Epitaxial base

Patent metadata

Field	Value
Publication number	US-9773664-B2
Application number	US-201213647444-A
Country	US
Kind code	B2
Filing date	Oct 9, 2012
Priority date	Mar 28, 2012
Publication date	Sep 26, 2017
Grant date	Sep 26, 2017

Abstract

An epitaxial base is provided. The epitaxial base includes a substrate and a carbon nanotube layer. The substrate has an epitaxial growth surface and defines a plurality of grooves and bulges on the epitaxial growth surface. The carbon nanotube layer covers the epitaxial growth surface, wherein a first part of the carbon nanotube layer attached on top surface of the bulges, and a second part of the carbon nanotube layer attached on bottom surface and side surface of the grooves.

First claim

What is claimed is:

1. An epitaxial base, comprising:
a substrate comprising an epitaxial growth surface;
a plurality of bulges located on the epitaxial growth surface and defining a plurality of grooves;
an epitaxial layer is located on the epitaxial growth surface; and
a carbon nanotube layer covering the epitaxial growth surface and between the substrate and the epitaxial layer, wherein a first part of the carbon nanotube layer is attached to top surfaces of the plurality of bulges, and a second part of the carbon nanotube layer is attached to at least bottom surfaces of the plurality of grooves; the carbon nanotube layer comprises a plurality of carbon nanotubes; a first portion of the plurality of carbon nanotubes on the top surfaces are parallel with the top surfaces, and a second portion of the plurality of carbon nanotubes on the bottom surfaces are parallel with the bottom surfaces; wherein the first portion of the plurality of carbon nanotubes are in direct contact with the top surfaces, the second portion of the plurality of carbon nanotubes are in direct contact with the bottom surfaces, the second part of the carbon nanotube layer is separated from the first part of the carbon nanotube layer, and side surfaces of the plurality of grooves are free of carbon nanotubes.

2. The epitaxial base of claim 1 , wherein each of the plurality of grooves is bar-shaped and the plurality of grooves intersect with each other to form a patterned surface.

3. The epitaxial base of claim 1 , wherein each of the plurality of grooves is bar-shaped and extends along a first direction.

4. The epitaxial base of claim 3 , wherein the carbon nanotube layer comprises a plurality of carbon nanotubes extending along a second direction perpendicular to the first direction.

5. The epitaxial base of claim 3 , wherein a width of each of the plurality of grooves ranges from about 1 micrometer to about 50 micrometers, a depth of each of the plurality of grooves ranges from about 0.1 micrometers to about 1 micrometer, and an interval between adjacent two of the plurality of grooves ranges from about 1 micrometer to about 20 micrometers.

6. The epitaxial base of claim 1 , wherein each of the plurality of bulges is bar-shaped and each of the plurality of bulges is parallel with each other or intersected with each other.

7. The epitaxial base of claim 1 , wherein the carbon nanotube layer is a free-standing and continuous structure.

8. The epitaxial base of claim 7 , wherein the carbon nanotube layer comprises a carbon nanotube film or a plurality of carbon nanotube wires.

9. The epitaxial base of claim 8 , wherein the carbon nanotube film comprises a plurality of carbon nanotube segments, the plurality of carbon nanotube segments being successively oriented and serially joined end-to-end.

10. The epitaxial base of claim 9 , wherein the plurality of carbon nanotubes arranged parallel with each other.

11. The epitaxial base of claim 1 , wherein the carbon nanotube layer comprises a plurality of carbon nanotube films stacked together.

12. The epitaxial base of claim 1 , wherein the carbon nanotube layer defines a plurality of apertures, and the epitaxial growth surface is partially exposed through the plurality of apertures.

13. The epitaxial base of claim 12 , wherein a size of each of the plurality of apertures ranges from about 10 nanometers to about 10 micrometers.

14. The epitaxial base of claim 1 , wherein the substrate is a single-crystal structure, and the carbon nanotube layer comprises a plurality of carbon nanotubes extending along a crystallographic orientation of the single-crystal structure.

15. The epitaxial base of claim 1 , wherein the plurality of bulges is selected from the group consisting of silicon dioxide, silicon nitride, silicon oxynitride, and titanium dioxide.

16. The epitaxial base of claim 15 , wherein the substrate is selected from the group consisting of LiGaO 2 , LiAlO 2 , Al 2 O 3 , Si, GaAs, GaN, GaSb, InN, InP, InAs, InSb, AlP, AlAs, AlSb, AlN, GaP, SiC, SiGe, GaMnAs, GaAlAs, GainAs, GaAlN, GaInN, AlInN, GaAsP, InGaN, AlGaInN, AlGaInP, GaP:Zn and GaP:N.

Assignees

• Wei Yang
• Fan Shou-Shan
• Univ Tsinghua
• Hon Hai Prec Ind Co Ltd

Inventors

• Wei Yang
• Fan Shou-Shan

Classifications

• H10P14/3416

  Nitrides · CPC title

• H10P14/3402

  characterised by the chemical composition · CPC title

• H10P14/3256

  Microstructure · CPC title

• H10P14/3206

  Carbon, e.g. diamond-like carbon · CPC title

• H10P14/2925

  Surface structures · CPC title