Handler apparatus, device holder, and test apparatus

Patent metadata

Field	Value
Publication number	US-9772373-B2
Application number	US-201414472385-A
Country	US
Kind code	B2
Filing date	Aug 29, 2014
Priority date	Mar 25, 2014
Publication date	Sep 26, 2017
Grant date	Sep 26, 2017

Abstract

Provided is a handler apparatus that conveys a device under test to a test socket, including: an actuator that, prior to fitting of a device holder to the test socket, fits the device holder, and adjusts a position of the device under test on the device holder; and a conveyer that conveys the device holder in which a position of the device under test has been adjusted, to fit the test socket, where the device holder includes: an inner unit to mount the device under test; an outer unit to retain the inner unit to be movable; and a release button to release a lock of movement of the inner unit, in response to being pressed from a side to which the device under test is mounted, and the actuator sets the inner unit to be movable by pressing the release button and adjusts a position of the inner unit.

First claim

What is claimed is:

1. A handler apparatus that conveys a device under test to a test socket, comprising:
an actuator that, prior to fitting of a device holder retaining the device under test to the test socket, fits the device holder, and adjusts a position of the device under test on the device holder; and
a conveyer that conveys the device holder in which a position of the device under test has been adjusted, to fit the test socket, wherein
the device holder includes:
an inner unit to mount the device under test;
an outer unit to retain the inner unit to be movable; and
a lever section including:
a release button to release a lock of movement of the inner unit, in response to being pressed from a side to which the device under test is mounted;
an insert latch that grasps a part of the outer unit, and releases the part of the outer unit in response to pressing of the release button; and
a lever that, when the release button is pressed, transmits a pressed force to the insert latch, and

the actuator sets the inner unit to be movable by pressing the release button and adjusts a position of the inner unit.

2. The handler apparatus according to claim 1 , wherein
the actuator includes:
an outer catch section that grasps the outer unit; and
an inner catch section that grasps the inner unit, and releases a lock set to the inner unit while grasping the inner unit, to set the inner unit to be relatively movable with respect to the outer unit.

3. The handler apparatus according to claim 2 , wherein
the outer unit includes a pin insertion section grasped by the outer catch section, at three sides out of four sides surrounding the inner unit.

4. The handler apparatus according to claim 1 , wherein
the insert latch grasps a part of the outer unit from a side to which the device under test is mounted.

5. The handler apparatus according to claim 1 , wherein
a silicon cover is provided at a portion of the insert latch to grasp the outer unit.

6. The handler apparatus according to claim 1 , wherein
the lever section further includes a spring to bias the lever.

7. The handler apparatus according to claim 1 , wherein
the inner unit includes device latches grasping the device under test at two sides of the device under test respectively, in parallel to a surface of the device under test facing the test socket.

8. The handler apparatus according to claim 7 , wherein
a silicon cover is provided at a portion of the device latch to grasp the device under test.

9. A test apparatus that comprises the handler apparatus according to claim 1 for conveying the device under test to the test socket, the test apparatus testing the device under test and further comprising:
a test head to be electrically connected to the device under test via the test socket; and
a test module testing the device under test via the test head.

10. A device holder for use in a handler apparatus that conveys a device under test to a test socket, the handler apparatus including an actuator that, prior to fitting of a device holder retaining the device under test to the test socket, fits the device holder, and adjusts a position of the device under test on the device holder, and a conveyer that conveys the device holder in which a position of the device under test has been adjusted, to fit the test socket, the device holder comprising:
an inner unit to mount a device under test;
an outer unit to retain the inner unit to be movable; and
a lever section including:
a release button to release a lock of movement of the inner unit, in response to being pressed from a side to which the device under test is mounted;
an insert latch that grasps a part of the outer unit, and releases the part of the outer unit in response to pressing of the release button; and
a lever that, when the release button is pressed, transmits a pressed force to the insert latch, wherein

the device holder mounts the device under test and fits the test socket by being conveyed by the conveyer.

Assignees

• Advantest Corp

Inventors

• Aizawa Mitsunori
• Yamada Yuya

Classifications

• G01R1/0433

  Sockets for IC's or transistors · CPC title

• G01R31/68

  Testing of releasable connections, e.g. of terminals mounted on a printed circuit board · CPC title

• G01R31/2601

  Apparatus or methods therefor (G01R31/2607, G01R31/2642 take precedence) · CPC title

• G01R31/2891

  related to sensing or controlling of force, position, temperature (G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05) · CPC title

• G01R31/2887 Primary

  involving moving the probe head or the IC under test; docking stations (moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392) · CPC title