Lithium containing composite metallic sputtering targets

Patent metadata

Field	Value
Publication number	US-9765426-B1
Application number	US-201313867865-A
Country	US
Kind code	B1
Filing date	Apr 22, 2013
Priority date	Apr 20, 2012
Publication date	Sep 19, 2017
Grant date	Sep 19, 2017

Abstract

The present invention relates to sputter targets for electrochemical device layer deposition comprising a lithium-containing target material with near-metallic electrical conductivity which includes (a) at least one metal and (b) a lithium-containing material, the lithium-containing material being selected from the group consisting of lithium metal and a lithium-containing salt, wherein the at least one metal and the lithium-containing material are formed into the lithium-containing target material and wherein the lithium-containing target material is configured with a composition sufficient for physical vapor deposition of a lithium-containing electrode of the electrochemical device in a single step, the lithium-containing electrode as deposited requiring no further lithium doping. Furthermore, the composition of the metallic lithium-containing target material may be configured to provide a low enough electrical resistance to permit DC sputtering. Chambers and tools including the sputter target and process flows for fabricating electrochemical devices including steps utilizing the sputter target are also described.

First claim

What is claimed is:

1. A sputter target for electrochemical device layer deposition, comprising:
a composite lithium-containing target material comprising:
at least one metal material; and
a lithium-containing salt;
wherein said at least one metal material and said lithium-containing salt are finely divided and are formed into said composite lithium-containing target material and wherein said lithium-containing salt constitutes less than 67% by volume of said composite lithium-containing target material; and
a backing plate, said composite lithium-containing target material being affixed to said backing plate.

2. The sputter target as in claim 1 , wherein said composite lithium-containing target material is configured for deposition of a layer of Li x Mo y Ni z O d material, said at least one metal material being metallic Mo and Ni.

3. The sputter target as in claim 2 , wherein said lithium-containing salt is at least one material selected from the group consisting of LiOH, Li 2 O, Li 2 CO 3 , LiMoO 3 and Li 2 MoO 4 .

4. The sputter target as in claim 1 , wherein said composite lithium-containing target material is configured for deposition of a layer of Li x Ti y W z O d material, said at least one metal material being metallic Ti and W.

5. The sputter target as in claim 4 , wherein said lithium-containing salt is at least one material selected from the group consisting of LiOH and Li 2 CO 3 .

6. The sputter target as in claim 1 , wherein said composite lithium-containing target material is configured for deposition of a layer of Li x W y Ni z O d material, said at least one metal material being metallic W and Ni.

7. The sputter target as in claim 6 , wherein said lithium-containing salt is at least one material selected from the group consisting of LiOH, Li 2 CO 3 , Li 2 O, LiWO 3 and Li 2 WO 4 .

8. The sputter target as in claim 1 , wherein said composite lithium-containing target material is configured for deposition of a layer of Li x Cr y Ni z O d material, said at least one metal material being metallic Cr and Ni.

9. The sputter target as in claim 1 , wherein said composite lithium-containing target material is configured for deposition of a layer of Li x Co y Ni z O d material, said at least one metal material being metallic Co and Ni.

10. The sputter target as in claim 1 , wherein the surface resistance of said composite lithium-containing target material is in the range of 200 kΩ to 500 kΩ as measured between two probes separated by 6 mm on the surface of said composite lithium-containing target material.

11. The sputter target as in claim 1 , wherein the resistance of said composite lithium-containing target material is in the range of 200 kΩ to 500 kΩ as measured between said backing plate and the sputtering surface of said composite lithium-containing target material.

12. The sputter target as in claim 1 , wherein said lithium-containing salt is Li 2 CO 3 .

13. The sputter target as in claim 1 , wherein said lithium-containing salt is LiOH.

14. The sputter target as in claim 8 , wherein said lithium-containing salt is at least one material selected from the group consisting of LiOH and Li 2 CO 3 .

15. The sputter target as in claim 9 , wherein said lithium-containing salt is at least one material selected from the group consisting of LiOH and Li 2 CO 3 .

16. The sputter target as in claim 1 , wherein said sputter target is a cylindrical sputter target and said backing plate is a cylindrical backing plate.

17. The sputter target as in claim 16 , wherein said composite lithium-containing target material comprises a plurality of annular tiles, each annular tile being affixed to said cylindrical backing plate.

18. The sputter target as in claim 1 , wherein said composite lithium-containing target material comprises a plurality of tiles, each tile being affixed to said backing plate.

19. The sputter target as in claim 1 , wherein said electrochemical device is a thin film battery.

Assignees

• Applied Materials Inc

Inventors

• Kwak Byung-Sung Leo
• Sun Lizhong
• Isidorsson Jan
• Jiang Chong

Classifications

• H01J37/3426

  Material · CPC title

• C23C14/3414 Primary

  Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy · CPC title

• H01J37/3429

  Plural materials · CPC title