Transmission Line RF Applicator for Plasma Chamber
US-2015340204-A1 · Nov 26, 2015 · US
US9781832B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9781832-B2 |
| Application number | US-201414480767-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 9, 2014 |
| Priority date | Jan 6, 2012 |
| Publication date | Oct 3, 2017 |
| Grant date | Oct 3, 2017 |
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A laminate body includes a plurality of dielectric sheets laminated together. A first ground conductor is provided in or on the laminate body. A second ground conductor is provided in or on the laminate body and located on a different layer from the first ground conductor. A signal line is provided between the ground conductors and with respect to a direction of lamination. A signal line is provided between the ground conductors and with respect to the direction of lamination and located closer to the second ground conductor than the signal line is, and the signal line has a portion extending along the signal line in a parallel-lines area when viewed from the direction of lamination. The first ground conductor has openings in the parallel-lines area, and the openings are arranged over the signal line when viewed from the direction of lamination.
Opening claim text (preview).
What is claimed is: 1. A laminated multi-conductor cable comprising: a laminate body including a plurality of base material layers laminated together; a first ground conductor provided in or on the laminate body; a second ground conductor provided in or on the laminate body and located on a different layer from the first ground conductor; a first signal line provided between the first ground conductor and the second ground conductor with respect to a direction of lamination and located closer to the first ground conductor than to the second ground conductor; and a second signal line provided between the first ground conductor and the second ground conductor with respect to the direction of lamination and located closer to the second ground conductor than the first signal line is, the second signal line extending along and not overlapping the first signal line when viewed from the direction of lamination in at least a portion of the laminate body; wherein the first signal line, the first ground conductor, and the second ground conductor define a first stripline structure; the second signal line, the first ground conductor, and the second ground conductor define a second stripline structure; and the first ground conductor includes, in at least the portion of the laminate body, a first opening located over the first signal line when viewed from the direction of lamination and no openings located over the second signal line when viewed from the direction of lamination. 2. The laminated multi-conductor cable according to claim 1 , wherein the first opening includes a plurality of first openings arranged along the first signal line; and the second ground conductor includes a second opening in at least the portion of the laminate body, the second opening being located over the second signal line when viewed from the direction of lamination. 3. The laminated multi-conductor cable according to claim 2 , wherein the first ground conductor includes a first bridge between adjacent first openings of the plurality of first openings, the first bridge being located over the first signal line when viewed from the direction of lamination; the second opening includes a plurality of second openings arranged along the second signal line; the second ground conductor includes a second bridge between adjacent second openings of the plurality of second openings, the second bridge being located over the second signal line when viewed from the direction of lamination; the first bridge is located in at a center axis of one of the second openings with respect to a direction in which the first signal line extends; and the second bridge is located in at a center axis of one of the first openings with respect to a direction in which the second signal line extends. 4. The laminated multi-conductor cable according to claim 1 , wherein when viewed from the direction of lamination, the first signal line and the second signal line cross each other in at least the portion of the laminate body; and the laminated multi-conductor cable further includes a third ground conductor provided between the first signal line and the second signal line and located to cover crossing portions of the first signal line and the second signal line when viewed from the direction of lamination. 5. The laminated multi-conductor cable according to claim 1 , wherein the laminate body is flexible. 6. The laminated multi-conductor cable according to claim 1 , wherein each of the first signal line and the second signal line is a linear conductor. 7. The laminated multi-conductor cable according to claim 3 , wherein the first and second bridges and the first and second openings are alternately arranged. 8. The laminated multi-conductor cable according to claim 3 , wherein the first and second bridges are arranged along the first signal line at intervals shorter than about one half wavelength of a high-frequency signal to be transmitted through the first signal line. 9. The laminated multi-conductor cable according to claim 1 , further comprising via hole conductors provided in the laminate body. 10. The laminated multi-conductor cable according to claim 1 , further comprising a preventive layer arranged to cover one of the first ground conductor and the second ground conductor. 11. The laminated multi-conductor cable according to claim 10 , wherein the preventive layer includes a line portion and connection portions. 12. An electronic device comprising the laminated multi-conductor cable according to claim 1 . 13. The electronic device according to claim 12 , further comprising a plurality of circuit boards; a plurality of receptacles; a battery pack; and a case. 14. The electronic device according to claim 13 , wherein the laminated multi-conductor cable is arranged to connect respective ones of the plurality of circuit boards to each other. 15. The laminated multi-conductor cable according to claim 1 , wherein the laminated multi-conductor cable has a rectangular or substantially rectangular shape. 16. The laminated multi-conductor cable according to claim 2 , wherein widths of the plurality of first openings and the plurality of second openings are different from each other. 17. The laminated multi-conductor cable according to claim 1 , wherein portions of the first signal line have different widths from each other. 18. The laminated multi-conductor cable according to claim 1 , wherein at least one of the first ground conductor and the second ground conductor includes a meshed portion arranged to cover an intersection area where there first and second signal lines cross each other. 19. The laminated multi-conductor cable according to claim 2 , further comprising floating conductors provided in at least one of the plurality of first openings and the plurality of second openings. 20. The laminated multi-conductor cable according to claim 1 , wherein no other ground conductors are provided between the first signal line and the first ground conductor and between the first signal line and the second ground conductor; and no other ground conductors are provided between the second signal line and the first ground conductor and between the second signal line and the second ground conductor. 21. The laminated multi-conductor cable according to claim 1 , wherein the second ground conductor includes a second opening in at least the portion of the laminate body, the second opening being located over the second signal line when viewed from the direction of lamination.
Triplate lines · CPC title
Microstrips; Strip lines · CPC title
Single or multiple openings in a shielding, ground or power plane (H05K1/0227 takes precedence) · CPC title
Flexible materials (H05K1/038 takes precedence; specific organic compositions are classified in H05K1/0313 and subgroups) · CPC title
Stacked PCBs, i.e. having neither an empty space nor mounted components in between · CPC title
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