MEMS structure

Patent metadata

Field	Value
Publication number	US-9764943-B2
Application number	US-201615361972-A
Country	US
Kind code	B2
Filing date	Nov 28, 2016
Priority date	Jun 5, 2014
Publication date	Sep 19, 2017
Grant date	Sep 19, 2017

Abstract

A MEMS structure includes a planar substrate, a support body coupled to the planar substrate, a fixed electrode coupled to the planar substrate and a moveable portion. The movable portion is spaced from and faces the fixed electrode. The movable electrode includes a movable weight and an intermediate frame surrounding an outer edge of the movable weight. A plurality of elastic supports connect the movable weight to the intermediate frame. The elastic supports are elastically deformable in a first direction extending parallel to the plane of the substrate such that the movable weight can move in the first direction. At least one torsion bar pivotally connects one end of the intermediate frame to the support body so as to allow the intermediate frame, and with it the movable weight, to pivot around an axis which extends parallel to the plane of the substrate and perpendicular to the first direction.

First claim

The invention claimed is:

1. A MEMS structure comprising:
a planar substrate;
a support body coupled to the planar substrate;
a fixed electrode coupled to the planar substrate; and
a movable portion spaced from and facing the fixed electrode, the movable portion being coupled to the substrate and including:
a movable weight;
an intermediate frame surrounding an outer edge of the movable weight;
a plurality of elastic supports connecting the movable weight to intermediate frame, the elastic supports being elastically deformable in a first direction extending parallel to the plane of the planar substrate such that the movable weight can move in the first direction; and
at least one torsion bar pivotally connecting one end of the intermediate frame to the support body so as to allow the intermediate frame, and with it the movable weight, to pivot around an axis which extends parallel to the plane of the planar substrate and perpendicular to the first direction.

2. The MEMS structure according to claim 1 , wherein:
the movable weight has a rectangular shape including first and second opposite edges extending along the first direction and third and fourth opposite edges extending along the second direction; and
at least one of the elastic supports is connected between the first edge and the intermediate frame and at least one of the elastic supports is connected between the second edge and the intermediate frame.

3. The MEMS structure according to claim 2 , wherein the movable weight has four corners and the elastic supports connect the four corners of the movable weight to the intermediate frame.

4. The MEMS structure according to claim 1 , wherein the support body and the movable portion are planar in shape and lie in the same plane.

5. A MEMS structure comprising:
a planar substrate;
a support body coupled to the planar substrate;
a fixed electrode coupled to the planar substrate; and
a movable portion spaced from and facing the fixed electrode, the movable portion being coupled to the planar substrate and including:
a movable weight;
an intermediate frame surrounding an outer edge of the movable weight;
at least one torsion bar pivotally connecting one end of the movable weight to the intermediate frame so as to allow the movable weight to pivot around an axis which extends parallel to the plane of the planar substrate and in a first direction; and
a plurality of elastic supports connecting the intermediate frame to the support body, the elastic supports being elastically deformable in a second direction extending horizontal to the plane of the planar substrate and perpendicular to the first direction such that the intermediate frame, and with it the movable weight, can move in the second direction.

6. The MEMS structure according to claim 5 , wherein:
the movable weight has a rectangular shape including first and second opposite edges extending along the first direction and third and fourth opposite edges extending along the second direction; and
the at least one torsion bar is connected between the first edge and the intermediate frame.

7. The MEMS structure according to claim 6 , wherein the intermediate frame has four corners and the elastic supports connect the four corners of the intermediate frame to the support body.

8. The MEMS structure according to claim 5 , wherein the support body and the movable portion are planar in shape and lie in the same plane.

Assignees

• Murata Manufacturing Co

Inventors

• Okami Tsuyoshi
• Mizota Takashi
• Ueya Yuki
• Matsuoka Junya
• Tsuji Nobuaki

Classifications

• B81B3/0021 Primary

  Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00) · CPC title

• H01L41/113

  Electricity · mapped topic

• H01L41/125

  Electricity · mapped topic

• H01L41/1132

  Electricity · mapped topic

• B81B2201/0228

  Inertial sensors · CPC title