Solid-state structures with volatile sintering aids, and methods for fabrication and use thereof
US-2024429439-A1 · Dec 26, 2024 · US
US9780295B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9780295-B2 |
| Application number | US-201314759569-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 28, 2013 |
| Priority date | Jan 28, 2013 |
| Publication date | Oct 3, 2017 |
| Grant date | Oct 3, 2017 |
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A lead-free piezoelectric ceramic material has the general chemical formula xBiCoO3-y(Bi0.5Na0.5)TiO3-z(Bi0.5K0.5)TiO3, xBiCoO3-y(Bi0.5Na0.5)TiO3-zNaN-bO3, xBiCoO3-y(Bi0.5Na0.5)TiO3-zKNbO3, xBiCoO3-yBi(Mg0.5Ti0.5)O3-z(Bi0.5Na0.5)TiO3, xBiCoO3-yBa-TiO3-z(Bi0.5Na0.5)TiO3, or xBiCoO3-yNaNbO3-zKNbO3; wherein x+y+z=1, and x, y, z≠0.
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What is claimed is: 1. A lead-free piezoelectric ceramic material having the general chemical formula: xBiCoO 3 -y(Bi 0.5 Na 0.5 )TiO 3 -zNaNbO 3 ; xBiCoO 3 -y(Bi 0.5 Na 0.5 )TiO 3 -zKNbO 3 ; xBiCoO 3 -yBi(Mg 0.5 Ti 0.5 )O 3 -z(Bi 0.5 Na 0.5 )TiO 3 ; or xBiCoO 3 -yBaTiO 3 -z(Bi 0.5 Na 0.5 )TiO 3 ; wherein x+y+z=1, and x, y, z≠0. 2. The lead-free piezoelectric ceramic material of claim 1 , wherein 0.01≦x≦0.2. 3. The lead-free piezoelectric ceramic material of claim 1 , wherein x≦0.2. 4. The lead-free piezoelectric ceramic material of claim 1 , wherein the ceramic material has an effective piezoelectric strain coefficient d 33 * of about 150-500 pm/V. 5. The lead-free piezoelectric ceramic material of claim 1 , wherein the ceramic material has a maximum electromechanical strain value of about 0.1% to 0.3%. 6. The lead-free piezoelectric ceramic material of claim 1 , wherein the ceramic material has a remanent polarization of about 25-40 μC/cm 2 . 7. The lead-free piezoelectric ceramic material of claim 1 , wherein the ceramic material has a remanent polarization equal to or exceeding that of a lead-based piezoelectric material. 8. The lead-free piezoelectric ceramic material of claim 1 , wherein the ceramic material is a piezoelectric layer of a thin film stack, and wherein the piezoelectric layer is situated between first and second metal layers of the thin film stack. 9. The lead-free piezoelectric ceramic material of claim 8 , wherein the thin film stack is an actuator for a fluid ejection device. 10. A lead-free piezoelectric ceramic material having the general chemical formula: xBiCoO 3 -y(Bi 0.5 Na 0.5 )TiO 3 -z(Bi 0.5 K 0.5 )TiO 3 ; xBiCoO 3 -y(Bi 0.5 Na 0.5 )TiO 3 -zNaNbO 3 ; xBiCoO 3 -y(Bi 0.5 Na 0.5 )TiO 3 -zKNbO 3 ; xBiCoO 3 -yBi(Mg 0.5 Ti 0.5 )O 3 -z(Bi 0.5 Na 0.5 )TiO 3 ; xBiCoO 3 -yBaTiO 3 -z(Bi 0.5 Na 0.5 )TiO 3 ; or xBiCoO 3 -yNaNbO 3 -zKNbO 3 ; wherein x+y+z=1, and x, y, z≠0; and wherein the ceramic material has an effective piezoelectric strain coefficient d 33 * of 180-500 pm/V. 11. The lead-free piezoelectric ceramic material of claim 10 , wherein x≦0.2. 12. The lead-free piezoelectric ceramic material of claim 10 , wherein the ceramic material has a maximum electromechanical strain value of 0.15% to 0.3%. 13. The lead-free piezoelectric ceramic material of claim 10 , wherein the ceramic material is a piezoelectric layer of a thin film stack, and wherein the piezoelectric layer is situated between first and second metal layers of the thin film stack. 14. The lead-free piezoelectric ceramic material of claim 13 , wherein the thin film stack is an actuator for a fluid ejection device.
Specific materials used · CPC title
Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof · CPC title
Alkali metal oxides or oxide-forming salts thereof · CPC title
of film type, deformed by bending and disposed on a diaphragm · CPC title
Cobalt oxides, cobaltates or cobaltites or oxide forming salts thereof, e.g. bismuth cobaltate, zinc cobaltite · CPC title
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