Image measurement device

Patent metadata

Field	Value
Publication number	US-9772480-B2
Application number	US-201715465625-A
Country	US
Kind code	B2
Filing date	Mar 22, 2017
Priority date	Feb 27, 2014
Publication date	Sep 26, 2017
Grant date	Sep 26, 2017

Abstract

The image measurement device includes: a measurement target place specifying part that specifies a measurement target place on a workpiece image based on a user's operation; an illumination condition storage part that holds two or more illumination conditions; an imaging control part that controls a camera and an illumination device to acquire two or more of the workpiece images sequentially photographed while making the illumination condition different; a workpiece image display part that displays the acquired plurality of workpiece images; a workpiece image selecting part that selects any one of the displayed workpiece images; an illumination condition deciding part that decides the illumination condition based on the selected workpiece image; and a dimension calculating part that extracts an edge of the measurement target place based on the workpiece image photographed on the decided illumination condition, and obtains a dimension of the measurement target place based on the extracted edge.

First claim

What is claimed is:

1. An image measurement device comprising:
a stage for placing a workpiece;
an illumination device that illuminates the workpiece on the stage;
a camera that photographs the workpiece on the stage to generate a workpiece image;
a measurement target place specifying unit that specifies a measurement target place on the workpiece image;
an illumination condition storage unit that holds two or more illumination conditions;
an imaging control unit that controls the camera and the illumination device to acquire two or more of the workpiece images sequentially photographed while making the illumination condition different;
a workpiece image display unit that displays the acquired plurality of workpiece images;
a workpiece image selecting unit that selects any one of the displayed workpiece images;
a processor that decides the illumination condition based on the selected workpiece image; and
a dimension calculating unit that extracts an edge of the measurement target place based on the workpiece image photographed on the decided illumination condition, and obtains a dimension of the measurement target place based on the extracted edge, wherein
the dimension calculating unit extracts the edge of the measurement target place with respect to the acquired plurality of workpiece images,
the workpiece image display unit displays the extracted edge on the corresponding workpiece image while listing and displaying the acquired plurality of workpiece images, and
the workpiece image selecting unit selects a workpiece image specified by the user out of the listed and displayed workpiece images.

2. The image measurement device according to claim 1 , wherein
the dimension calculating unit obtains a dimension of the measurement target place based on the edge extracted from the measurement target place with respect to the acquired plurality of workpiece images, and
the workpiece image display unit displays the obtained dimension on the corresponding workpiece image.

3. The image measurement device according to claim 2 , wherein the dimension calculating unit obtains a dimension between edges respectively extracted from two or more workpiece images with mutually different illumination conditions and positions of the measurement target place.

4. The image measurement device according to claim 3 , further comprising, as the illumination device,
a side-emitting illumination device that irradiates the workpiece on the stage from a side with illumination light as parallel light or with illumination light having a spread angle close to the parallel light.

5. The image measurement device according to claim 3 , wherein the measurement target place specifying unit specifies, as the measurement target place, a region on the workpiece image photographed by irradiation with the diffused light of the diffused illumination device.

6. The image measurement device according to claim 1 , further comprising
a measurement setting storage unit that holds, as measurement setting information, two or more measurement target places specified on the same workpiece image by the measurement target place specifying unit and an illumination condition decided by the illumination condition deciding unit with respect to each of these measurement target places,
wherein the illumination condition is held in association with the measurement target place in the measurement setting storage unit,
the imaging control unit repeatedly acquires a workpiece image photographed on the illumination condition held as the measurement setting information while changing the measurement target place, in successive measurement where the measurement setting information has been specified, and
the dimension calculating unit performs edge extraction with respect to each of the measurement target places held as the measurement setting information on the plurality of workpiece images acquired in the successive measurement.

7. The image measurement device according to claim 1 , comprising, as the illumination device,
a diffused illumination device that irradiates the workpiece on the stage with diffused light from above; and
a transmittance illumination device that irradiates the workpiece on the stage with illumination light from below,
wherein the illumination conditions include a type of the illumination device.

8. The image measurement device according to claim 1 , comprising as the illumination device
a ring illumination device having a ring-shaped light source that surrounds a photographing axis of the camera, the light source being lit in units of two or more blocks, which are obtained by dividing in a circumferential direction,
wherein the illumination conditions include a lighting position of the ring illumination device.

9. The image measurement device according to claim 1 , further comprising
a relative position adjusting unit that moves the stage or the illumination device in the photographing axis direction of the camera, to adjust a relative position of the illumination device to the stage,
wherein the illumination conditions include the relative position.

10. The image measurement device according to claim 1 , further comprising
an illumination condition specifying unit that specifies the illumination condition based on the user's operation.

11. The image measurement device according to claim 1 , wherein the workpiece image selecting unit selects any one of the displayed workpiece images based on a change in luminance in the measurement target place.

12. The image measurement device according to claim 1 , wherein
when two or more edges are extracted from the workpiece image photographed on the same illumination condition, the workpiece image display unit displays these edges on the corresponding workpiece image, and
the image measurement device further includes an edge selecting unit which selects any one of the plurality of edges displayed on the workpiece image based on the user's operation.

13. The image measurement device according to claim 12 , further comprising
an edge extraction parameter adjusting unit that adjusts an edge extraction parameter for edge extraction based on an edge specified by the user out of the plurality of edges extracted from the workpiece image photographed on the same illumination condition.

Assignees

• Keyence Co Ltd

Inventors

• Oba Hayato

Classifications

• G02B21/367

  providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison · CPC title

• G01B11/022

  by means of tv-camera scanning · CPC title

• G02B21/0016 Primary

  Technical microscopes, e.g. for inspection or measuring in industrial production processes · CPC title

• G06T7/0004

  Industrial image inspection · CPC title

• G01B11/028

  by measuring lateral position of a boundary of the object (G01B11/022, G01B11/024, G01B11/04 take precedence) · CPC title