Thermal inkjet printhead

Patent metadata

Field	Value
Publication number	US-9782969-B2
Application number	US-201715461393-A
Country	US
Kind code	B2
Filing date	Mar 16, 2017
Priority date	Jan 29, 2014
Publication date	Oct 10, 2017
Grant date	Oct 10, 2017

Abstract

A thermal inkjet printhead may include a passivation layer, a bond pad formed over the passivation layer and insulating strips of a dielectric material formed over the passivation layer on opposite sides of the bond pad.

First claim

We claim:

1. A thermal inkjet printhead comprising:
a passivation layer;
a bond pad formed over the passivation layer; and
insulating strips of a dielectric material formed over the passivation layer on opposite sides of the bond pad.

2. The thermal inkjet printhead of claim 1 , wherein each of the insulating strips has a thickness in a range of about 2 micrometer (μm) to 6 μm.

3. The thermal inkjet printhead of claim 1 , wherein the dielectric material is a SU8 primer.

4. The thermal inkjet printhead of claim 1 , wherein the bond pad comprises:
an adhesive layer of tantalum; and
a bond pad layer of gold, wherein the bond pad layer of gold is deposited over the adhesive layer of tantalum.

5. The thermal inkjet printhead of claim 1 further comprising a bond wire connected to the bond pad.

6. The thermal inkjet printhead of claim 5 , wherein the bond wire extends from the bond pad between the insulating strips.

7. The thermal inkjet printhead of claim 5 further comprising a layer of the dielectric material continues extending about the bond pad, wherein the bond wire extends from the bond pad, across and beyond the layer of the dielectric material.

8. The thermal inkjet printhead of claim 1 further comprising a layer of the dielectric material continuously extending about the bond pad and forming the insulating strips.

9. The thermal inkjet printhead of claim 1 , wherein the insulating strips are isolated from one another on opposite sides of the bond pad.

10. The thermal inkjet printhead of claim 1 , wherein the bond pad has a surface facing and spaced from the passivation layer and wherein the insulating strips have a surface facing and in contact with the passivation layer.

11. The thermal inkjet printhead of claim 10 further comprising an adhesive layer sandwiched between the passivation layer and the bond pad.

12. The thermal inkjet printhead of claim 1 further comprising:
a second bond pad formed over the passivation layer; and
a layer of the dielectric material continuously extending about the bond pad and the second bond pad, the layer forming the insulating strips.

13. The thermal inkjet printhead of claim 1 , wherein the insulating strips are each spaced from and out of contact with the bond pad.

14. A method for fabricating a thermal inkjet printhead, the method comprising:
forming a bond pad region having a bond pad deposited over a passivation layer; and
depositing a dielectric material along opposite sides of the bond pad to obtain insulating strips on the opposite sides of the bond pad.

15. The method as claimed in claim 14 , wherein the forming the bond pad region further comprises:
depositing an adhesive material on the passivation layer using a technique of sputter deposition to form an adhesive layer;
depositing a layer of metal over the adhesive layer using the technique of sputter deposition to create the bond pad region; and
creating the bond pad in the bond pad region using a process of lithography, wherein at least one portion of the adhesive material and the metal are removed from the bond pad region to form the cavity of the predetermined thickness along the bond pad.

16. The method as claimed in claim 15 , wherein the bond pad is created using the process of photolithography.

17. The method as claimed in claim 14 , wherein the depositing the dielectric material further comprising:
depositing the dielectric material on the passivation layer, wherein the dielectric material is deposited over the bond pad and in the cavity along the bond pad; and
performing a process of photolithography to remove the dielectric material deposited over the bond pad using an etching mask.

18. The method as claimed in claim 14 further comprising:
bonding a bond wire on the bond pad using a process of tape automated bonding; and
encapsulating the bond pad region using a protective material to obtain an encapsulating region.

19. The method as claimed in claim 14 , wherein the insulating strip has a thickness in a range of about 2 micrometer (μm) to 6 μm.

20. The method as claimed in claim 14 , wherein the dielectric material is a SU8 primer.

Assignees

• Hewlett Packard Development Co Lp

Inventors

• Leigh Stan E
• Mcmahon Terry
• Abadilla Thomas P

Classifications

• B41J2/1648

  Production of print heads with thermal bend detached actuators · CPC title

• B41J2/1646

  thin film formation by sputtering · CPC title

• B41J2/1631

  photolithography · CPC title

• B41J2/1601

  Production of bubble jet print heads (B41J2/1606, B41J2/162 take precedence) · CPC title

• B41J2/1603

  of the front shooter type · CPC title