Stator member and vacuum pump

Patent metadata

Field	Value
Publication number	US-9759233-B2
Application number	US-201214349022-A
Country	US
Kind code	B2
Filing date	Oct 3, 2012
Priority date	Oct 31, 2011
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

To provide a stator member that facilitates thermal radiation from a surface thereof and thermal conduction to an adjacent member, and a vacuum pump that contains the stator member. For the purpose of enhancing heat dissipation of a rotor portion, surface treatment removal processing is performed on a predetermined section of a thread groove spacer in order to efficiently release heat of the thread groove spacer toward a base and a stator blade spacer. More specifically, the surface treatment removal processing removes the surface treatment of the base and a section where the stator blade spacer comes into contact with the thread groove spacer. This surface treatment removal processing is executed simultaneously with finishing processing.

First claim

What is claimed is:

1. A stator member, which is provided in a gas transfer mechanism disposed inside a casing having an inlet port and an outlet port, wherein the stator member faces a rotating body that is disposed on a rotating shaft and transfers gas from the inlet port to the outlet port, and moreover the stator member is subjected to a surface treatment in at least a part thereof, the surface treatment decreasing thermal conductivity by increasing emissivity,
wherein the stator member is not subjected to the surface treatment on a contact surface of the stator member, and wherein the contact surface is in contact with at least one of other members,
the gas transfer mechanism has a thread groove type pump portion, and the stator member is a thread groove spacer, and
the thread groove spacer is not subjected to the surface treatment at least on a part of a surface of the thread groove spacer that faces the rotating body.

2. The stator member according to claim 1 , wherein the gas transfer mechanism further has a turbomolecular pump portion, and further has a stator blade spacer as the stator member.

3. The stator member according to claim 1 , wherein the gas transfer mechanism further has a turbomolecular pump portion, and further has a stator blade as the stator member.

4. A vacuum pump, comprising the casing, the rotating shaft, the rotating body, and the stator member according to claim 1 .

5. The vacuum pump according to claim 4 , wherein the rotating body is joined to a cylindrical body made of a fiber reinforced composite material.

6. A vacuum pump, comprising the casing, the rotating shaft, the rotating body, and the stator member according to claim 2 .

7. The vacuum pump according to claim 6 , wherein the rotating body is joined to a cylindrical body made of a fiber reinforced composite material.

Assignees

• Sakaguchi Yoshiyuki
• Okudera Satoshi
• Edwards Japan Ltd

Inventors

• Sakaguchi Yoshiyuki
• Okudera Satoshi

Classifications

• F04D29/522

  especially adapted for elastic fluid pumps · CPC title

• F04D19/04

  specially adapted to the production of a high vacuum, e.g. molecular pumps · CPC title

• F05D2300/603

  Composites; e.g. fibre-reinforced · CPC title

• F04D29/023

  especially adapted for elastic fluid pumps · CPC title

• F04D29/5853 Primary

  heat insulation or conduction · CPC title