Manufacturing method of color filter substrate

Patent metadata

Field	Value
Publication number	US-9760001-B2
Application number	US-201414429443-A
Country	US
Kind code	B2
Filing date	Jun 30, 2014
Priority date	Sep 10, 2013
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

A manufacturing method of a color filter substrate includes: depositing a photoresist layer on a substrate, patterning the photoresist layer through exposure and development and executing an UV curing; or forming an overcoat whose material is a light-cured material on a substrate, conducting an UV irradiation on the substrate from front and back sides of the substrate, respectively; or, depositing a black matrix photoresist, a red photoresist, a green photoresist and a blue photoresist on a substrate, respectively, and forming corresponding patterns respectively through exposure and development and executing an UV curing. By the technical solution, the line-width of a BM can be restrained from broadening, and the curing time can be shortened, thereby raising the production efficiency.

First claim

What is claimed is:

1. A manufacturing method of a color filter substrate, comprising:
coating photoresist on a substrate to form a photoresist layer, patterning the photoresist layer through exposure and development and executing an ultraviolet curing of the photoresist layer;
wherein the ultraviolet curing is carried out in a conveyor belt ultraviolet curing machine; a transfer speed, a curing time period and a length of an ultraviolet curing segment of the conveyor belt ultraviolet curing machine meet the following relationship;
the transfer speed=length of the UV curing segment/the curing time.

2. The manufacturing method claimed as claim 1 , wherein the photoresist layer is a black matrix photoresist layer, a red photoresist layer, a green photoresist layer, a blue photoresist layer, or a photoresist layer for pillar-shaped spacers and an ultraviolet irradiation is conducted on the substrate from front and back sides of the substrate, respectively.

3. The manufacturing method claimed as claim 1 , wherein the photoresist comprises a photosensitizer sensitive to i-line of ultraviolet light added therein.

4. The manufacturing method claimed as claim 3 , wherein the photoresist also comprises a photosensitizer sensitive to h-line or g-line of ultraviolet light added therein.

5. A manufacturing method of a color filter substrate, comprising:
coating a light-cured material on a substrate to form an overcoat, and executing an ultraviolet curing;
wherein the ultraviolet curing includes:
conducting an ultraviolet irradiation on the substrate from front and back sides of the substrate, respectively.

6. The manufacturing method claimed as claim 5 , wherein the ultraviolet curing is carried out in a conveyor belt ultraviolet curing machine or an oven ultraviolet curing machine.

7. The manufacturing method claimed as claim 6 , wherein, where the conveyor belt ultraviolet curing machine is used for ultraviolet curing of the substrate, a transfer speed, a curing time period and a length of an ultraviolet curing segment meet the following relationship:
the transfer speed=the length of the UV curing segment/the curing time.

8. The manufacturing method claimed as claim 6 , wherein the oven ultraviolet curing machine is provided hi a multilayered structure, and at least one ultraviolet light source is arranged between layers.

9. The manufacturing method claimed as claim 5 , wherein the light-cured material comprises a photosensitizer sensitive to i-line of ultraviolet light added therein.

10. The manufacturing method claimed as claim 9 , wherein, the light-cured material also comprises a photosensitizer sensitive to h-line or g-line of ultraviolet light added therein.

11. A manufacturing method of a color filter substrate, comprising:
coating a black matrix photoresist on a substrate to form a black matrix photoresist layer, forming a pattern of a black matrix through exposure and development and executing an ultraviolet curing of the black matrix photoresist layer;
coating a red photoresist on the substrate to form a red photoresist layer, forming pattern of red sub-pixels through exposure and development and executing an ultraviolet curing of the red photoresist layer;
coating a green photoresist on the substrate to form a green photoresist layer, forming pattern of green sub-pixels through exposure and development and executing an ultraviolet curing of the green photoresist layer; and
coating a blue photoresist on the substrate to form a blue photoresist layer, forming pattern of blue sub-pixels through exposure and development and executing an ultraviolet curing of the blue photoresist layer;
wherein the ultraviolet curing is carried out in an oven ultraviolet curing machine; the oven ultraviolet curing machine is provided in a multilayered structure, and at least one ultraviolet light source is arranged between layers.

12. The manufacturing method claimed as claim 11 , further comprising:
coating a light-cured material on the substrate to form an overcoat, and executing an ultraviolet curing.

13. The manufacturing method claimed as claim 12 , further comprising:
coating a pillar-shaped spacer photoresist on the substrate to form a photoresist layer for pillar-shaped spacers, forming a pattern of the pillar-shaped spacers and executing an ultraviolet curing.

14. The manufacturing method claimed as claim 13 , further comprising:
conducting an annealing on the substrate with the black matrix, the red, green and blue sub-pixels, the overcoat and the pillar-shaped spacers formed thereon.

15. The manufacturing method claimed as claim 13 , wherein at least one of the black matrix photoresist, the red photoresist, the green photoresist, the blue photoresist, the light-cured material and the pillar-shaped spacer photoresist comprises a photosensitizer sensitive to i-line of ultraviolet light added therein.

16. The manufacturing method claimed as claim 15 , wherein at least one of the black matrix photoresist, the red photoresist, the green photoresist, the blue photoresist, the light-cured material and the pillar-shaped spacer photoresist also comprises a photosensitizer sensitive to h-line or g-line of ultraviolet light added therein.

17. The manufacturing method claimed as claim 11 , wherein the ultraviolet curing is conducting an ultraviolet irradiation on the substrate from front and back sides of the substrate, respectively.

Assignees

• Boe Technology Group Co Ltd
• Chengdu Boe Optoelect Tech Co

Inventors

• Yang Zerong
• Long Qingde

Classifications

• G03F7/2032

  Simultaneous exposure of the front side and the backside · CPC title

• G02F1/133516

  Methods for their manufacture, e.g. printing, electro-deposition or photolithography · CPC title

• G03F7/0007 Primary

  Filters, e.g. additive colour filters; Components for display devices · CPC title

• G03F7/2024

  of the already developed image · CPC title

• G02B5/201

  in the form of arrays · CPC title