Heteroepitaxial growth of orientation-patterned materials on orientation-patterned foreign substrates

Patent metadata

Field	Value
Publication number	US-9777402-B2
Application number	US-201715455370-A
Country	US
Kind code	B2
Filing date	Mar 10, 2017
Priority date	Nov 7, 2014
Publication date	Oct 3, 2017
Grant date	Oct 3, 2017

Abstract

A method of forming a layered OP material is provided, where the layered OP material comprises an OPGaAs template, and a layer of GaP on the OPGaAs template. The OPGaAs template comprises a patterned layer of GaAs having alternating features of inverted crystallographic polarity of GaAs. The patterned layer of GaAs comprises a first feature comprising a first crystallographic polarity form of GaAs having a first dimension, and a second feature comprising a second crystallographic polarity form of GaAs having a second dimension. The layer of GaP on the patterned layer of GaAs comprises alternating regions of inverted crystallographic polarity that generally correspond to their underlying first and second features of the patterned layer of GaAs. Additionally, each of the alternating regions of inverted crystallographic polarity of GaP are present at about 100 micron thickness or more.

First claim

What is claimed is:

1. A method for forming a layered orientation patterned material comprising:
placing an orientation patterned gallium arsenide template comprising a patterned layer of gallium arsenide into a hydride vapor phase epitaxy (HVPE) reaction chamber comprising an elemental gallium sample, wherein the patterned layer of gallium arsenide has alternating features of inverted crystallographic polarity, the patterned layer comprising:
a first feature comprising a first crystallographic polarity form of gallium arsenide having a first dimension, and a second feature comprising a second crystallographic polarity form of gallium arsenide having a second dimension, wherein a sum of the first and second dimensions defines a period of the patterned layer of gallium arsenide;

establishing an HVPE reactor chamber pressure of about 10 Torr or less;
flowing a gaseous mixture of a hydrogen halide and hydrogen across the elemental gallium sample to form gallium halide;
reacting gallium halide with an excess of phosphine to form gallium phosphide, wherein an atomic ratio of phosphorus to gallium is between about 6.0 to about 8.0;
growing a layer of gallium phosphide on the orientation patterned gallium arsenide template at a temperature in a range of about 715° C. to about 740° C., wherein the layer of gallium phosphide comprises alternating regions of inverted crystallographic polarity of gallium phosphide that generally correspond to the first and second features of the patterned layer of gallium arsenide; and
continuing to grow the layer of gallium phosphide to reach a thickness of about 100 micron or more.

2. The method of claim 1 , wherein the hydrogen halide is hydrogen chloride, and wherein the gallium halide is gallium chloride.

3. The method of claim 1 , wherein reacting gallium halide with an excess of phosphine to form gallium phosphide further comprises,
introducing arsine with phosphine to react a portion of the gallium halide with the arsine to form gallium arsenide.

4. The method of claim 3 , wherein a mass flow ratio of phosphine to arsine is in a range from about 0.2 to about 240.

5. The method of claim 3 , wherein a mass flow ratio of phosphine to arsine is about 2.4.

6. The method of claim 3 , wherein introducing arsine with the phosphine is conducted for a duration sufficient to form a layer of a ternary mixture of gallium, arsenic, and phosphorous at a thickness of about 10 nm or more, wherein the ternary mixture is represented by a general chemical formula GaAs x P 1-x , where x is in a range from 0<x<1.

7. The method of claim 1 , wherein the period of the patterned layer of gallium arsenide is at least 30 microns with at least each of the first and second dimensions having a minimum width of about 15 microns.

8. The method of claim 1 , wherein each of the alternating regions of inverted crystallographic polarity of gallium phosphide has a width that generally corresponds to its respective first and second dimensions at the 100 micron thickness.

9. The method of claim 1 , wherein the first and second dimensions have approximately equal width.

10. The method of claim 1 , wherein the patterned layer of gallium arsenide includes a plurality of first and second features; and wherein the periods of the first and second features are approximately constant across the orientation patterned gallium arsenide template.

Assignees

• Us Air Force
• Us Air Force

Inventors

• Tassev Vladimir L
• Peterson Rita D

Classifications

• H10P14/3466

  Crystal orientation · CPC title

• H10P14/3418

  Phosphides · CPC title

• H10P14/3258

  Crystal orientation · CPC title

• H10P14/3251

  consisting of three or more layers · CPC title

• H10P14/3242

  Structure · CPC title