Vacuum processing system, vacuum processing device, lubricating agent supply device, and lubricating agent supplying method

Patent metadata

Field	Value
Publication number	US-9784317-B2
Application number	US-201514607661-A
Country	US
Kind code	B2
Filing date	Jan 28, 2015
Priority date	Apr 28, 2014
Publication date	Oct 10, 2017
Grant date	Oct 10, 2017

Abstract

A transport system is a vacuum processing system that includes a transport device that is provided in a vacuum, and a lubricating agent supply device that supplies lubricating agent to the transport device and provided in the ambient atmosphere. The transport device has a lubricating agent flow channel that is a channel for grease injected to a site subject to lubrication. The lubricating agent supply device has a grease server that stores a lubricating agent in the ambient atmosphere, a lubricating agent supply pipe which is a channel that guides the grease stored in the grease server to the lubricating agent flow channel and that connects the grease server and the lubricating agent flow channel, and an exhaust pump that exhausts the inside of the lubricating agent supply pipe.

First claim

What is claimed is:

1. A vacuum processing system comprising:
at least one vacuum processing device provided in a vacuum, and a lubricating agent supply device that supplies lubricating agent to the vacuum processing device and is provided in the ambient atmosphere; wherein
the vacuum processing device has a lubricating agent flow channel that is a channel for lubricating agent that is injected to a site subject to lubrication;
the lubricating agent supply device comprising:
a lubricating agent storage part that stores the lubricating agent in the ambient atmosphere;
a lubricating agent supply channel that is connected to the lubricating agent storage part and the lubricating agent flow channel, and is a channel that guides the lubricating agent that is stored in the lubricating agent storage part to the lubricating agent flow channel; and
an exhausting part that exhausts inside the lubricating agent supply channel.

2. The vacuum processing system according to claim 1 , wherein
the vacuum processing device comprises:
a guide rail; and
a movable body that can move along the guide rail;
wherein the site subject to lubrication is a site that is in contact with the guide rail of the movable body provided at a position that covers a predetermined region of the guide rail.

3. The vacuum processing system according to claim 1 , further comprising:
a control device, wherein an opening and closing valve that is controlled by a control signal input from the control device is inserted in the lubricating agent flow channel;
the lubricating agent supply device further comprising:
an exhaust pipe that connects the lubricating agent supply channel and the exhausting part; and
an exhaust valve that is inserted in the exhaust pipe and is controlled by a control signal input from the control device;
wherein the control device causes the exhaust valve to be in an open condition, and then causes the opening and closing valve to be in an open condition when the inside of the lubricating agent supply channel is exhausted by the exhausting part and the passageway for lubricant supply is in a vacuum condition.

4. The vacuum processing system according to claim 1 , wherein
the vacuum processing device further comprises a first connecting part that is provided in the lubricating agent flow channel; and
the lubricating agent supply device further comprises a second connecting part that detachably and hermetically connects to the first connecting part.

5. A lubricating agent supply device that supplies lubricating agent to a lubricating agent flow channel of a vacuum processing device that has the lubricating agent flow channel which is a channel for the lubricating agent that is introduced to a site subject to lubrication, comprising:
a lubricating agent storage part that stores the lubricating agent in the ambient atmosphere;
a lubricating agent supply channel that is connected to the lubricating agent storage part and the lubricating agent flow channel, and is a passageway that guides the lubricating agent that is stored in the lubricating agent storage part to the lubricating agent flow channel; and
an exhausting part that exhausts inside the lubricating agent supply channel, wherein,
an opening and closing valve that is controlled by a control signal input from a control device is inserted in the lubricating agent flow channel;
the lubricating agent supply device further comprising:
an exhaust pipe that connects the lubricating agent supply channel and the exhausting part; and
an exhaust valve that is inserted in the exhaust pipe and is controlled by a control signal input from the control device;
wherein the control device causes the exhaust valve to be in an open condition, and then causes the opening and closing valve to be in an opened condition when the inside of the lubricating agent supply channel is exhausted by the exhausting part and the lubricating agent supply channel is in a vacuum condition.

6. The lubricating agent supply device according to claim 5 , further comprising:
a second connecting part provided in the lubricating agent supply channel in order to connect to the lubricating agent flow channel; and
a lubricating agent sending part configuring a part of the lubricating agent supply channel, and that transmits the lubricating agent stored in the lubricating agent storage part toward the second connecting part.

7. The lubricating agent supply device according to claim 5 , further comprising:
a lubricating agent capturing part provided between the lubricating agent supply channel and the exhausting part, and that captures the lubricating agent included in the gas that travels from the lubricating agent supply channel toward the exhausting part.

8. A lubricating agent supply method for supplying lubricating agent to a site subject to lubrication of at least one vacuum processing device provided in a vacuum, comprising:
exhausting a gas that remains at a site that is located in the ambient atmosphere of a lubricating agent supply channel, the gas being exhausted from the lubricating agent storage part that stores the lubricating agent, and to the site subject to lubrication, wherein the site is provided in the ambient atmosphere; and
transmitting the lubricating agent stored in the lubricating agent storage part to the site subject to lubrication of the vacuum processing device through the lubricating agent supply channel.

Assignees

• Nissin Ion Equipment Co Ltd
• Nissin Ion Equipment Co Ltd

Inventors

• Onoda Masatoshi

Classifications

• F16C29/0645

  with load directions in O-arrangement · CPC title

• F16N29/02

  for influencing the supply of lubricant · CPC title

• F16C29/005

  Guide rails or tracks for a linear bearing, i.e. adapted for movement of a carriage or bearing body there along · CPC title

• F16N7/385

  Central lubrication systems · CPC title

• F16N9/00

  Arrangements for supplying oil or unspecified lubricant from a moving reservoir or the equivalent (also usable with a stationary reservoir F16N7/00) · CPC title