Use of a chemical-mechanical polishing (CMP) composition for polishing a substrate or layer containing at least one III-V material

Patent metadata

Field	Value
Publication number	US-9765239-B2
Application number	US-201414890754-A
Country	US
Kind code	B2
Filing date	May 6, 2014
Priority date	May 15, 2013
Publication date	Sep 19, 2017
Grant date	Sep 19, 2017

Abstract

Described is a use of a chemical-mechanical polishing (CMP) composition for polishing a substrate or layer containing one or more lll-V materials, wherein the chemical-mechanical polishing (CMP) composition comprises the following components: (A) surface modified silica particles having a negative zeta potential of −15 mV or below at a pH in the range of from 2 to 6 (B) one or more constituents selected from the group consisting of (i) substituted and unsubstituted triazoles not having an aromatic ring annealed to the triazol ring, (ii) benzimidazole, (iii) chelating agents selected from the group consisting of amino acids with two or more carboxyl groups, aliphatic carboxylic acids, and the respective salts thereof, and (iv) homopolymers and copolymers of acrylic acid, and the respective salts thereof, (C) water (D) optionally one or more further constituents, wherein the pH of the composition is in the range of from 2 to 6.

First claim

The invention claimed is:

1. A polishing method, comprising polishing the surface of a substrate or layer, wherein said surface comprises at least one III-V material, with a chemical mechanical polishing (CMP) composition, wherein the chemical-mechanical polishing (CMP) composition comprises:
(A) surface modified silica particles having a negative zeta potential of −15 mV or below at a pH in the range of from 2 to 6;
(B) at least one constituent selected from the group consisting of
(i) substituted and unsubstituted triazoles not having an aromatic ring annealed to the triazole ring,
(ii) benzimidazole in an amount of 0.2 to 3.0 wt % based on the total weight of the chemical mechanical polishing (CMP) composition,
(iii) chelating agents selected from the group consisting of amino acids with two or more carboxyl groups, aliphatic carboxylic acids, and the respective salts thereof, and
(iv) homopolymers and copolymers of acrylic acid, and the respective salts thereof;

(C) water; and
(D) optionally at least one further constituent,
wherein the pH of the composition is in the range of from 2 to 6.

2. The method according to claim 1 , wherein the at least one III-V material is selected from the group consisting of GaN, GaP, GaAs, GaSb, AlAs, AIN, InP, InAs, InSb, InGaAs, InAlAs, AlGaAs, GaAlN, GaInN, InGaAlAs, InGaAsP, InGaP AlInP GaAlSb, GalnSb, GaAlAsSb, and GaInAsSb.

3. The method according to claim 1 , wherein the surface modified silica particles of component (A) having a negative zeta potential of −15 mV or below at a pH in the range of from 2 to 6 are silica particles anionically modified with metallate ions or modified with sulfonic acid.

4. The method according claim 1 , wherein the surface modified silica particles of component (A) having a negative zeta potential of −15 mV or below at a pH in the range of from 2 to 6 are silica particles anionically modified with metallate ions selected from the group consisting of aluminate, stannate, zincate, and plumbate.

5. The method according to claim 1 , wherein the surface modified silica particles of component (A) having a negative zeta potential of −15 mV or below at a pH in the range of from 2 to 6 are silica particles anionically modified with aluminate.

6. The method according to claim 1 , wherein the at least one of the substituted and unsubstituted triazoles of component (B) not having an aromatic ring annealed to the triazole ring is selected from the group consisting of 1,2,3-triazole, substituted 1,2,3-triazole, 1,2,4-triazole, and substituted 1,2,4-triazole.

7. The method according to claim 1 ,
wherein at least one of the substituted and unsubstituted triazoles of component (B) not having an aromatic ring annealed to the triazole ring is a 1,2,3-triazole or a 1,2,4-triazole, the respective triazole having at least one substituent, wherein the at least one substituent is selected from the group consisting of
substituted and unsubstituted, branched or unbranched alkyl,
unsubstituted and substituted aryl,
unsubstituted and N-substituted amino,
halogen,
cyano,
substituted and unsubstituted, branched or unbranched alkoxy,
carboxyl,
carboxylate,
substituted and unsubstituted vinyl, and
substituted and unsubstituted allyl.

