Method and arrangement for forming a structuring on surfaces of components by means of a laser beam

Patent metadata

Field	Value
Publication number	US-9764424-B2
Application number	US-201414778321-A
Country	US
Kind code	B2
Filing date	Mar 13, 2014
Priority date	Mar 21, 2013
Publication date	Sep 19, 2017
Grant date	Sep 19, 2017

Abstract

The invention relates to a method for forming a structuring at surfaces of components using a laser beam. In the invention, a laser beam is directed onto a diffractive optical element. The diffractive optical element is configured such that the laser beam is split into at least two part beams and the part beams are directed at an angle α with respect to the optical axis of the laser beam onto at least one further optical element which is transparent for the laser radiation. The further optical element(s) has/have a first surface and a second surface which is inclined at an angle to the optical axis of the laser beam at which the beam direction of the part beams is changed by optical refraction. A focusing optical lens is arranged in the optical path of the part beams between the further optical element(s) and a component surface to be processed, and the part beams are focused such that they are incident onto the surface of the component at a common position at an angle of incidence β with respect to the optical axis of the laser beam. The distance d 1 between the optical elements is changed to change the interference period.

First claim

The invention claimed is:

1. A method for forming a surface structuring at surfaces of components using a laser beam, wherein the laser beam ( 1 ) is directed onto a diffractive optical element ( 2 ) or onto an acousto-optic modulator and is split by the diffractive optical element ( 2 ) or by the acousto-optic modulator into at least two part beams ( 1 . 1 and 1 . 2 ); and
the part beams ( 1 . 1 and 1 . 2 ) are directed onto at least one further optical element ( 3 ), which is transparent for the laser radiation, at an angle α with respect to the optical axis of the laser beam ( 1 ), wherein
the further optical element(s) ( 3 ) has/have a first surface and a second surface which is inclined at an angle to the optical axis of the laser beam ( 1 ) at which the beam direction of the part beams ( 1 . 1 and 1 . 2 ) is changed by optical refraction; and
the part beams ( 1 . 1 and 1 . 2 ) are focused by a focusing optical lens ( 4 ) arranged between the further optical element (s) 3 and a component surface to be processed such that they are incident at a common position on the surface of the component at an angle of incidence β with respect to the optical axis of the laser beam ( 1 ); wherein
the distance d 1 between the diffractive optical element ( 2 ) or the acousto-optic modulator and the further optical element ( 3 ) is changed to change the interference period.

2. A method in accordance with claim 1 , characterized in that the part beams ( 1 . 1 , 1 . 2 ) are directed onto at least one further optical element at the same angle α with respect to the optical axis of the laser beam; and/or
the part beams ( 1 . 1 , 1 . 2 ) are directed onto the surface of the component at the same angle of incidence β with respect to the optical axis of the laser beam ( 1 ).

3. A method in accordance with claim 1 , characterized in that the laser beam ( 1 ) is emitted by a laser radiation source in pulse operation.

4. A method in accordance with claim 1 , characterized in that an optical prism, a wedge plate or an optical element ( 3 ) formed at a surface in be form of a pyramid or of a truncated pyramid, in the form of a polyhedron, in the form of a cone or of a truncated cone is used as the at least one further optical element ( 3 ).

5. A method in accordance with claim 1 , characterized in that an optical grating is used as the diffractive optical element ( 2 ).

6. A method in accordance with claim 1 , characterized in that the diffractive optical element is rotated about an axis.

7. A method in accordance with claim 1 , characterized in that one-dimensional or two-dimensional interference patterns are formed whose period and/or alignment is/are changeable.

8. A method in accordance with claim 1 , characterized in that the laser beam ( 1 ) is directed, deflected by at least one reflective element ( 5 ), at least one-dimensionally onto the diffractive optical element ( 2 ) or onto the acousto-optic modulator.

9. A method in accordance with claim 1 , characterized in that the diffractive optical element ( 2 ) is rotated about an axis in parallel with the optical axis of the laser beam ( 1 ) directed in a perpendicular manner onto the diffractive optical element ( 2 ).

10. A method in accordance with claim 1 , characterized in that the distance d 2 between the further optical element ( 3 ) and the focusing optical lens ( 4 ) is changed.

11. A method in accordance with claim 1 , characterized in that the intensity profile of the laser beam ( 1 ) is modified by an additional optical element ( 7 ).

12. A method in accordance with claim 11 , characterized in that a non-rotationally symmetrical intensity profile of the laser beam ( 1 ) or an intensity profile of the laser beam ( 1 ) inhomogeneous over the cross-sectional surface is achieved.

13. An arrangement for carrying out the method in accordance with claim 1 , characterized in that a laser beam ( 1 ) is directed onto a diffractive optical element ( 2 ) or onto an acousto-optic modulator for splitting into part beams ( 1 . 1 , 1 . 2 ) and the part beans ( 1 . 1 , 1 . 2 ) are directed onto at least one further optical element ( 3 ) which is transparent for the laser radiation at an angle α with respect to the optical axis of the laser beam ( 1 ), wherein
the further optical element (s) ( 3 ) has/have a first surface and a second surface which is inclined at an angle to the optical axis of the laser beam ( 1 ) at which the beam direction of the part beams ( 1 . 1 and 1 . 2 ) is changed by optical refraction; and
the part beams ( 1 . 1 and 1 . 2 ) are incident at a common position at an angle of incidence β with respect to the optical axis of the laser beam ( 1 ) onto the surface or the component by means of a focusing optical lens ( 4 ) arranged between the further optical element(s) ( 3 ) and a component surface to be processed.

14. An arrangement in accordance with claim 13 , characterized in that a further al optical element ( 3 ) is an optic prism, a wedge plate, an optical element ( 3 ) formed at a surface in the form of a pyramid or of a truncated pyramid, in the form of a polyhedron, in the form of a cone or of a truncated cone and the diffractive optical element ( 2 ) is an optical grating.

15. An arrangement in accordance with claim 13 , characterized in that the diffractive optical element ( 2 ) is rotatable about an axis.

16. An arrangement in accordance with claim 13 , characterized in that at least one reflective element ( 5 ), which is pivotable about at least one axis, is arranged in the optical path of the laser beam ( 1 ) or of the part beams ( 1 . 1 , 1 . 2 ).

17. An arrangement in accordance with claim 13 , characterized in that a beam-shaping reflective or transmitting element ( 7 ), which has a reflection gradient or a transmission gradient over its surface, or an adaptive optical element is/are arranged in front of the diffractive optical element ( 2 ) or the acousto-optic modulator in the optical path of the laser beam ( 1 ).

18. An arrangement in accordance with claim 13 , characterized in that an adaptive optical element ( 7 ) has an irregularly curved surface or its surface onto which the laser beam is directed is changeable with respect to its curvature.

Assignees

• Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E V

Inventors

• Roch Teja
• Benke Dimitri
• Lasagni Andres Fabian

Classifications

• B23K26/0648

  comprising lenses · CPC title

• B23K26/0652

  comprising prisms · CPC title

• G03F7/70408

  Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect · CPC title

• B23K26/0608 Primary

  in the same heat affected zone [HAZ] (B23K26/0613, B23K26/0619 take precedence) · CPC title

• B23K26/355

  Texturing · CPC title