Storage device and storage unit with ion source layer and resistance change layer

Patent metadata

Field	Value
Publication number	US-9761796-B2
Application number	US-201314647793-A
Country	US
Kind code	B2
Filing date	Nov 6, 2013
Priority date	Dec 3, 2012
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

There are provided a storage device and a storage unit capable of improving retention performance of an intermediate resistance value in writing at a low current, and a storage device and a storage unit capable of reducing random telegraph noise. A storage device of one embodiment of the present technology includes a first electrode, a storage layer, and a second electrode in this order, and the storage layer includes: an ion source layer including one or more kinds of chalcogen elements selected from tellurium (Te), sulfur (S), and selenium (Se), and one or more kinds of transition metal elements selected from Group 4 elements, Group 5 elements, and Group 6 elements of the periodic table; and a resistance change layer including boron (B) and oxygen (O). A storage device of another embodiment of the present technology includes the above-described ion source layer and a resistance change layer including one or more kinds of transaction metal elements selected from Group 4 elements, Group 5 elements, and Group 6 elements of the periodic table, and oxygen (O).

First claim

The invention claimed is:

1. A storage device, comprising:
a first electrode;
a second electrode; and
a storage layer, wherein the first electrode, the storage layer, and the second electrode are laminated in an order,
wherein the storage layer comprises:
an ion source layer including at least one kind of chalcogen element selected from tellurium (Te), sulfur (S), or selenium (Se), and at least one kind of transition metal element selected from Group 4 elements, Group 5 elements, or Group 6 elements of the periodic table; and
a resistance change layer that has a laminate configuration, wherein the laminate configuration includes a first resistance change layer and a second resistance change layer, including boron (B) and oxygen ( 0 ) and wherein the first resistance change layer includes boron (B), and the second resistance change layer includes at least one kind of an additive element in a form of an oxide or a nitride.

2. The storage device according to claim 1 , wherein a part or a whole of boron (B) included in the resistance change layer is bonded to oxygen (O).

3. The storage device according to claim 1 , wherein the resistance change layer further includes, as the additive element, at least one kind selected from tungsten (W), hafnium (Hf), carbon (C), silicon (Si), tantalum (Ta), magnesium (Mg), copper (Cu), nickel (Ni), zirconium (Zr), or gadolinium (Gd).

4. The storage device according to claim 3 , wherein a composition ratio of B/a total composition ratio of B and the additive element of boron (B) included in the resistance change layer is 30% or more.

5. The storage device according to claim 1 , wherein the first resistance change layer further includes oxygen (O).

6. The storage device according to claim 1 , wherein the first resistance change layer and the second resistance change layer are laminated in order from a side of the first electrode.

7. The storage device according to claim 1 , wherein the second resistance change layer and the first resistance change layer are laminated in order from a side of the first electrode.

8. The storage device according to claim 1 , wherein the ion source layer includes oxygen (O) or nitrogen (N).

9. The storage device according to claim 1 , wherein a resistance value of the resistance change layer changes based on a formation of a low resistance section that includes at least one of the transition metal element or an oxygen defect in the resistance change layer by voltage application to the first electrode and the second electrode.

10. A storage device, comprising:
a first electrode;
a second electrode; and
a storage layer, wherein the first electrode, the storage layer, and the second electrode are laminated in an order,
wherein the storage layer comprises:
an ion source layer including at least one kind of chalcogen element selected from tellurium (Te), sulfur (S), or selenium (Se), and at least one kind of transition metal element selected from Group 4 elements, Group 5 elements, or Group 6 elements of the periodic table; and

a resistance change layer that has a laminate configuration, wherein the laminate configuration includes a first resistance change layer and a second resistance change layer, wherein the resistance change layer includes at least one kind of the transaction metal element selected from Group 4 elements, Group 5 elements, or Group 6 elements of the periodic table, and oxygen (O), and
wherein the first resistance change layer includes boron (B) and oxygen (O), and the second resistance change layer includes at least one kind of an additive element in a form of an oxide or a nitride.

11. The storage device according to claim 10 , wherein the first resistance change layer, the second resistance change layer, and the ion source layer are laminated in order from a side of the first electrode.

12. The storage device according to claim 10 , wherein the first resistance change layer includes carbon (C).

13. The storage device according to claim 10 , wherein the ion source layer includes hafnium (Hf) as the transition metal element.

14. The storage device according to claim 10 , wherein a resistance value of the resistance change layer changes based on a formation a low resistance section that includes at least one of the transition metal element or an oxygen defect in the resistance change layer by voltage application to the first electrode and the second electrode.

15. The storage device according to claim 10 , wherein the ion source layer includes oxygen (O) or nitrogen (N).

16. A storage unit, comprising:
a plurality of storage devices and a pulse application means, each of the plurality of storage devices including a first electrode, a storage layer, and a second electrode in an order, the pulse application means configured to selectively apply a pulse of a voltage or a current to the plurality of storage devices, the storage layer comprising:
an ion source layer including at least one kind of chalcogen element selected from tellurium (Te), sulfur (S), or selenium (Se), and at least one kind of transition metal element selected from Group 4 elements, Group 5 elements, or Group 6 elements of the periodic table; and
a resistance change layer that has a laminate configuration, wherein the laminate configuration a first resistance change layer and a resistance change layer, and wherein the first resistance change layer includes boron (B), and the second resistance change layer includes at least one kind of an additive element in a form of an oxide or a nitride.

17. A storage unit, comprising:
a plurality of storage device and a pulse application means, each of the plurality of storage devices including a first electrode, a storage layer, and a second electrode in an order, the pulse application means configured to selectively apply a pulse of a voltage or a current to the plurality of storage devices, the storage layer comprising:
an ion source layer including at least one kind of chalcogen element selected from tellurium (Te), sulfur (S), or selenium (Se), and at least one kind of transition metal element selected from Group 4 elements, Group 5 elements, or Group 6 elements of the periodic table; and
a resistance change layer that has a laminate configuration, wherein the laminate configuration includes a first resistance change layer and a second resistance change layer, wherein the resistance change layer includes at least one kind of transition metal element selected from Group 4 elements, Group 5 elements, or Group 6 elements of the periodic table, and oxygen (O), and
wherein the first resistance change layer includes boron (B) and oxygen (O), and the second resistance change layer includes at least one kind of an additive element in a form of an oxide or a nitride.

Assignees

• Sony Corp

Inventors

• Ohba Kazuhiro
• Sei Hiroaki

Classifications

• G11C13/0069

  Writing or programming circuits or methods · CPC title

• G11C13/0009

  RRAM elements whose operation depends upon chemical change · CPC title

• H01L27/2472

  Electricity · mapped topic

• G11C2213/56

  Structure including two electrodes, a memory active layer and a so called passive or source or reservoir layer which is NOT an electrode, wherein the passive or source or reservoir layer is a source of ions which migrate afterwards in the memory active layer to be only trapped there, to form conductive filaments there or to react with the material of the memory active layer in redox way · CPC title

• G11C13/0004

  comprising amorphous/crystalline phase transition cells · CPC title