8. The method according to claim 1 , wherein at least one of the substituted and unsubstituted triazoles of component (B) not having an aromatic ring annealed to the triazole ring is
a 1,2,3-triazole substituted in position 1 and/or 4
or
a 1,2,4-triazole substituted in position 1 and/or 3 .

9. The method according to claim 1 , wherein at least one of the substituted and unsubstituted triazoles of component (B) not having an aromatic ring annealed to the triazol ring is selected from the group consisting of 1,2,4-triazole and 3-amino- 1,2,4-triazole.

10. The method according to claim 1 , wherein
at least one of the chelating agents of component (B) selected from the group consisting of amino acids with two or more carboxyl groups, aliphatic carboxylic acids, and the respective salts thereof,
is selected from the group consisting of
acetic acid, and the respective salts thereof,
propionic acid, and the respective salts thereof,
glycolic acid, and the respective salts thereof,
aliphatic carboxylic acids with two or more carboxyl groups, selected from the group consisting of citric acid, malonic acid, oxalic acid, succinic acid, lactic acid, tartaric acid, adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, maleic acid, fumaric acid, other aliphatic carboxylic acids with two or more carboxyl groups, and the respective salts thereof,
polyamino acetic acids, polyamino propionic acids, other polyamino carboxylic acids, and the respective salts thereof.

11. The method according to claim 1 , wherein
the surface modified silica particles of component (A) having a negative zeta potential of −15 mV or below at a pH in the range of from 2 to 6 are silica particles anionically modified with aluminate or modified with sulfonic acid,

component (B) comprises at least one constituent selected from the group consisting of
substituted and unsubstituted triazoles selected from the group consisting of 1,2,4-triazole and 3-amino-1,2,4-triazole
benzimidazole

chelating agents selected from the group consisting of glycolic acid, citric acid, malonic acid, oxalic acid, succinic acid, nitrilotriacetic acid (NTA-H3), and the respective salts thereof
and
homopolymers of acrylic acid.

12. The method according to claim 1 , wherein
the total amount of (A) surface modified silica particles having a negative zeta potential of −15 mV or below at a pH in the range of from 2 to 6 is in the range of from 0.1 wt.-% to 30 wt.-%, based on the total weight of the chemical-mechanical polishing (CMP) composition
and/or
the total amount of triazoles not having an aromatic ring annealed to the triazol ring is in the range of from 0.01 to 3.0 wt.-%, based on the total weight of the chemical-mechanical polishing (CMP) composition
and/or
the total amount of benzimidazole is in the range of from 0.2 to 2.0 wt.-%, based on the total weight of the chemical-mechanical polishing (CMP) composition
and/or
the total amount of chelating agents selected from the group consisting of amino acids with two or more carboxyl groups, aliphatic carboxylic acids, and the respective salts thereof is in the range of from 0.01 to 3.0 wt.-%, based on the total weight of the chemical-mechanical polishing (CMP) composition
and/or
the total amount of homopolymers and copolymers of acrylic acid, and the respective salts thereof is in the range of from 0.01 to 3.0 wt.-%, based on the total weight of the chemical-mechanical polishing (CMP) composition.

13. The method according to claim 1 , wherein the chemical-mechanical polishing (CMP) composition comprises at least one further constituent as component (D), wherein the at least one further constituent of component (D) is selected from the group consisting of oxidizing agents, abrasive materials different from surface modified silica particles having a negative zeta potential of −15 mV or below at a pH in the range of from 2 to 6, stabilizers, surfactants, friction reducing agents, and buffer substances.

Assignees

• Basf Se

Inventors

• Lan Yongqing
• Przybylski Peter
• Bao Zhenyu
• Proelss Julian

Classifications

• H10P90/129

  by polishing · CPC title

• H10P52/402

  of semiconductor materials · CPC title

• B24B37/044

  characterised by the composition of the lapping agent · CPC title

• C09K3/1463

  Aqueous liquid suspensions · CPC title

• C09K3/1436

  Composite particles, e.g. coated particles · CPC title