Gas purification filter unit

Patent metadata

Field	Value
Publication number	US-9764268-B2
Application number	US-201314651824-A
Country	US
Kind code	B2
Filing date	Dec 9, 2013
Priority date	Dec 14, 2012
Publication date	Sep 19, 2017
Grant date	Sep 19, 2017

Abstract

This gas purification filter unit ( 10 ) is provided with: a first elimination unit ( 11 ) that eliminates gas component impurities among the impurities contained in ozone generated from an ozone generating device; and a second elimination unit ( 12 ) that is disposed at a later stage than the first elimination unit and that further eliminates solid particulate impurities from among the impurities from which the gas component has been eliminated. Ozone containing impurities are caused to flow in from the inflow end ( 10 a ) of such a gas purification filter unit ( 10 ) and is passed through the first elimination unit ( 11 ) and second elimination unit ( 12 ), and thus ozone from which impurities have been eliminated is discharged from an outflow end ( 10 b ).

First claim

The invention claimed is:

1. A gas purification filter unit for removing impurities contained in ozone gas, comprising:
a first removal section for removing a gas component from the impurities, and a second removal section which is disposed at a stage after the first removal section and removes solid fine particles from impurities from which the gas component has been removed, said gas purification filter unit comprises an accommodation section for detachably accommodating the second removal section, said accommodation section is formed at the end of the first removal section and includes a cylindrical space formed therein to enable the second removal section, which has a substantially cylindrical external shape, to be received therein.

2. The gas purification filter unit as claimed in claim 1 , wherein the first removal section is provided with an adsorbent for adsorbing the gas component.

3. The gas purification filter unit as claimed in claim 2 , wherein the adsorbent is silica gel.

4. The gas purification filter unit as claimed in claim 3 , wherein the silica gel has a large number of pores, the diameter of the respective pores being no greater than 10 nm.

5. The gas purification filter unit as claimed in claim 3 , wherein the silica gel is in the form of spheres having a diameter of between 0.5 mm and 3 mm.

6. The gas purification filter unit as claimed in claim 2 , wherein the adsorbent includes silica and alumina.

7. The gas purification filter unit as claimed in claim 6 , wherein the adsorbent comprises a high-silica zeolite in which the proportion of silica is at least 10 times that of alumina.

8. The gas purification filter unit as claimed in claim 1 , wherein the second removal section is provided with an area for straining the solid fine particles.

9. The gas purification filter unit as claimed in claim 8 , wherein the second removal section comprises a resin case which is resistant to ozone corrosion, and the area which is accommodated inside the resin case.

10. The gas purification filter unit as claimed in claim 9 , wherein the area is a filtration material in the form of a sheet which is pleated for accommodation inside the resin case.

11. The gas purification filter unit as claimed in claim 10 , wherein the filtration material has a nominal pore size ranging between 0.2 μm and 0.5 μm.

12. The gas purification filter unit as claimed in claim 9 , wherein the resin case and the filtration material comprise a fluororesin.

13. The gas purification filter unit as claimed in claim 12 , wherein the fluororesin comprises at least one from among: tetrafluoroethylene-hexafluoropropylene copolymer, polytetrafluoroethylene and perfluoroalkoxy fluororesin.

14. The gas purification filter unit as claimed in claim 9 , wherein wherein the first removal section is provided with an external covering for accommodating the adsorbent, and an accommodation section which is formed on part of the external covering and can detachably accommodate the resin case forming part of the second removal section.

15. The gas purification filter unit as claimed in claim 14 , wherein the accommodation section is provided with a mesh member made of stainless steel.

16. The gas purification unit according to claim 1 , wherein said first and second removal portions for an integral construction in which both removal sections are continuously arranged so as to be adjacent to each other.

17. The gas purification filter unit as claimed in claim 1 , wherein the first removal section is provided with an adsorbent for adsorbing the gas component, said adsorbent does not contain transition metal elements.

Assignees

• Entegris Inc

Inventors

• Nozaki Fumio
• Shimada Yutaka

Classifications

• B01D71/36

  Polytetrafluoroethylene · CPC title

• B01D2256/14

  Ozone · CPC title

• B01D53/02

  by adsorption, e.g. preparative gas chromatography {(solid sorbent compositions B01J20/00, preparation of inorganic compounds or elements C01)} · CPC title

• B01D2253/106

  Silica or silicates · CPC title

• B01D2253/1085

  characterized by a silicon-aluminium ratio · CPC title