Microlens array for enhanced imaging of multiregion targets
US-2015370061-A1 · Dec 24, 2015 · US
US9767342B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9767342-B2 |
| Application number | US-78082510-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 14, 2010 |
| Priority date | May 22, 2009 |
| Publication date | Sep 19, 2017 |
| Grant date | Sep 19, 2017 |
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In one embodiment of the invention, a method to image a probe array is described that includes focusing on a plurality of fiducials on a surface of an array. The method utilizes obtaining the best z position of the fiducials and using a surface fitting algorithm to produce a surface fit profile. One or more surface non-flatness parameters can be adjusted to improve the flatness image of the array surface to be imaged.
Opening claim text (preview).
What is claimed is: 1. A method for improving image flatness of a surface image of a probe array having an array surface roughness, the method comprising: imaging a plurality of fiducials at a plurality of z positions and determining a best z position measurement for each of the plurality of fiducials at which the imaging is sharpest; generating a surface fit profile based on the best z position measurement for each of the plurality of fiducials; and imaging the probe array and adjusting one or more surface non-flatness parameters based on the surface fit profile to improve the image flatness of the surface image of the probe array. 2. The method of claim 1 , wherein the surface fit profile is constructed using a surface-fitting algorithm. 3. The method of claim 2 , wherein the surface-fitting algorithm comprises a least square algorithm. 4. The method of claim 2 , wherein the surface-fitting algorithm comprises a sub-plane surface fit. 5. The method of claim 2 , wherein the surface-fitting algorithm comprises a B spline surface fit. 6. The method of 1 , wherein the determining step comprises using quadratic interpolation. 7. The method of claim 1 , wherein the one or more surface non-flatness parameters comprises a probe array tilt angle. 8. The method of claim 1 , wherein the one or more surface non-flatness parameters comprise positioning of a stage on which the probe array is mounted. 9. The method of claim 1 , wherein the one or more surface non-flatness parameters comprise an optical parameter. 10. The method of claim 1 , wherein the one or more surface non-flatness parameters comprise a focal plane position. 11. The method of claim 1 , wherein the plurality of fiducials comprises 4 fiducials. 12. The method of claim 11 , wherein the plurality of fiducials comprises 5 fiducials. 13. The method of claim 12 , wherein the plurality of fiducials comprises 9 fiducials. 14. The method of claim 13 , wherein the plurality of fiducials comprises 12 fiducials. 15. The method of claim 14 , wherein the plurality of fiducials comprises 15 fiducials.
arrangements using fluorescence or luminescence · CPC title
adapted for ultraviolet illumination {; Fluorescence microscopes (G02B21/0076 takes precedence)} · CPC title
Assembling or joining · CPC title
Optical details, e.g. image relay to the camera or image sensor (G02B21/364 takes precedence; illumination details G02B21/06 and subgroups) · CPC title
Details of detection or image processing, including general computer control · CPC title
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