Pressure measuring cell

Patent metadata

Field	Value
Publication number	US-9759623-B2
Application number	US-201314647527-A
Country	US
Kind code	B2
Filing date	Oct 29, 2013
Priority date	Nov 28, 2012
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

A pressure measuring cell includes an elastic measuring membrane which is contactable with a first pressure on a first side and with a second pressure on a second side facing away from the first side. The measuring membrane is deflectable as a function of a difference between the first pressure and the second pressure, wherein the measuring membrane pressure-tightly isolates a first volume, which is facing the first side of the measuring membrane, from a second volume, which is facing the second side of the measuring membrane. The pressure measuring cell further includes a transducer for transducing the pressure dependent deflection of the measuring membrane into an electrical or optical signal. The measuring membrane has in the equilibrium state of the measuring membrane compressive stresses at least at the surface of the measuring membrane at least in a radial edge region, in which in the deflected state of the measuring membrane under pressure loading tensile stress maxima occur.

First claim

The invention claimed is:

1. A method for preparing a measuring membrane for a pressure measuring cell, comprising:
providing a membrane blank of a ceramic material;
introducing compressive stresses into the membrane blank by surface treatment, said surface treatment includes grinding and/or lapping; and
lessening said compressive stresses in at least a first radial region of the measuring membrane, wherein:
said compressive stresses in at least a second radial region of the measuring membrane, respectively are lessened less strongly; and
said lessening of the compressive stresses occurs by means of local treatment by means of laser radiation.

2. The method as defined in claim 1 , wherein:
the measuring membrane includes: an elastic measuring membrane, which is connectable with a first pressure on a first side and with a second pressure on a second side facing away from said first side, said measuring membrane is deflectable as a function of a difference between said first pressure and said second pressure; and a transducer for transducing the pressure-dependent deflection of said measuring membrane into an electrical or optical signal, wherein:
said measuring membrane pressure tightly isolates a first volume, which faces said first side of said measuring membrane from a second volume, which faces said second side of said measuring membrane; and
said measuring membrane has in an equilibrium state of said measuring membrane compressive stresses at least at the surface of said measuring membrane, at least in said second radial region, said second radial region being a radial edge region, in which in the deflected state of said measuring membrane, under pressure loading tensile stress maxima occur.

Assignees

• Endress & Hauser Gmbh & Co Kg

Inventors

• Drewes Ulfert
• Ponath Nils
• Rossberg Andreas
• Schmidt Elke

Classifications

• G01L19/06 Primary

  Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa · CPC title

• G01L9/0044 Primary

  Constructional details of non-semiconductive diaphragms · CPC title

• G01L19/0618

  Overload protection · CPC title