Semiconductor device

Patent metadata

Field	Value
Publication number	US-9761681-B2
Application number	US-201515303597-A
Country	US
Kind code	B2
Filing date	Mar 27, 2015
Priority date	May 26, 2014
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

The semiconductor device includes a gate insulation film covering inner surfaces of the first trench and the second trench, and an inner surface of an intersection, and a gate electrode provided in the first trench and the second trench, and facing the semiconductor substrate via the gate insulation film. Further, the semiconductor device includes an emitter region of an n-type provided in the semiconductor substrate, exposed on the front surface of the semiconductor substrate, being in contact with the gate insulation film in the second trench, and not being in contact with the gate insulation film provided on the inner surface of the intersection of the first trench and the second trench.

First claim

The invention claimed is:

1. A semiconductor device comprising:
a first trench provided in a front surface of a semiconductor substrate;
a second trench provided in the front surface, extending in a direction different from a direction of the first trench, and intersecting the first trench in a plan view of the front surface, the second trench extending in the y direction in the plan view and having spaced-part edges extending the y-direction and spaced apart from each other in the x direction in the plan view;
a gate insulation film covering inner surfaces of the first trench and the second trench, and an inner surface of an intersection of the first trench and the second trench, the gate insulating film comprising first and second portions covering the spaced apart edges of the second trench, extending in the y direction in plan view, and spaced apart in the x direction in the plan view;
a gate electrode provided in the first trench and the second trench, and facing the semiconductor substrate via the gate insulation film;
a first semiconductor region of a first conductive type provided in the semiconductor substrate, exposed on the front surface, being in contact with the gate insulation film in the second trench, and not being in contact with the gate insulation film covering the inner surface of the intersection of the first trench and the second trench;
a second semiconductor region of a second conductive type provided in the semiconductor substrate, and being in contact with the gate insulation film in the second trench on a deeper side than the first semiconductor region; and
a third semiconductor region of a first conductive type provided in the semiconductor substrate, being in contact with the gate insulation film in the second trench on a deeper side than the second semiconductor region, and separated from the first semiconductor region by the second semiconductor region,
the first semiconductor region extending in the x direction from one of the first and second portions of the gate insulating film in the plan view, and the first semiconductor region not extending in the x direction from the other of the first and second portions of the gate insulating film in the plan view.

2. The semiconductor device according to claim 1 , comprising:
a plurality of the first trenches and a plurality of the second trenches, wherein
the plurality of the first trenches and the plurality of the second trenches are arranged in a grid-like pattern in the plan view of the front surface, and
the first semiconductor region is not in contact with the gate insulation film in the first trenches.

3. The semiconductor device according to claim 2 , wherein
grids formed by the first trenches and the second trenches are arranged in a staggered pattern in the plan view of the front surface.

Assignees

• Toyota Motor Co Ltd

Inventors

• Nishiwaki Katsuhiko

Classifications

• H01L29/7813

  Electricity · mapped topic

• H01L29/4236 Primary

  Electricity · mapped topic

• H01L29/423

  Electricity · mapped topic

• H01L27/088

  Electricity · mapped topic

• H01L29/12

  Electricity · mapped topic