Optical module and a detection method

Patent metadata

Field	Value
Publication number	US-9759883-B1
Application number	US-201615069496-A
Country	US
Kind code	B1
Filing date	Mar 14, 2016
Priority date	Mar 14, 2016
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

An optical module that includes (a) an optical interface that includes an input surface and an output surface, and (b) a scintillator that has a flat surface. The scintillator is configured emit emitted light through the flat surface in response to an impingement of a charged particle on the scintillator. The flat surface is optically coupled to the input surface. The optical interface is configured to (i) receive the emitted light from the scintillator and (ii) output, via the output surface, output light. An optical interface refractive index substantially equals a scintillator refractive index.

First claim

What is claimed is:

1. An optical module, comprising:
an optical interface having an optical refractive index, the optical interface comprises an input surface and an output surface; and
a scintillator comprising a flat surface optically coupled to the input surface and being configured to emit emitted light through the flat surface in response to an impingement of a charged particle on the scintillator;
wherein the optical interface is configured to (i) receive the emitted light from the scintillator and (ii) output, via the output surface, output light and wherein at least one of the following is true: (a) the optical interface forms at least a part of a light guide, (b) the input surface is coupled to the flat surface by optical contact coupling, or (c) the input surface is attached to the flat surface by an adhesive material that has an adhesive material refraction index that is substantially equal to the scintillator refractive index; and
wherein the optical interface refractive index differs from the scintillator refractive index by up to 10 percent.

2. The optical module according to claim 1 wherein the output light exits through a region of the output surface at an angle, in relation to the region of the output surface, that ranges between 70 and 110 degrees.

3. The optical module according to claim 1 wherein the flat surface contacts the input surface.

4. The optical module according to claim 1 wherein the optical interface comprises a parabolic mirror that is configured to collimate the emitted light towards the output surface.

5. The optical module according to claim 1 wherein the output surface is shaped as a segment of a three dimensional sphere.

6. The optical module according to claim 1 wherein the output surface has a linear shape.

7. The optical module according to claim 1 wherein the output surface has a non-linear shape.

8. The optical module according to claim 1 wherein the optical interface refractive index equals the scintillator refractive index.

9. The optical module according to claim 1 herein the input surface is oriented in relation to the output surface.

10. The optical module according to claim 1 wherein the optical interface and the scintillator are made of Sapphire.

11. The optical module according to claim 1 wherein the optical interface forms at least a part of a light guide.

12. The optical module according to claim 1 wherein the input surface is coupled to the flat surface by an optical contact coupling.

13. The optical module according to claim 1 wherein the input surface is attached to the flat surface by an adhesive material that has an adhesive material refraction index that is substantially equal to the scintillator refractive index.

14. A method for detection, the method comprises:
emitting, through a flat surface of a scintillator that as a scintillator refractive index, emitted light; wherein the emitting of the emitted light is responsive to an impingement of a charged particle on the scintillator;
receiving, via an input surface of an optical interface that has an optical refractive index, the emitted light;
outputting, via an output surface of the optical interface, output light through a region of the output surface at an angle, in relation to the region of the output surface, that ranges between 70 and 110 degrees;
wherein the optical interface refractive index differs from the scintillator refractive index by up to 10 percent; and
wherein at least one of the following is true: (a) the optical interface forms at least a part of a light guide, or (b) the output surface of the optical interface directly contacts a portion of the light guide.

15. The method according to claim 14 wherein the optical interface comprises a parabolic mirror that is configured to collimate the emitted light towards the output surface.

16. The method according to claim 14 wherein the output light exits through a region of the output surface at an angle, in relation to the region of the output surface, that ranges between 70 and 110 degrees.

17. The method according to claim 14 wherein the flat surface contacts the input surface.

Assignees

• Applied Materials Israel Ltd

Inventors

• Kuzniz Tal

Classifications

• G02B27/30

  Collimators · CPC title

• G01T1/10

  Luminescent dosimeters · CPC title

• G02B6/4298 Primary

  coupling with non-coherent light sources and/or radiation detectors, e.g. lamps, incandescent bulbs, scintillation chambers · CPC title

• G02B6/4212

  the intermediate optical element being a coupling medium interposed therebetween, e.g. epoxy resin, refractive index matching material, index grease, matching liquid or gel · CPC title

• G02B6/4214

  the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device (G02B6/4246 takes precedence) · CPC title