Fe-Co-based alloy sputtering target material, and method of producing same

Patent metadata

Field	Value
Publication number	US-9773654-B2
Application number	US-201615008433-A
Country	US
Kind code	B2
Filing date	Jan 27, 2016
Priority date	Jun 6, 2012
Publication date	Sep 26, 2017
Grant date	Sep 26, 2017

Abstract

Provided is a Fe—Co-based alloy sputtering target material having a composition represented as an atomic ratio by the compositional formula: (Fe a —Co 100-a ) 100-b-c-d —Ta b —Nb c -M d , wherein 0<a≦80, 0≦b≦10, 0≦c≦15, 5≦b+c≦15, 2≦d≦20, 15≦b+c+d≦25, and M represents one or more elements selected from the group consisting of Mo, Cr and W, with the balance consisting of unavoidable impurities, wherein the sputtering target material has a bending fracture strain ε fB at 300° C. of 0.4% or more.

First claim

What is claimed is:

1. A Fe—Co-based alloy sputtering target material having a composition represented as an atomic ratio by the compositional formula:
(Fe a —Co 100-a ) 100-b-c-d —Ta b —Nb c -M d , wherein 0<a≦80, 0≦b≦10, 0≦c≦15, 5≦b+c≦15, 7≦d≦20, 15≦b+c+d≦25, and M represents one or more elements selected from the group consisting of Mo, Cr and W, with the balance consisting of unavoidable impurities, wherein the sputtering target material has a bending fracture strain ε fB at 300° C. of 0.4% or more, and wherein an area ratio, in an area of from 0.01 mm 2 to 0.10 mm 2 , of an intermetallic compound phase containing one or more selected from Ta or Nb is 30 area % or less with respect to the Fe—Co-based alloy sputtering target material.

2. The Fe—Co-based alloy sputtering target material according to claim 1 , wherein b in the compositional formula satisfies the relationship: b=0.

3. The Fe—Co-based alloy sputtering target material according to claim 1 , wherein when an inscribed circle is drawn in a region of an intermetallic compound phase containing one or more selected from Ta or Nb, the maximum diameter of the inscribed circle is 30 μm or less.

4. The Fe—Co-based alloy sputtering target material according to claim 3 , wherein the maximum diameter of the inscribed circle is 0.5 μm or more.

5. A method of producing a Fe—Co-based alloy sputtering target material, the method comprising pressurized sintering, a powdered composition having a composition represented as an atomic ratio by the compositional formula:
(Fe a —Co 100-a ) 100-b-c-d —Ta b —Nb c -M d , wherein 0<a≦80, 0≦b≦10, 0≦c≦15, 5≦b+c≦15, 7≦d≦20, 15≦b+c+d≦25and M represents one or more elements selected from the group consisting of Mo, Cr and W, with the balance consisting of unavoidable impurities, under conditions of a sintering temperature of from 800° C. to 1400° C., a pressurizing pressure of from 100 MPa to 200 MPa, and a sintering time of from 1 hour to 10 hours, and wherein an area ratio, in an area of from 0.01 mm 2 to 0.10 mm 2 , of an intermetallic compound phase containing one or more selected from Ta or Nb is 30 area % or less with respect to the Fe-Co-based alloy sputtering target material.

6. The Fe—Co-based alloy sputtering target material according to claim 5 , wherein b in the compositional formula satisfies the relationship: b=0.

7. The method of producing a Fe—Co-based alloy sputtering target material according to claim 5 , wherein when an inscribed circle is drawn in a region of an intermetallic compound phase containing one or more selected from Ta or Nb, the maximum diameter of the inscribed circle is 30 μm or less.

8. The method of producing a Fe—Co-based alloy sputtering target material according to claim 7 , wherein the maximum diameter of the inscribed circle is 0.5 μm or more.

Assignees

• Hitachi Metals Ltd

Inventors

• Fukuoka Jun
• Saito Kazuya
• Sakamaki Kouichi
• Hata Tomoyuki

Classifications

• C22C33/0285

  with Cr, Co, or Ni having a minimum content higher than 5% · CPC title

• H01J37/3429 Primary

  Plural materials · CPC title

• C23C14/20

  on organic substrates · CPC title

• H01J2237/02

  Details · CPC title

• C22C38/26

  with niobium or tantalum · CPC title