Semiconductor device and method for manufacturing semiconductor device

Patent metadata

Field	Value
Publication number	US-9761736-B2
Application number	US-201414337835-A
Country	US
Kind code	B2
Filing date	Jul 22, 2014
Priority date	Jul 25, 2013
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

Provided is a semiconductor device in which a deterioration in electrical characteristics which becomes more noticeable as miniaturization can be suppressed. The semiconductor device includes a first oxide semiconductor film over an insulating surface; a second oxide semiconductor film over the first oxide semiconductor film; a source electrode and a drain electrode in contact with each side surface of the first oxide semiconductor film and the second oxide semiconductor film; a first insulating film and a second insulating film over the source electrode and the drain electrode; a third oxide semiconductor film over the second oxide semiconductor film, the source electrode, and the drain electrode; a gate insulating film over the third oxide semiconductor film; and a gate electrode in contact with an upper surface of the gate insulating film and facing an upper surface and the side surface of the second oxide semiconductor film.

First claim

What is claimed is:

1. A semiconductor device comprising:
a first insulating film;
a first oxide semiconductor film over the first insulating film;
a second oxide semiconductor film over the first oxide semiconductor film;
a first conductive film and a second conductive film over the first insulating film;
a third oxide semiconductor film over the second oxide semiconductor film, the first conductive film, and the second conductive film;
a second insulating film over the third oxide semiconductor film; and
a third conductive film over the second insulating film,
wherein each of the first conductive film and the second conductive film is in contact with a first side surface of the second oxide semiconductor film,
wherein, in a channel width direction, the third conductive film faces a second side surface of the second oxide semiconductor film,
wherein the first oxide semiconductor film comprises a depressed portion, and
wherein the third oxide semiconductor film is in contact with the depressed portion.

2. The semiconductor device according to claim 1 , wherein, in the channel width direction, the third oxide semiconductor film is in contact with the second side surface of the second oxide semiconductor film.

3. The semiconductor device according to claim 1 , wherein an entire upper surface of the second oxide semiconductor film is in contact with the third oxide semiconductor film.

4. The semiconductor device according to claim 1 , wherein, in a channel length direction, a length of the third oxide semiconductor film is larger than a length of each of the first oxide semiconductor film and the second oxide semiconductor film.

5. The semiconductor device according to claim 1 , wherein the third oxide semiconductor film comprises indium, gallium, and zinc.

6. A semiconductor device comprising:
a first conductive film;
a first insulating film over the first conductive film;
a first oxide semiconductor film over the first insulating film;
a second oxide semiconductor film over the first oxide semiconductor film;
a second conductive film and a third conductive film over the first insulating film;
a third oxide semiconductor film over the second oxide semiconductor film, the first conductive film, and the second conductive film;
a second insulating film over the third oxide semiconductor film; and
a fourth conductive film over the second insulating film,
wherein each of the second conductive film and the third conductive film is in contact with a first side surface of the second oxide semiconductor film,
wherein, in a channel width direction, the fourth conductive film faces a second side surface of the second oxide semiconductor film,
wherein the first oxide semiconductor film comprises a depressed portion, and
wherein the third oxide semiconductor film is in contact with the depressed portion.

7. The semiconductor device according to claim 6 , wherein, in the channel width direction, the third oxide semiconductor film is in contact with the second side surface of the second oxide semiconductor film.

8. The semiconductor device according to claim 6 , wherein an entire upper surface of the second oxide semiconductor film is in contact with the third oxide semiconductor film.

9. The semiconductor device according to claim 6 , wherein, in a channel length direction, a length of the third oxide semiconductor film is larger than a length of each of the first oxide semiconductor film and the second oxide semiconductor film.

10. The semiconductor device according to claim 6 , wherein the fourth conductive film is electrically connected to the first conductive film.

11. The semiconductor device according to claim 6 , wherein the third oxide semiconductor film comprises indium, gallium, and zinc.

Assignees

• Semiconductor Energy Lab

Inventors

• Yamazaki Shunpei
• Sasagawa Shinya
• Hondo Suguru
• Suzawa Hideomi

Classifications

• H10P14/3434

  being oxide semiconductor materials (Group IIB-VIA semiconductor materials H10P14/3424) · CPC title

• H10P50/69

  using masks for semiconductor materials · CPC title

• H01L29/78696

  Electricity · mapped topic

• H01L29/247

  Electricity · mapped topic

• H01L29/66969

  Electricity · mapped topic