion of the linearly polarized reflected laser beam to a first pair of axially spaced apart gratings having a first orientation and forming two first diffraction components, and combining the two first diffraction components to form a first interference pattern on a first image sensor;
directing a second portion of the linearly polarized reflected laser beam to a second pair of axially spaced apart gratings having a second orientation orthogonal to the first orientation and forming two second diffraction components and combining the two second diffraction components to form a second interference pattern on a second image sensor; and
processing the first and second interference patterns to determine the at least one shape-based property of the specularly reflective surface.

2. The method according to claim 1 , wherein directing the first and second portions of the linearly polarized reflected laser beam includes using a beam splitter to send the first and second portions of the linearly polarized reflected laser beam to respective first and second relay assemblies.

3. The method according to claim 1 , wherein the first and second portions of the linearly polarized reflected laser beam have substantially the same intensity.

4. The method according to claim 1 , wherein directing the collimated laser beam includes generating an initial laser beam from a laser source and passing the initial laser beam through a first beam expander to form a first expanded laser beam and then through a beam expanding optical system to form a second expanded laser beam.

5. The method according to claim 4 , wherein the initial laser beam and the first expanded laser beam are linearly polarized and including passing the first expanded laser beam through a quarter-wave retardation plate to form a circularly polarized collimated laser beam.

6. The method according to claim 5 , wherein converting the reflected laser beam having the second circular polarization to the linearly polarized reflected laser beam includes passing the reflected laser beam through the quarter-wave retardation plate.

7. The method according to claim 1 , wherein combining the two first diffraction components includes passing the two first diffraction components through a first Fourier aperture using a first relay lens system, and wherein combining the two second diffraction components includes passing the two second diffraction components through a second Fourier aperture using a second relay lens system.

8. The method according to claim 1 , wherein the collimated laser beam having a first circular polarization has a diameter of between 300 mm and 450 mm.

9. The method according to claim 1 , wherein the collimated laser beam is formed from an initial laser beam emitted by a helium-neon laser.

10. The method according to claim 1 , wherein the first and the second pairs of axially spaced apart gratings each consist of phase gratings.

11. The method according to claim 1 , further comprising controlling a first magnification of the first portion of the linearly polarized reflected laser beam and controlling a second magnification of the second portion of the linearly polarized reflected laser beam so that the first interference pattern formed on the first image sensor has a same size as the second interference pattern formed on the second image sensor.

12. The method according to claim 1 , where the first image sensor has first pixels and is combined with a first camera lens to form a first camera, wherein the second image sensor has second pixels and is combined with a second camera lens to form a second camera, and wherein each of the first and second cameras has multi-axis position control to perform surface-to-sensor pixel matching between the sample surface and the first and second pixels of the first and second image sensors.

13. The method according to claim 1 , wherein the at least one shape-based property includes a height difference between two locations on the sample surface, a slope and a curvature.

14. The method according to claim 1 , further comprising:
directing the two first diffraction components through a first adjustable aperture having an adjustable size and adjustable axial position;
directing the two second diffraction components through a second adjustable aperture having an adjustable size and adjustable axial position; and
adjusting at least one of the size and axial position of the first and second adjustable apertures to block diffraction orders other than two first diffraction orders and two second diffraction orders, respectively.

15. A system for measuring at least one shape-based property of a sample having a surface that is specularly reflective, comprising:
a laser source that emits a first linearly polarized laser beam;
a polarizing beam splitter arranged to transmit the first linearly polarized laser beam;
a waveplate arranged to transmit the first linearly polarized laser beam transmitted by the polarizing beam splitter to form a first circularly polarized laser beam;
a beam expanding optical system that receives and directs the first circularly polarized laser beam to the surface of sample to form a reflected laser beam having a second circular polarization and that includes shape information about the surface of sample, wherein the reflected laser beam exits the beam expanding optical system, passes through the waveplate and that reflects from the polarizing beam splitter to form a second linearly polarized laser beam;
a beam splitter arranged to pass and reflect respective first and second portions of the second linearly polarized laser beam;
a first relay assembly arranged to receive and direct the first portion of the second linearly polarized laser beam to a first pair of axially spaced apart gratings having a first orientation and that form two first diffraction components, wherein the two first diffraction components are combined to form a first interference pattern on a first image sensor;
a second relay assembly arranged to receive and direct the second portion of the second linearly polarized laser beam to a second pair of axially spaced apart gratings having a second orientation to form two second diffraction components, wherein the two second diffraction components are combined to form a second interference pattern on a second image sensor; and
a processor configured to process the first and second interference patterns to determine the at least one shape-based property of the sample having the surface that is specularly reflective.

16. The system according to claim 15 , wherein the at least one shape-based property includes a height difference between two locations on the surface of sample, a slope and a curvature.

17. The system according to claim 15 , wherein the surface of sample has a diameter and wherein the beam-expanding optical system is configured to expand the first circularly polarized laser beam to have a diameter equal to or greater than the diameter of the surface of sample.

18. The system a

Assignees

• Ultratech Inc

Inventors

• Stites David G

Classifications

• G01B11/2441 Primary

  using interferometry · CPC title

• G01B2290/30

  Grating as beam-splitter · CPC title

• G01B2290/70

  Using polarization in the interferometer · CPC title

• G01B9/02098

  Shearing interferometers · CPC title

• G01B2290/45

  Multiple detectors for detecting interferometer signals · CPC title