Vacuum pump
US-9249805-B2 · Feb 2, 2016 · US
Vacuum pump and mass spectrometer
US9779928B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9779928-B2 |
| Application number | US-201615145895-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 4, 2016 |
| Priority date | Jun 9, 2015 |
| Publication date | Oct 3, 2017 |
| Grant date | Oct 3, 2017 |
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- Title
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- Abstract
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Abstract
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A vacuum pump comprises: a first pump stage; a second pump stage provided downstream of the first pump stage; a first suction port provided on a suction side of the first pump stage; and a second suction port provided downstream of the first pump stage and communicating with the second pump stage. The first pump stage includes a siegbahn pump portion suitable for a small exhaust volume, and a turbo-molecular pump portion. The second pump stage includes a Holweck pump portion suitable for a great exhaust volume.
First claim
Opening claim text (preview).
What is claimed is: 1. A vacuum pump comprising: a first pump stage; a second pump stage provided downstream of the first pump stage; a first suction port provided on a suction side of the first pump stage; and a second suction port provided downstream of the first pump stage and communicating with the second pump stage, wherein the first pump stage includes a siegbahn pump portion suitable for a small exhaust volume, and a turbo-molecular pump portion, and the second pump stage includes a Holweck pump portion suitable for a great exhaust volume. 2. The vacuum pump according to claim 1 , wherein the second suction port is provided between an upstream end portion and a downstream end portion in an exhaust path of the second pump stage. 3. A mass spectrometer comprising: the vacuum pump according to claim 1 ; a first analysis unit; a second analysis unit configured to operate in a pressure region higher than a pressure region of the first analysis unit; a first chamber configured to house the first analysis unit and provided with a first exhaust port connected to the first suction port of the vacuum pump; and a second chamber configured to house the second analysis unit and provided with a second exhaust port connected to the second suction port of the vacuum pump.
Assignees
Inventors
Classifications
- F04D19/046Primary
Combinations of two or more different types of pumps · CPC title
- H01J49/24Primary
Vacuum systems, e.g. maintaining desired pressures · CPC title
Holweck-type pumps · CPC title
Pumps specially adapted to produce a vacuum · CPC title
Turbomolecular vacuum pumps · CPC title
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Frequently asked questions
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- What does patent US9779928B2 cover?
- A vacuum pump comprises: a first pump stage; a second pump stage provided downstream of the first pump stage; a first suction port provided on a suction side of the first pump stage; and a second suction port provided downstream of the first pump stage and communicating with the second pump stage. The first pump stage includes a siegbahn pump portion suitable for a small exhaust volume, and a t…
- Who is the assignee on this patent?
- Shimadzu Corp
- What technology area does this patent fall under?
- Primary CPC classification F04D19/046. Mapped technology areas include Mechanical Engineering.
- When was this patent published?
- Publication date Tue Oct 03 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).