Xray diffraction angle verification in an ion implanter
US-2024222070-A1 · Jul 4, 2024 · US
US9773642B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9773642-B2 |
| Application number | US-201314355847-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 12, 2013 |
| Priority date | Jul 24, 2012 |
| Publication date | Sep 26, 2017 |
| Grant date | Sep 26, 2017 |
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An electron beam melting furnace includes a hearth, a mold, an electron gun for keeping metal as a molten state, an electron beam controller for controlling direction of the electron beam, an image sensor for molten metal, and an operating device. A method for operating the furnace includes a step of inputting electron beam emitting coordinates in the electron beam controller, a step of emitting the electron beam, a step of detecting a high electron beam intensity spot by the image sensor, a step of calculating coordinates of high electron beam intensity based on the detected signal by the operating device, a step of calculating differences between the coordinates of emission and the coordinates of high electron beam intensity spot, a step of inputting the difference in the electron beam controller, and a step of controlling the location of electron beam spot.
Opening claim text (preview).
The invention claimed is: 1. A method for operating an electron beam melting furnace, the electron beam melting furnace comprising: a hearth and a mold for holding molten metal, an electron gun for emitting an electron beam for keeping the metal as a molten state, an electron beam scanning pattern generation device for controlling a control signal of a location of the electron beam from the electron gun, an electron beam controlling means for controlling direction of the electron beam according to the control signal input therein, an image sensor for detecting a high electron beam intensity spot formed by the electron beam on the surface of the molten metal in the hearth or the mold, an operating device for calculating a location difference between an actual location of the high electron beam intensity spot detected by the image sensor and a pre-set location to be emitted from the electron beam gun that is set at the beginning of the melting process, an emitting device for generating a correction signal for correcting the location difference calculated by the operating device, and a device for adding the correction signal to the control signal, and the method comprising a step of controlling a location of the electron beam spot so that the location difference between an actual location of the high electron beam intensity spot detected by the image sensor and a pre-set location to be emitted from the electron beam gun set at the beginning of melting process is not more than a pre-set value, wherein the location difference is controlled to be not more than 1 mm in case that the coordinates of the high electron beam intensity spot are defined as (x, y) and the pre-set coordinates to be emitted are defined as (X, Y), an absolute value of a difference in the X coordinates in plane coordinates thereof is |X−x| and an absolute value of a difference in Y coordinates in plane coordinates thereof is |Y−y|. 2. A method for operating an electron beam melting furnace, the electron beam melting furnace comprising: a hearth and a mold for holding molten metal, an electron gun for emitting an electron beam for keeping the metal as a molten state, an electron beam scanning pattern generation device for controlling a control signal of a location of the electron beam from the electron gun, an electron beam controlling means for controlling direction of the electron beam according to the control signal input therein, an image sensor for detecting a high electron beam intensity spot formed by the electron beam on the surface of the molten metal in the hearth or the mold, an operating device for calculating a location difference between an actual location of the high electron beam intensity spot detected by the image sensor and a pre-set location to be emitted from the electron beam gun that is set at the beginning of the melting process, an emitting device for generating a correction signal for correcting the location difference calculated by the operating device, and a device for adding the correction signal to the control signal, and the method comprising a step of controlling a location of the electron beam spot so that the location difference between an actual location of the high electron beam intensity spot detected by the image sensor and a pre-set location to be emitted from the electron beam gun set at the beginning of melting process is not more than a pre-set value, wherein the location difference presented by {(Y−y) 2 +(X−x) 2 } 1/2 is controlled to be not more than 1 mm displacement in case of the high electron beam intensity spot coordinates are (x, y) and the pre-set coordinates to be emitted are (X, Y). 3. A method for operating an electron beam melting furnace, the electron beam melting furnace comprising: a hearth and a mold for holding molten metal, an electron gun for emitting an electron beam, a pattern generator for providing a control signal of a location of the electron beam, an electron beam controller for directing movement of the electron beam according to the control signal, an image sensor for detecting an electron beam spot formed by the electron beam on the surface of the molten metal in the hearth or the mold, an operating device for calculating a location difference between an actual location of the electron beam spot detected by the image sensor and a pre-set location to be emitted from the electron beam gun, an emitting device for generating a correction signal for correcting the location difference calculated by the operating device, and a device for adding the correction signal to the control signal, and the method comprising: a step of controlling a location of the electron beam spot so that the location difference is the absolute value of the difference of plane coordinates (x d , y d ) of a location heated by the electron beam and plane coordinates (x c , y c ) of a target location.
Heating by electric discharge, e.g. arc discharge · CPC title
Image processing arrangements associated with the tube · CPC title
Arrangements of controlling devices · CPC title
by particle radiation, e.g. electron beams · CPC title
Melting-down metal, e.g. metal particles, in the mould · CPC title
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