Polymer, organic layer composition, organic layer, and method of forming patterns

Patent metadata

Field	Value
Publication number	US-9758612-B2
Application number	US-201514931243-A
Country	US
Kind code	B2
Filing date	Nov 3, 2015
Priority date	Feb 17, 2015
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

A polymer, an organic layer composition, an organic layer, and a method of forming patterns, the polymer including a moiety represented by the following Chemical Formula 1:

First claim

What is claimed is:

1. A polymer including a moiety represented by Chemical Formula 1:

wherein, in Chemical Formula 1,
* is a linking point to a neighboring atom,
m is 0 or 1,
A 1 and A 2 are each independently a divalent group including one of the following moieties,

wherein, in the above moieties,
R 1 , R 2 and R 3 are each independently hydrogen, a hydroxy group, a methoxy group, an ethoxy group, a halogen, a substituted or unsubstituted C6 to C30 aryl group, or a combination thereof,
Z 1 to Z 6 are each independently a hydroxy group, a methoxy group, an ethoxy group, a halogen, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C3 to C30 cycloalkenyl group, a substituted or unsubstituted C1 to C20 alkylamine group, a substituted or unsubstituted C7 to C20 arylalkyl group, a substituted or unsubstituted C1 to C20 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heteroaryl group, a substituted or unsubstituted C1 to C4 alkyl ether group, a substituted or unsubstituted C7 to C20 arylalkylene ether group, a substituted or unsubstituted C1 to C30 haloalkyl group, or a combination thereof, and
a, b, c, d, e, and f are each independently an integer of 0 to 2,

A 3 and A 4 are each independently a divalent group represented by Chemical Formula 2 or Chemical Formula 3, below,

wherein, in Chemical Formula 2,
X 1 and X 2 are each independently hydrogen or a substituted or unsubstituted C6 to C30 aryl group, and
at least one of X 1 and X 2 is a substituted or unsubstituted C6 to C30 aryl group, wherein, in Chemical Formula 3,
X 3 is a substituted or unsubstituted C6 to C30 arylene group, and
X 4 to X 7 are each independently a substituted or unsubstituted C6 to C30 aryl group,

wherein, in Chemical Formula 1, when A 1 or A 2 is a divalent group including the moiety

the divalent group is bonded to A 3 or A 4 at the nitrogen-containing ring of the moiety.

2. The polymer as claimed in claim 1 , wherein, in Chemical Formulae 2 and 3, the C6 to C30 aryl group is a monovalent group including one of the following moieties:

3. The polymer as claimed in claim 1 , wherein:
one of A 3 or A 4 is a divalent group represented by Chemical Formula 3, and
in Chemical Formula 3, the C6 to C30 arylene group is a divalent group including one of the following moieties:

4. The polymer as claimed in claim 1 , wherein:
one of A 3 or A 4 is a divalent group represented by Chemical Formula 2, and
in Chemical Formula 2, at least one of X 1 and X 2 is a substituted or unsubstituted naphthalene group, a substituted or unsubstituted biphenyl group, a substituted or unsubstituted pyrene group, a substituted or unsubstituted perylene group, a substituted or unsubstituted benzoperylene group, a substituted or unsubstituted coronene group, or a combination thereof.

5. The polymer as claimed in claim 1 , wherein:
one of A 3 or A 4 is a divalent group represented by Chemical Formula 3, and
in Chemical Formula 3, at least one of X 3 to X 7 is a substituted or unsubstituted naphthalene group, a substituted or unsubstituted biphenyl group, a substituted or unsubstituted pyrene group, a substituted or unsubstituted perylene group, a substituted or unsubstituted benzoperylene group, a substituted or unsubstituted coronene group, or a combination thereof.

6. The polymer as claimed in claim 1 , wherein the polymer includes a moiety represented by one of the following Chemical Formulae 1-1 to 1-4:

wherein, in Chemical Formulae 1-1 to 1-4,
R 4 is hydrogen, a hydroxy group, a halogen, a substituted or unsubstituted C6 to C30 aryl group, or a combination thereof,
Z 11 to Z 20 are each independently a hydroxy group, a methoxy group, an ethoxy group, a halogen, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C3 to C30 cycloalkenyl group, a substituted or unsubstituted C1 to C20 alkylamine group, a substituted or unsubstituted C7 to C20 arylalkyl group, a substituted or unsubstituted C1 to C20 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heteroaryl group, a substituted or unsubstituted C1 to C4 alkyl ether group, a substituted or unsubstituted C7 to C20 arylalkylene ether group, a substituted or unsubstituted C1 to C30 haloalkyl group, or a combination thereof,
k, l, m, n, o, p, q, r, s, and t are each independently an integer of 0 to 2,
n 0 is an integer of 2 to 300, and
* is a linking point to a neighboring atom.

7. The polymer as claimed in claim 1 , wherein the polymer has a weight average molecular weight of about 1,000 to about 200,000.

8. An organic layer composition, comprising:
a solvent; and
a polymer including a moiety represented by the following Chemical Formula 1,

wherein, in Chemical Formula 1,
* is a linking point to a neighboring atom,
m is 0 or 1,
A 1 and A 2 are each independently a divalent group including one of the following moieties,

wherein, in the above moieties,
R 1 , R 2 and R 3 are each independently hydrogen, a hydroxy group, a methoxy group, an ethoxy group, a halogen, a substituted or unsubstituted C6 to C30 aryl group, or a combination thereof,
Z 1 to Z 6 are each independently a hydroxy group, a methoxy group, an ethoxy group, a halogen, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C3 to C30 cycloalkenyl group, a substituted or unsubstituted C1 to C20 alkylamine group, a substituted or unsubstituted C7 to C20 arylalkyl group, a substituted or unsubstituted C1 to C20 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heteroaryl group, a substituted or unsubstituted C1 to C4 alkyl ether group, a substituted or unsubstituted C7 to C20 arylalkylene ether group, a substituted or unsubstituted C1 to C30 haloalkyl group, or a combination thereof, and
a, b, c, d, e, and f are each independently an integer of 0 to 2,

A 3 and A 4 are each independently a divalent group represented b

Assignees

• Samsung Sdi Co Ltd

Inventors

• Namgung Ran
• Kwon Hyo-Young
• Kim Seung-Hyun
• Rathwell Dominea
• Mun Soo-Hyoun
• Jung Hyeon-Il
• Heo Yu-Mi

Classifications

• H10P76/20

  of masks comprising organic materials · CPC title

• H10P76/2043

  using an anti-reflective coating · CPC title

• C08G12/26

  with heterocyclic compounds · CPC title

• C08G61/124 Primary

  with a five-membered ring containing one nitrogen atom in the ring · CPC title

• C08G2261/148

  Side-chains having aromatic units · CPC title