Gage pressure transducer and method for making the same

Patent metadata

Field	Value
Publication number	US-9778126-B2
Application number	US-201514713333-A
Country	US
Kind code	B2
Filing date	May 15, 2015
Priority date	Dec 17, 2010
Publication date	Oct 3, 2017
Grant date	Oct 3, 2017

Abstract

A method, device and system for a gage pressure transducer including the making thereof are provided. In one embodiment, a method includes receiving, at a first diaphragm, a first pressure, wherein the first diaphragm is composed of metal; transferring, from the first diaphragm, to a first sensor, the first pressure using a first oil region, wherein the first oil region is disposed between the first diaphragm and the first sensor; receiving, at the first sensor, the first pressure; measuring, by the first sensor, the first pressure to generate a first pressure signal; and outputting, from the first sensor, to a first header pin, the first pressure signal, wherein the first header pin is electrically coupled to the first sensor using a first conductive glass frit.

First claim

What is claimed is:

1. A pressure transducer assembly, comprising:
a first sensor module and a second sensor module, each sensor module comprising:
a diaphragm;
an alignment plate comprising a sensor accommodating aperture having a first geometry and extending through the alignment plate;
a sensor disposed within the sensor accommodation aperture, the sensor having a second geometry corresponding to the first geometry of the sensor accommodating aperture such that the sensor accommodation aperture accommodates the sensor; and
an oil accommodating region defined between the first sensor and the diaphragm;

wherein the first sensor module is configured to measure a first pressure and the second sensor module is configured to measure a reference pressure.

2. The pressure transducer assembly of claim 1 , wherein the sensor of the first sensor module comprises a first half-bridge piezoresistive sensing network, and wherein the sensor of the second sensor module comprises a second half-bridge piezoresistive sensing network.

3. The pressure transducer assembly of claim 2 , wherein the first half-bridge piezoresistive sensing network and the second half-bridge piezoresistive sensing network are in electrical communication with each other to form a complete Wheatstone bridge.

4. The pressure transducer assembly of claim 1 , wherein the first and second sensor modules are equivalent in configuration.

5. The pressure transducer assembly of claim 1 , wherein the alignment plates of the first and second sensor modules each further comprise respective oil tube apertures extending through each alignment plate, the oil tube apertures configured for housing corresponding oil tubes in communication with the respective oil accommodating regions, the respective oil tubes configured for providing oil to the respective oil accommodating regions.

6. The pressure transducer assembly of claim 1 , wherein each diaphragm of the first and second sensor modules comprises a metal.

7. The pressure transducer assembly of claim 1 , wherein each sensor module further comprises:
a header shell;
a glass pre-form configured to fit within the header shell, the glass pre-form comprising a plurality of pin apertures and an oil tube aperture;
a plurality of header pins, each extending through the plurality of pin apertures and past a surface of the glass pre-form; and
an oil tube extending through the oil tube aperture past a surface of the glass pre-form.

8. The pressure transducer assembly of claim 7 , wherein the first and second sensor modules are leadless and comprise a plurality of electrical contact pads that are aligned with and in electrical communication with the respective plurality of header pins.

9. The pressure transducer of claim 7 , wherein each sensor module further comprises a plurality of electrical contact pads, and wherein each sensor module is disposed adjacent to a top surface of the respective glass pre-form, such that the electrical contact pads are aligned and in electrical communication with the corresponding plurality of header pins.

10. The pressure transducer of claim 1 , wherein the first and second sensor modules are welded to corresponding first and second sections of the transducer assembly.

11. A sensor system, comprising:
a first conductive glass frit;
a first header pin;
a first diaphragm adapted to receive a first pressure;
a first sensor disposed in a first alignment plate and electrically coupled to the first header pin by the first conductive glass frit, wherein the first sensor is configured to:
receive the first pressure;
measure the first pressure to generate a first pressure signal; and
output, to the first header pin, the first pressure signal.

12. The sensor system of claim 11 , further comprising a first oil region disposed between the first diaphragm and the first sensor, the first oil region adapted to transfer, from the first diaphragm, to the first sensor, the first pressure.

13. The sensor system of claim 12 , wherein the first oil region is less than 0.015 inches in thickness.

14. The sensor system of claim 11 , wherein the first sensor is a first half-bridge piezoresistive sensing network.

15. The sensor system of claim 11 , wherein the first sensor, the first diaphragm, the first oil region, the first header pin and the first conductive glass frit are associated with a first sensing assembly.

16. The sensor system of claim 15 , wherein the first sensing assembly is hermetically sealed.

17. The sensor system of claim 11 , further comprising:
a second conductive glass frit;
a second header pin;
a second diaphragm adapted to receive a second pressure;
a second sensor disposed in a second alignment plate and electrically coupled to the second header pin using the second conductive glass frit, wherein the second sensor is configured to:
receive the second pressure;
measure the second pressure to generate a second pressure signal; and
output, to the second header pin, the second pressure signal.

18. The sensor system of claim 17 , further comprising a second oil region disposed between the second diaphragm and the second sensor and adapted to transfer, from the second diaphragm, to the second sensor, the second pressure.

19. The sensor system of claim 17 , wherein the first sensor is a first half-bridge piezoresistive sensing network and the second sensor is a second half-bridge piezoresistive sensing network, and wherein the first pressure signal and the second pressure signal are used to determine a differential pressure signal.

20. The sensor system of claim 17 :
wherein the first sensor, the first alignment plate, the first diaphragm, the first header pin and the first conductive glass frit are associated with a first sensing assembly;
wherein the second sensor, the second alignment plate, the second diaphragm, the second header pin and the second conductive glass frit are associated with a second sensing assembly;
wherein the first sensing assembly is housed in a first section of a housing and the second sensing assembly is housed in a second section of the housing; and
wherein the first alignment plate and the second alignment plate comprises respective sensor accommodating apertures having respective geometries corresponding to the respective first and second sensors, the sensor accommodating apertures extending through the alignment plate such that the sensor accommodation apertures accommodate the first and second sensors.

Assignees

• Kurtz Nora D
• Kulite Semiconductor Products Inc

Inventors

• Kurtz Anthony D

Classifications

• G01L9/06

  of piezo-resistive devices · CPC title

• G01L9/0052

  of piezoresistive elements (circuits therefor G01L9/06) · CPC title

• G01L19/0627

  Protection against aggressive medium in general · CPC title

• G01L13/025 Primary

  using diaphragms · CPC title

• G01L13/00

  Devices or apparatus for measuring differences of two or more fluid pressure values · CPC title