Crystal unit, oscillator, and method for fabricating the crystal unit

Patent metadata

Field	Value
Publication number	US-9774296-B2
Application number	US-201615248768-A
Country	US
Kind code	B2
Filing date	Aug 26, 2016
Priority date	Sep 28, 2015
Publication date	Sep 26, 2017
Grant date	Sep 26, 2017

Abstract

A crystal unit includes a crystal substrate, a pair of excitation electrodes formed respectively on both surfaces of the crystal substrate, and a coil pattern formed around at least one of the pair of excitation electrodes. An oscillator includes a package and a crystal unit accommodated in the package. The crystal unit includes a crystal substrate, a pair of excitation electrodes formed respectively on both surfaces of the crystal substrate, and a coil pattern formed around at least one of the pair of excitation electrodes. An oscillation circuit is accommodated in the package and electrically connected to the crystal unit.

First claim

What is claimed is:

1. A crystal unit comprising:
a crystal substrate;
a pair of excitation electrodes formed respectively on both surfaces of the crystal substrate; and
a coil pattern formed around at least one of the pair of excitation electrodes, the other of the pair of excitation electrodes having a pattern serving as both an excitation electrode and a coil.

2. The crystal unit according to claim 1 , wherein
the coil pattern is a spiral pattern to surround an excitation electrode pattern of the at least one of the pair of excitation electrodes.

3. The crystal unit according to claim 1 , further comprising
another coil pattern formed around an excitation electrode pattern of the other of the at least one of the pair of excitation electrodes.

4. The crystal unit according to claim 1 , wherein
an inductance of the coil is variable.

5. The crystal unit according to claim 4 , wherein
the pattern has one or more trimming points trimmed when the inductance of the coil is changed.

6. The crystal unit according to claim 1 , further comprising
a package in which the crystal substrate and the pair of excitation electrodes are accommodated.

7. An oscillator comprising:
a package;
a crystal unit accommodated in the package, the crystal unit including;
a crystal substrate;
a pair of excitation electrodes formed respectively on both surfaces of the crystal substrate; and
a coil pattern formed around at least one of the pair of excitation electrodes, the other of the pair of excitation electrodes having a pattern serving as both an excitation electrode and a coil; and

an oscillation circuit accommodated in the package and electrically connected to the crystal unit.

8. A method for fabricating a crystal unit, the method comprising:
forming a pair of electrode films on both surfaces of a crystal substrate, respectively;
forming a coil pattern around at least one of a pair of excitation electrodes when patterning the pair of electrode films onto the pair of excitation electrodes; and
forming the crystal unit by cutting an entire body into laminate units, each of which includes the crystal substrate and the pair of excitation electrodes.

9. The method according to claim 8 , wherein the patterning includes:
forming a resist on each of the electrode films;
exposing the resist using a mask having a pattern formed on the resist;
developing a pattern of the exposed resist;
etching each of the electrode films using the developed pattern of the resist as a mask; and
removing the resist.

10. The method according to claim 8 , wherein, in the forming the coil pattern, the coil pattern is formed in a spiral pattern to surround an excitation electrode pattern of one of the pair of excitation electrodes.

11. The method according to claim 8 , wherein
the pattern is formed as a pattern having one or more trimming points trimmed when an inductance of the coil is changed.

12. The method according to claim 11 , wherein
the inductance of the coil is changed by trimming the one or more trimming points of the pattern.

Assignees

• Fujitsu Ltd

Inventors

• Kishi Masakazu
• Kubota Hajime
• Itoh Masayuki
• Mesaki Yoshinori

Classifications

• H03B15/00

  Generation of oscillations using galvano-magnetic devices, e.g. Hall-effect devices, or using superconductivity effects · CPC title

• H03B5/32 Primary

  being a piezoelectric resonator (selection of piezoelectric material H10N30/00) · CPC title

• H03B1/02 Primary

  Structural details of power oscillators, e.g. for heating {(construction of transmitters H04B; features of generators for heating by electromagnetic fields H05B6/00)} · CPC title

• H03B5/36

  active element in amplifier being semiconductor device ({H03B5/323, H03B5/326} , H03B5/38 take precedence) · CPC title

• H03B5/362

  the amplifier being a single transistor (H03B5/364 - H03B5/368 take precedence) · CPC title