Wafer coating

Patent metadata

Field	Value
Publication number	US-9768014-B2
Application number	US-201514658102-A
Country	US
Kind code	B2
Filing date	Mar 13, 2015
Priority date	Jan 31, 2014
Publication date	Sep 19, 2017
Grant date	Sep 19, 2017

Abstract

Improved wafer coating processes, apparatuses, and systems are described. In one embodiment, an improved spin-coating process and system is used to form a mask for dicing a semiconductor wafer with a laser plasma dicing process. In one embodiment, a spin-coating apparatus for forming a film over a semiconductor wafer includes a rotatable stage configured to support the semiconductor wafer. The rotatable stage has a downward sloping region positioned beyond a perimeter of the semiconductor wafer. The apparatus includes a nozzle positioned above the rotatable stage and configured to dispense a liquid over the semiconductor wafer. The apparatus also includes a motor configured to rotate the rotatable stage.

First claim

What is claimed is:

1. A spin-coating apparatus for forming a film over a substrate mounted on a carrier, the spin-coating apparatus comprising:
a rotatable stage comprising:
an inner region to support the substrate,
an outer region; and
a downward sloping region coupled with the inner region and positioned beyond a perimeter of the substrate, wherein the outer region of the rotatable stage is located beyond the downward sloping region, and wherein the outer region is flat, and wherein the inner region, downward sloping region, and outer region of the rotatable stage are one piece;

a nozzle positioned above the rotatable stage and configured to dispense a liquid over the substrate; and
a motor configured to rotate the rotatable stage.

2. The spin-coating apparatus of claim 1 , wherein the downward sloping region has an angle that is between 1 and 10 degrees.

3. The spin-coating apparatus of claim 1 , wherein the inner region positioned under the substrate is substantially flat.

4. The spin-coating apparatus of claim 1 , wherein the outer region of the rotatable stage comprises a holding mechanism configured to hold a wafer frame over which the substrate is mounted.

5. A spin-coating apparatus for forming a film over a substrate mounted on a carrier, the spin-coating apparatus comprising:
a rotatable stage configured to support the substrate mounted on the carrier, wherein the rotatable stage comprises:
an inner region positioned under the substrate,
an outer region positioned under edges of the carrier and having a lower height than the inner region, and
a downward sloping region between the inner region and the outer region;
a nozzle positioned above the rotatable stage and configured to dispense a liquid over the substrate; and
a motor configured to rotate the rotatable stage.

6. The spin-coating apparatus of claim 5 , wherein the downward sloping region has an angle that is between 1 and 10 degrees.

7. The spin-coating apparatus of claim 5 , wherein the inner region positioned under the substrate is substantially flat.

8. The spin-coating apparatus of claim 5 , wherein the outer region of the rotatable stage comprises a holding mechanism configured to hold a wafer frame over which the substrate is mounted.

9. The spin-coating apparatus of claim 8 , wherein the outer region of the rotatable stage is flat.

10. The spin-coating apparatus of claim 8 , wherein the inner region, downward sloping region, and outer region of the rotatable stage are one piece.

Assignees

• Applied Materials Inc

Inventors

• Park Jungrae
• Lei Wei-Sheng
• Kumar Prabhat
• Papanu James S
• Eaton Brad
• Kumar Ajay

Classifications

• H10P72/7416

  used during dicing or grinding · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P72/74

  using temporarily an auxiliary support · CPC title

• H10P54/00

  Cutting or separating of wafers, substrates or parts of devices · CPC title

• H10P50/695

  characterised by the process involved to create the mask, e.g. lift-off masks or sidewalls or to modify the mask · CPC title