Bonded wafer and method for producing bonded wafer
US-2024379899-A1 · Nov 14, 2024 · US
US9776378B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9776378-B2 |
| Application number | US-201213549861-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 16, 2012 |
| Priority date | Feb 17, 2009 |
| Publication date | Oct 3, 2017 |
| Grant date | Oct 3, 2017 |
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A graphene sheet including an intercalation compound and 2 to about 300 unit graphene layers, wherein each of the unit graphene layers includes a polycyclic aromatic molecule in which a plurality of carbon atoms in the polycyclic aromatic molecule are covalently bonded to each other; and wherein the intercalation compound is interposed between the unit graphene layers.
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What is claimed is: 1. A graphene sheet, comprising: an intercalation compound comprising a carbon-containing compound; and 2 to about 300 unit graphene layers, each of the unit graphene layers comprises a polycyclic aromatic molecule in which a plurality of carbon atoms in the polycyclic aromatic molecule are covalently bonded to each other; and wherein the intercalation compound is interposed between the unit graphene layers, and wherein the carbon-containing compound is at least one of a carbon nanofiber, a carbon nanoparticles, a graphite, a carbon nanotube, a fullerene, and any mixtures thereof. 2. The graphene sheet of claim 1 , wherein the intercalation compound is regularly and periodically arranged. 3. The graphene sheet of claim 1 , wherein about 1 to about 4 unit graphene layers are interposed between layers comprising the intercalation compound. 4. The graphene sheet of claim 1 , wherein, the graphene sheet has a tetragonal structure and each of a width and a length of the graphene sheet is about 1 to about 1,000 millimeters. 5. The graphene sheet of claim 1 , wherein the graphene sheet has a circular shape and a diameter of the graphene sheet is about 1 to about 1,000 millimeters. 6. A process of preparing the graphene sheet comprising an intercalation compound according to claim 1 , the process comprising: forming a graphene sheet; and intercalating an intercalation compound into the graphene sheet using at least one method selected from the group consisting of 2-region vapor phase transport, constant temperature vapor phase transport, an electrochemical method, liquid phase intercalation, and any mixtures thereof, wherein the intercalation compound comprises a carbon-containing compound selected from the group consisting of a carbon nanofiber, a carbon nanoparticles, a graphite, a carbon nanotube, a fullerene, and any mixtures thereof. 7. The process of claim 6 , wherein the 2-region vapor phase transport comprises: disposing the graphene sheet in a first chamber of a reactor and disposing the intercalation compound in a second chamber of the reactor, wherein the first chamber and the second chamber are connected to each other through a pathway; and independently heating each of the first chamber and the second chamber. 8. The process of claim 6 , wherein the constant temperature vapor phase transport comprises supplying a vapor phase intercalation compound into a chamber in which the graphene sheet is disposed, wherein the temperature of the chamber is maintained at a constant temperature. 9. The process of claim 6 , wherein the liquid phase intercalation comprises immersing the graphene sheet in a liquid phase intercalation compound or in a solution of an intercalation compound to form an intercalated graphene sheet, and drying the intercalated graphene sheet. 10. The process of claim 6 , wherein the electrochemical method comprises intercalating the intercalation compound into the graphene sheet by electrolysis in an electrolyte using the graphene sheet as an electrode and the intercalation compound as a counter electrode. 11. The process of claim 6 , wherein at least two methods selected from the group consisting of 2-region vapor phase transport, constant temperature vapor phase transport, an electrochemical method, and liquid phase intercalation are sequentially performed. 12. The process of claim 6 , wherein the forming the graphene sheet comprises: preparing a substrate having a graphitizing catalyst disposed on at least one surface of the substrate; contacting a carbonaceous material with the substrate on which the graphitizing catalyst is disposed; and heat treating the carbonaceous material and the graphitizing catalyst in an inert or a reducing atmosphere to form graphene. 13. The process of claim 12 , wherein the graphitizing catalyst has a single crystalline structure. 14. The process of claim 12 , wherein the contacting the carbonaceous material with the substrate is performed using at least one method selected from the group consisting of: coating the carbonaceous material on the substrate on which the graphitizing catalyst is disposed, wherein the carbonaceous material is a carbon containing polymer; supplying the carbonaceous material onto the substrate on which the graphitizing catalyst is disposed, wherein the carbonaceous material is a gaseous carbonaceous material; and immersing the substrate on which the graphitizing catalyst is disposed in the carbonaceous material to form an immersed substrate, and pre-heat-treating the immersed substrate, wherein the carbonaceous material is a liquid carbonaceous material and any combinations thereof. 15. The process of claim 12 , further comprising removing the graphitizing catalyst by acid treatment after the heat treatment. 16. The process of claim 6 , wherein the intercalation compound comprises a carbon-containing compound selected from the group consisting of a carbon nanofiber, a carbon nanoparticles, a graphite, a carbon nanotube, a fullerene, and any mixtures thereof. 17. A process of preparing the graphene sheet comprising an intercalation compound according to claim 1 , the process comprising: intercalating an intercalation compound into graphite using at least one method selected from the group consisting of 2-region vapor phase transport, constant temperature vapor phase transport, an electrochemical method, and liquid phase intercalation; mechanically cutting the graphite into which the intercalation compound is intercalated; and repeating the cutting of the graphite to obtain a graphene sheet comprising an intercalation compound, wherein the intercalation compound comprises a carbon-containing compound selected from the group consisting of a carbon nanofiber, a carbon nanoparticles, a graphite, a carbon nanotube, a fullerene, and any mixtures thereof. 18. The process of claim 17 , wherein the mechanically cutting comprises separating graphite using an adhesive tape. 19. A transparent electrode comprising a graphene sheet comprising an intercalation compound according to claim 1 . 20. A solar cell comprising the transparent electrode of claim 19 . 21. A conductive thin film comprising a graphene sheet comprising an intercalation compound according to claim 1 . 22. A display device comprising the conductive thin film of claim 21 . 23. A hydrogen storage medium comprising a graphene sheet comprising an intercalation compound according to claim 1 . 24. An electrical device comprising a graphene sheet comprising an intercalation compound according to claim 1 .
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