Methods for fabricating a semiconductor device and semiconductor devices fabricated by the same

Patent metadata

Field	Value
Publication number	US-9761603-B2
Application number	US-201514964624-A
Country	US
Kind code	B2
Filing date	Dec 10, 2015
Priority date	Dec 26, 2014
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

The inventive concepts provide methods for fabricating a semiconductor device and semiconductor devices fabricated by the same. According to the method, conductive lines having a fine pitch smaller than the minimum pitch realized by an exposure process may be formed using two or three photolithography processes and two spacer formation processes. In addition, node separation regions of the conductive lines may be easily formed without a misalignment problem.

First claim

What is claimed is:

1. A method for fabricating a semiconductor device, the method comprising:
sequentially forming an etch target layer, a lower mold layer, and an intermediate mold layer on a substrate, the etch target layer including a separation region;
forming first mold patterns on the intermediate mold layer;
forming first spacers on sidewalls of the first mold patterns;
etching the intermediate mold layer using the first spacers as etch masks to form second mold patterns;
forming second spacers on sidewalls of the second mold patterns;
etching the lower mold layer using the second spacers as etch masks to form third mold patterns;
forming a fourth mold pattern that at least partially covers at least one of the third mold patterns, the fourth mold pattern vertically overlapping the separation region;
etching the etch target layer using the fourth mold pattern and ones of the third mold patterns that are exposed by the fourth mold pattern as etch masks to form insulating patterns; and
forming conductive lines in spaces between the insulating patterns.

2. The method of claim 1 , wherein the substrate includes a cell array region and a peripheral circuit region,
wherein the separation region is on the cell array region,
wherein the fourth mold pattern includes a plurality of fourth mold patterns, and
wherein a one of the fourth mold patterns that is on the peripheral circuit region exposes a portion of the etch target layer that is on the peripheral circuit region.

3. The method of claim 2 , wherein the first, second and third mold patterns are formed on the cell array region.

4. The method of claim 2 , wherein forming the first mold patterns comprises:
forming an upper mold layer on the intermediate mold layer;
forming photoresist patterns on the upper mold layer, the photoresist patterns covering the upper mold layer of the peripheral circuit region but exposing portions of the upper mold layer of the cell array region; and
etching the upper mold layer using the photoresist patterns as etch masks to form the first mold patterns on the cell array region.

5. The method of claim 2 , wherein the portion of the lower mold layer that is on the peripheral circuit region is completely etched when the third mold patterns are formed.

6. The method of claim 2 , wherein forming the fourth mold patterns comprises:
forming a preliminary mold layer on the third mold patterns;
forming photoresist patterns on the preliminary mold layer; and
etching the preliminary mold layer using the photoresist patterns as etch masks to form fourth mold patterns,
wherein the photoresist pattern on the cell array region vertically overlaps the separation region.

7. The method of claim 1 , wherein the third mold patterns include a first extension pattern and a second extension pattern that extend in parallel to each other in one direction, and
wherein one sidewall of the fourth mold pattern is disposed between the first extension pattern and the second extension pattern.

8. The method of claim 7 , wherein etching the etch target layer to form the insulating patterns comprises:
etching a portion of the etch target layer, which is exposed by the fourth mold pattern between the first and second extension patterns, to form a dummy trench.

9. The method of claim 8 , wherein a width of a portion of the dummy trench is substantially equal to a maximum width of the first spacer, and
wherein a width of another portion of the dummy trench is smaller than the maximum width of the first spacer.

10. The method of claim 8 , wherein forming the conductive lines comprises: forming a dummy interconnection in the dummy trench,
wherein the dummy interconnection is between the separation region and a first of the insulating patterns that is adjacent the separation region.

11. The method of claim 1 , further comprising:
forming a first mask layer on the intermediate mold layer before forming the first mold patterns; and
etching the first mask layer using the first spacers as etch masks to form first mask patterns,
wherein the first mask patterns are also used as etch masks when the intermediate mold layer is etched.

12. The method of claim 1 , wherein a width of at least one of the first mold patterns is about three times a maximum width of one of the first spacers.

13. The method of claim 1 , wherein a distance between adjacent ones of the first mold patterns is about five times a maximum width of the one of the first spacers.

14. The method of claim 1 , wherein a width of at least one of the second mold patterns and a width of at least one of the third mold patterns are substantially equal to a maximum width of one of the first spacers.

15. The method of claim 1 , wherein a distance between adjacent ones of the second mold patterns is about three times a maximum width of one of the first spacers.

16. The method of claim 1 , wherein a distance between adjacent ones of the third mold patterns is substantially equal to a maximum width of one of the first spacers.

17. The method of claim 1 , wherein a maximum width of at least one of the second spacers is substantially equal to a maximum width of one of the first spacers.

18. A method for fabricating a semiconductor device, the method comprising:
forming an etch target layer on a substrate, the etch target layer including a separation region;
forming a lower mold layer on the etch target layer opposite the substrate;
forming an intermediate mold layer on the lower mold layer opposite the etch target layer;
forming first mold patterns on the intermediate mold layer;
forming first spacers on sidewalls of the first mold patterns, wherein a first of the first spacers that is on a sidewall of a first of the first mold patterns has a maximum width that is about one third a maximum width of the first of the first mold patterns;
etching the intermediate mold layer using the first spacers as etch masks to form second mold patterns, wherein a first of the second mold patterns has a width that is substantially equal to the maximum width of the first of the first spacers;
forming second spacers on sidewalls of the second mold patterns, wherein a first of the second spacers has a width that is substantially equal to the maximum width of the first of the first spacers;
etching the lower mold layer using at least the second spacers as etch masks to form third mold patterns;
forming a fourth mold pattern on at least one of the third mold patterns, the fourth mold pattern vertically overlapping the separation region;
etching the etch target layer using at least some of the third mold patterns as etch masks to form etch target layer patterns; and
forming conductive lines in spaces between the etch target layer patterns,
wherein etching the etch target layer using at least some of the third mold patterns as the etch masks to form the etch target layer patterns comprises etching the etch target layer using the fourth mold pattern and ones of the third mold patterns that are exposed by the fourth mold pattern as etch masks to form the etch target layer patterns.

19. The method of claim 18 , wherein a distance between adjacent ones of the first mold patterns is about five times a maximum width of the first of the first spacers, and
wherein a distance between adjacent ones of the second mold patterns is about three times a maximum width of the first of the first spacers.

20. A method for fabricating a semiconductor device, the method comprising:
sequentially forming an etch targe

Assignees

• Song Min-Sung
• Sim Jae-Hwang
• Lim Joon-Sung
• Samsung Electronics Co Ltd

Inventors

• Song Min-Sung
• Sim Jae-Hwang
• Lim Joon-Sung

Classifications

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• H10P76/4085 Primary

  characterised by the processes involved to create the masks · CPC title

• H10P50/73

  using masks for insulating materials · CPC title

• H10W20/089

  using processes for implementing desired shapes or dispositions of the openings, e.g. double patterning · CPC title

• H10P76/2041 Primary

  Photolithographic processes · CPC title